ATE-to-emission microscope interface

03/01/1997

ATE-to-emission microscope interface

Precise locations of functional defects in semiconductor devices are rapidly pinpointed with Soft Docking Interface (SDI). The device being tested is socketed at the top of SDI, which creates a vibration-free platform for imaging the light-tight enclosure of the microscope. Test vectors from the ATE can be run at full speed through SDI, which has a rated speed of 150+ MHz. Once the device is socketed in SDI, the exact location of the failure can be found in minutes. The vibrationless stability of the system allows imaging even at the highest magnification of 1500?. Hypervision Inc., Fremont, CA; ph 510/651-7768, fax 510/651-1415, e-mail [email protected]