Arsine delivery

03/01/1997

Arsine delivery

SDS2, for ion implantation using arsine, has good stability and a shelf life of two years; it represents a new approach to safe delivery of arsine and phosphine, allowing users the equipment flexibility of a gas source with the safety and performance of a solid source. Using pure Group V hydrides at low pressure, SDS2 delivers gas based on the pressure differential between the SDS cylinder and the ion source of the implanter. Matheson Electronic Products Group, San Jose, CA; ph 408/971-6500, fax 408/275-8643.