Excimer laser

03/01/1997

Excimer laser

The NovaLine LITHO excimer laser features a 1-kHz repetition rate, <0.8 pm bandwidth, and 10-W stabilized output power (optional <250 pm and 15 W). The NovaTube metal/ceramic laser tube delivers very good laser tube lifetime, high operating consistency and reliability, and long maintenance intervals with low operating costs. The HaloSafe solid-state halogen generator eliminates the storage and handling of toxic gases, and the polarization coupled resonator design improves laser efficiency, thus extending component lifetimes. The resonator also improves pulse-to-pulse stability, giving better process control and higher yields. Lambda Physik Inc., G?ttingen, Germany; ph 49/551-6938-154, fax 49/551-68691.