In-line inspection system

01/01/1997

In-line inspection system

The Surfscan 7700 system`s clustering ability helps to speed response to detected contaminants and process excursions by eliminating the need to perform clustering analysis on a separate data analysis station. An optical character recognition/bar code recognition package tracks wafers through the process flow. Enhanced software allows users to review defects immediately following detection; microscope enhancements include automatic wafer alignment and registration, full post-inspection review of up to 26 wafers, and the ability to sort and review defects by such parameters as region, scattered light intensity, and classification code. Tencor Instruments, Mountain View, CA; ph 415/969-6767, fax 415/968-9482.