In Uncharted Territory
01/01/2007
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![]() 2. The wafer loader on this Stratus 300 can handle both 200- and 300-mm wafers simultaneously. |
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![]() 3. John Harrell, systems engineer for the Stratus electrodeposition tool, demonstrates the wafer holder and how it is placed in the plating cell. |
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![]() 4. Kyle Martin, assembly technician, really “gets into” his work assembling the Stratus tool. |
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![]() 5. Shown here loading 300-mm wafers into the Nimbus, the front end of this tool can be converted in less than two hours to handle 150- or 300-mm wafers. |
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![]() 6. Matt Dorogi explains how the wafers travel through the system on a tray for robust handling. Performance is same or better than that of a cluster tool process. |
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![]() 2. A picture is worth a thousand words. Lee takes the time to illustrate a point to Flower. |
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![]() 3. Zhang demonstrates the software interface for the Geneva tool. |
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![]() 4. We got to see close-up how applying vacuum during the reflow process removes surface tension, resulting in fewer voids. |
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![]() 5. Keith Saltmarsh, applications engineer, inspects a FOUP before installation. |
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![]() 2. SEZ has grown so rapidly that their influence and size caused the city of Villach to name the street with all of their plants “SEZ - Strasse.” |
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![]() 3. Employees and guests enjoy a mid-day coffee and soda in the employees’ café. |
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![]() 5. This solid chuck supports the wafer during cleaning. |
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![]() 7. Kurt Lackenbucher, executive VP & COO, SEZ Group, backs up Gail Flower and Johann Bylek as he invites us to come in and talk to the staff at SEZ. |
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