Vacuum topics

02/01/1997

Vacuum topics

The "Design challenges in vacuum robotics" article by Ed Korczynski (October, p. 62) is excellent. I have a better understanding now of the history of materials selection, vacuum seal evolution, and magnetic coupling. It will be very useful in my upcoming robot reliability test work on our Centura platform. I believe UHV robots will eventually become popular. Mr. Korczynski revealed a lot of interesting areas for research.

Charles J. Jiang, mechanical engineer

Applied Materials Inc.

Santa Clara, CA