Literature Update

02/01/1997

Compressed air filtration catalog

A 128-page, four-color catalog describes a line of compressed air filter products. Featured are in-line filters, ASME coded vessels, instrumentation filters, high-pressure filters, FRLs, filter accessories, and Fine Fit conversion elements. The catalog includes specs, dimensions, and ordering information, as well as a section on coalescing filtration theory. Parker Hannifin Corp., Oxford, MI; ph 216/531-3000, fax 216/531-0618, URL http://www.parker.com.

Thick-film materials selector guide

This EMCA-REMEX product guide describes a line of cermet thick-film materials for semiconductor, hybrid, and component uses in electronics applications. Sections of the guide are devoted to gold, silver, and copper MULTISYST series of conductors, resistors, dielectrics, and other resistor systems and components. Another section describes a line of environmentally friendly cermet thick-film materials. Ablestik EM&A, National Starch and Chemical Co., Bridgewater, NJ; ph 800/797-4992, fax 908/417-5699, e-mail [email protected].

Backside inspection tutorial

A CD-ROM provides a comprehensive tutorial on backside semiconductor inspection, focusing on the Backside Emission Analysis Microscope System (BEAMS). Topics covered include: the importance of backside work; the theory of emission detection through backside silicon; backside imaging systems and detector sensitivity; breakthroughs in backside chip preparation; inspection techniques for backside inspection of packages; backside wafer-level preparation and probing technology; essential facts about illumination concerns from the backside; and the "how-to" mechanics of backside preparation and inspection. The CD is illustrated with more than 170 images and graphics, animation, and actual video clips of the process used for backside preparation. An image gallery provides examples of BEAMS results. Hypervision Inc., Fremont, CA; ph 510/651-7768, fax 510/651-1415, e-mail [email protected].

Steel bellows couplings brochure

A four-page brochure provides data on flexible steel bellows couplings. AccuLock couplings transmit torques up to 600 Nm (5310 in-lb) on shafts of 9- to 50-mm dia. without adding backlash to the system. The low-inertia couplings compensate for radial, axial, and angular misalignments, while providing high tortional stiffness and maximum torque transmission in their sizes. They are suitable for high-performance motion control applications. Thomson Micron LLC, Ronkonkoma, NY; ph 516/467-8000, fax 516/467-9814.

SIMS analysis tool brochure

This full-color brochure describes the capabilities and applications of an analysis tool for focused ion beam (FIB) workstations. The SIMSmap III provides high lateral resolution elemental analysis for defect review, process monitoring, failure analysis, and particle diagnostics by integrating a quadrupole mass spectrometer on the same vacuum chamber with the FIB column. This tool also provides improved chemical-specific, high-aspect ratio endpoint detection capability for deep probe hole milling. SIMS data are generated in parallel with normal FIB milling functions and are available in the form of elemental maps, depth profiles, and mass spectra. This information is useful in determining the source of particle contamination in semiconductor processing. FEI Co., Hillsboro, OR; ph 503/640-7500, fax 503/640-7509.

Custom gas distribution systems brochure

This brochure details the capabilities of an Equipment Technology Group that designs and manufactures custom gas delivery systems. The group develops the systems from concept to installation for specific applications. Quality components combined with strict quality control and performance testing preserve the purity and integrity of the gases. Scott Specialty Gases, Plumsteadville, PA; ph 215/766-8861, fax 215/766-2476, URL http:/ //www.scottgas.com.

Vacuum gauge transmitter brochure

An illustrated brochure describes a hot-cathode ionization vacuum gauge transmitter for process control and base pressure measurement (from 1?10-10 to 75 mtorr). The ITR100 ionization smart sensor indicates within ?10% of the true pressure, has a repeatability within < 2% of the reading, and can produce the same reading under varying mounting and ambient conditions. The brochure also contains a specs chart with information on measurement range, measurement uncertainty, long-term sensitivity drift, power supply, output signal, and dimensions. Leybold Inficon Inc., East Syracuse, NY, ph 315/434-1100, fax 315/437-3803, e-mail [email protected], URL http://www.inficon.com.

Advanced engineering plastics guide

This guide profiles a range of plastic stock shapes for machining in rod, plate, and tubular bar form with temperature resistance from 200-800?F (93-427?C). The materials are designed to address the diverse needs of the semiconductor industry, including electrostatic dissipation, chemical resistance, dimensional stability, high purity, and thermal resistance. The guide also details the performance characteristics of the materials, and highlights typical applications. DSM Engineering Plastic Products Inc., Reading, PA; ph 800/729-0101.

MFC brochure

A 20-page brochure describes a line of mass flow control products, including mass flow controllers (MFCs) with piezoelectric, solenoid, and thermal control valves; digital, liquid, high temperature, compact, and bottom-mounted MFCs; mass flow meters; thermal vaporizer systems; and mass flow control accessories. The description of each MFC model is accompanied by listings of full-scale ranges, performance information, and distinguishing features. Also included in the brochure is a section on the fundamentals of MFCs and an illustrative cutaway of an advanced model. Aera, Austin, TX; ph 512/339-7100, fax 512/339-8889.

Epoxy brochure

This full-color brochure describes the formulation and manufacturing of adhesives and coatings for semiconductor packaging and processing. Materials available include snap-cure, fast-cure, and conventional-cure die-attach adhesives; screen-printable polymers for wafer coating; chip encapsulants for mechanical and environmental protection for chip and wire assemblies; and low-stress adhesives for bonding large die. Polymer Flip Chip and Advanced Wafer Passivation technologies are also described. Epoxy Technology Inc., Billerica, MA; ph 800/227-2201 or 508/667-3805, fax 508/663-9782.

Thermal systems newsletter

This quarterly newsletter titled Watts Current provides information on specifying heaters, sensors, and controls. Designed to explore new product uses in a variety of application-specific features, the publication also includes technical training sections, information on new technical literature, compliance and regulation considerations, and quick reference guides on engineering practices. Watlow Electric Manufacturing Co., St. Louis, MO; ph 314/878-4600, fax 314/878-6814, URL http://www.watlow.com.

VIDEO

Ultrafiltration for spent CMP slurries videocassette

An animated, four-minute videocassette describes Microza ultrafiltration systems for the treatment of spent CMP slurries. Clear permeate that passes through the Microza ultrafiltration membrane can, in most cases, be readily discharged after pH adjustment. The spent slurry can be concentrated up to 15-20% solids, and the volume of wastewater to be treated can be reduced >a hundredfold. The brochure also illustrates the structure of the hollow fiber ultrafiltration module that can tolerate the abrasive suspensions of slurries. The system is compact and fully automated with safety interlocks. Pall Ultrafine Filtration Co., Port Washington, NY; ph 800/289-7255 or 516/484-3600, e-mail [email protected], URL http://www.pall.com.

CD-ROM

Moisture analysis CD-ROM

This PC-compatible CD-ROM discusses and illustrates new technology in process gas moisture measurement for semiconductor manufacturing. The disk includes application information that describes the capabilities of the model 5800 moisture analyzer and the model 5900 ultra high purity moisture analyzer in measuring moisture content from single-digit ppb to tens of ppm, and details key locations in a fab where moisture measurement is essential; an installation/operation segment that explains the path of the sample line between the dropsite and the analyzer; and a financial worksheet that allows semiconductor manufacturers to calculate the cost of production time and compare the continuous monitoring capabilities of several moisture analyzers. AMETEK, Newark, DE; 302/456-4400, fax 302/456-4444.

Solenoid drain valve flier

This flier describes an internally piloted solenoid drain valve that automatically drains compressed air condensate from air dryers, receivers, separators, aftercoolers, and filters. The EDV-2002 Terminator is available in AC or DC voltages with standard connection sizes of 0.25 or 0.5 in., and is rated for maximum working pressure of 300 psig. A nylon NEMA 4 houses the timer, which can be adjusted for valve open times of 1-60 sec and cycle times of 1-60 min. Other features detailed in the brochure are DIN connectors, a test function, and LED status lights. Van Air Systems Inc., Lake City, PA; ph 814/774-2631, fax 814/774-3482.

Advanced polymer brochure

This brochure highlights a line of thermally and electrically conductive epoxies and silicones, including one-part systems, room temperature cure products, and flexible conductive adhesives. Featured is a chart that describes performance characteristics of the products and provides information such as conductivity, viscosity, pot life, and cure schedule. New items include TRA-DUCT 2919 (a flexible epoxy), TRA-DUCT 2979 (a one-part epoxy), and TRA-DUCT 6901 (a silicone adhesive). A variety of precisely dispensed (tolerances of ?1%) packages ranging from 2-gm and larger BIPAX to premixed and frozen syringes is also available. TRA-CON, Bedford, MA; ph 800/872-2661 or 617/275-6363, fax 617/275-9249.