Intermetal dielectric processing

01/01/1997

Intermetal dielectric processing

A new coating technology features a closed-bowl technique that gives good processing results for low-k dielectric applications. Advantages of the system, named Falcon, include a low solvent evaporation rate, allowing improved material distribution, and a controlled ambient airflow that minimizes turbulence, generates no particulates during coating, and provides reduced sensitivity to temperature and humidity variations. The building blocks of Falcon include a modular system architecture with centralized robotic handling mechanisms for better configuration flexibility; a stacked hotplate bake process to 500?C; compatibility with i-line and DUV technolgies; and an integrated SMIF environment. Fairchild Technologies USA Inc., Fremont, CA; ph 510/659-8370, fax 510/659-9407.