Mass flow controller

01/01/1997

Mass flow controller

The Type 1640 pressure-based mass flow controller (MFC) combines the principles of sonic flow and pressure measurement to provide accurate and stable flow control over a wide range of inlet and outlet pressures. It has the same footprint and operates with the same ?15 Vdc power source and 0.5 Vdc signal input/output as a thermal MFC, allowing straightforward/drop-in replacement. The 1640 is suited for use in safe delivery systems (SDS) applications in the ion implantation process, in which source gases are stored at pressures that start at below 760 torr and drop as the gas is depleted. MKS Instruments Inc., Andover, MA; ph 800/227-8766 or 508/975-2350, e-mail [email protected], http://www.mksinst.com