Yield loss analysis software

01/01/1997

Yield loss analysis software

ChargeMap software, for on-site analysis of CHARM-2 data, uncovers charging problems on several types of IC process equipment, as evidenced by spatial correlation of CHARM-2 charging maps with areas of heavy yield loss on product wafers. CHARM-2 monitor wafers give fab engineers the ability to measure the charging characteristics of plasmas or ion beams before product wafers are exposed. Comparison of equipment charging "fingerprints" obtained during periods of high yield with those obtained during a period of reduced yield identifies the offending equipment. Wafer Charging Monitors Inc., Woodside, CA; ph 415/851-9313, fax 415/851-2252, e-mail [email protected].