Surface Height Mapper

04/01/2000

The NanoMapper metrology tool provides whole wafer topology data for 200-mm and 300-mm wafer sizes using non-contact optical measurement to quantify nanometer scale surface height variations. It responds to process development needs for leading-edge semiconductor devices down to 0.1 micron. Tracking the phase of the optical signal using proprietary interferometric technology results in the sub-nanometer resolution of the measurement.

ADE Phase Shift

a subsidiary of ADE Corp.

Tucson, Ariz.