Exhaust abatement system

03/01/1997

Exhaust abatement system

Model 4214 TPU is an exhaust abatement system that removes all PFC gases, including the most stable of them, CF4. Destruction efficiencies (DREs) of 96-99% have been recorded for C2F6 and averaged 99.53% in a leading single-wafer, multichamber production tool. An oxygen inject facilitates the destruction of CF4 at a DRE of >95%. Edwards High Vacuum International, Crawley, UK; ph 44/1293-528-844, fax 44/1293-407-451.