Japan

03/01/1997

Japan

Air Products Japan Inc. and Showa Denko K.K. have formed a joint venture to manufacture two specialty gases - tetrafluoromethane (CF4) and hexafluoroethane (C2F6) - at Showa Denko`s Kawasaki plant near Tokyo. The venture, known as Showa Denko Air Products Co. Ltd., will market the compounds to semiconductor manufacturers for use as dry etchants and chamber clean gases.

Yokogawa Electric Corp. (YEC), Mitaka City, Tokyo, a maker of industrial automation equipment, has entered a joint technology venture agreement with Concept Systems, Fremont, CA, a manufacturer of epitaxial CVD equipment. The venture provides for the development of thin-film epitaxial CVD equipment for processing wafers up to 300 mm. The agreement includes YEC`s initial multimillion dollar investment and technical support; Concept will continue to utilize its Japanese and other Asian sales and distribution representatives.