AMC control

01/01/1997

AMC control

VaporSorb 1000 is a filtration system for use with ASML`s PAS 5500/300 DUV wafer stepper. Its Interstack early-warning monitoring technology eliminates process risk associated with airborne molecular contamination (AMC), and this, combined with immense Bronsted base capacity, assures that chemical air filter systems can handle even the most serious excursions in fab contamination levels. The Interstack permits monitoring of any changes in the filter`s efficiency immediately upstream of the third of the four in-series chemical filters. Extraction Systems Inc., Franklin, MA; ph 800/992-0281 or 508/553-3900, fax 508/553-3901.