Inductively coupled plasma mass spectrometry

03/01/1997

Inductively coupled plasma mass spectrometry

The UltraMass-700 inductively coupled plasma mass spectrometer (ICP-MS) delivers a fully automated solution for ultratrace element determinations performed by chipmakers and suppliers of high-purity chemicals and reagents. The instrument has an all-MacroTorr turbopump vacuum system that results in lower background levels for improved semiconductor detection limits, and fast pumpdown for enhanced productivity. It meets the current demand for parts-per-trillion level detection limits and also future needs for parts-per-quadrillion levels. Incorporating Turner Interlaced Coils coupled to a 40 MHz solid-state RF generator, UltraMass-700 eliminates secondary discharge and facilitates the routine and automatic application of the Cool Plasma technique, which allows SEMI specifications to be achieved without supplementary graphite furnace AA analysis. This technique permits Fe, Ca, Li, Mg, Na, and K to be determined down to parts-per-quadrillion levels by the elimination of argon-related polyatomic interferences. Varian Analytical Instruments, San Fernando, CA; ph 800/926-3000, URL http://www.varian.com.