PFA pinch valve

01/01/1997

PFA pinch valve

The Dymak PFA pinch valve is intended for use in semiconductor applications that require high-purity chemical handling. Its all-PFA pinch element provides good chemical resistance and low particle generation. This, combined with its straight-through flow path, makes the Dymak suitable for chemistries such as the slurries used in CMP. The straight-through flow path has low potential for particle entrapment and creates less turbulence than conventional valve designs, resulting in high flow capabilities. The valve features a replaceable, one-piece pinch element, eliminating a potential leak path at the diaphragm/valve body interface; it is entirely lubricant-free and available in both manual and pneumatic versions. Fluoroware Inc., Chaska, MN; ph 612/448-8193, fax 612/448-5576.