Optical inspection tool

01/01/1997

Optical inspection tool

The INS 3000 features one-, two-, or three-cassette operation with an integrated noncontact prealigner. Its optical system ensures good optical quality under all available imaging techniques (brightfield, darkfield, differential interference contrast, and confocal). The viewing extension from the optical axis and air flow control virtually eliminate excess particulate. Cassette load height is <900 mm and horizontal load is <175 mm, adhering to the new SEMI guidelines. The controls of the INS 3000 are based ona Windows NT graphical user interface that is coupled with a custom touch-control panel, eliminating the need to look away from the viewing head to see the controls. Other features include ADC, auto alignment, and film thickness measurement. Leica Inc., Deerfield, IL; ph 800/909-3935, fax 201/236-5917.