Stylus Profilers

04/01/2000

The Dektak Series V line of stylus profilers can automatically access the entire surface of substrates up to 400 mm (16-in.) square, such as PCBs and flat panel displays. The positioning stage is capable of handling heavy samples, such as CMP plates and precision-machined parts. The profilers can perform long scans for measuring substrate flatness or planarity, as well as surface roughness measurements with high horizontal resolution.

Digital Instruments

Veeco Metrology Group

Santa Barbara, Calif.