Issue

WG CC042 seeks feedback to create liquid particle counting RP

10/01/2007

The Institute of Environmental Science and Technology (IEST) has begun assessing the need for a Recommended Practice (RP) on liquid particle counting (LPC). Working Group CC042, formed last November, has been assigned to work on RP-CC042.1, “Sizing and counting of submicrometer liquid-borne particles using optical discrete-particle counters,” with a focus on applications in the semiconductor, flat-panel display, and data storage industries. The Working Group intends to complete a votable version of the RP by the end of next year.

The RP will cover the following topics:

An overview of light scattering technology
Applications of LPC instruments-batch and inline types
Cumulative vs. differential counts
Coincidence level
Lower particle size detection limit
Bubble issues
Refractive index effects
Calibration verification
Particle extraction methods
Statistics
Instrument noise
Flow rate
Sensor preventive maintenance
Counter correlation

The Working Group has broad participation from LPC manufacturers, end users, and consultants in the microelectronics industry. The members would like to gather more feedback from end users to make the document as effective as possible. If you are interested in contributing to this RP, please contact Huaping Wang, chair of WG CC042, at [email protected], or (952) 556-4532.

The Working Group’s next meeting will take place at IEST’s Fall Meeting on November 14 in Chicago.