Uninterruptible power and vacuum supply

03/01/1997

Uninterruptible power and vacuum supply

UPVS provides continuous back-up power and wafer-handling vacuum for wafer process tools and handling equipment, preventing wafer breakage. The vacuum section has a high-reliability vacuum pump with a supply reservoir. Both power and vacuum are true zero transfer time. The front panel displays various real-time power and vacuum conditions in a flow chart fashion. Conditions can also be monitored through the unit`s communication ports. Q Systems Inc., Bronxville, NY; ph 914/237-6728, fax 914/967-5964, e-mail [email protected].