Equipment control software

03/01/1997

Equipment control software

ControlPRO software has been designed for use in a next-generation cluster tool platform for 300-mm wafer manufacturing. Hardware for the system, developed in Japan by Toyoda Loom Works and Kanematsu Semiconductor, consists of a high-vacuum robot, and a transport module and cassette module. Embedded ControlPRO software controls and integrates these modules into the system, which conforms to SEMI standards. Realtime Performance Inc., Sunnyvale, CA; ph 408/245-6537, fax 408/245-6547, e-mail [email protected], URL http://www.rp.com