Vertical multiple transfer sorter

03/01/1997

Vertical multiple transfer sorter

The Vertical Multiple Transfer wafer sorter allows automatic single and batch wafer sorting, after noncontact batch ID read. Four functions are integrated into the machine: batch notch finding in two cassettes; batch noncontact wafer ID reading with OCR and BCR software; single wafer sorting; and batch wafer transfers. The sorter is SECS/GEM compliant and ESD safe; it has its own cleanroom table and has an optional back-to-back, face-to-face wafer loading function. Through batch ID reading before wafer moves (2-3 min for 50 wafers), the transfer cycle is optimized by comparison with traditional sorters. Footprint is 950 ? 500 mm. Recif SA, Aussonne, France; ph 33/562-134-740, fax 33/561-852-766.