Clarification
01/01/1997
Clarification
In "Design challenges in vacuum robotics" (Oct. 1996, p. 63), Fig. 2`s caption should have identified the system as an Applied Materials` Metal Etch DPS Centura.
01/01/1997
01/01/1997
Clarification
In "Design challenges in vacuum robotics" (Oct. 1996, p. 63), Fig. 2`s caption should have identified the system as an Applied Materials` Metal Etch DPS Centura.