Issue



Table of Contents

Solid State Technology

Year 2006
Issue 10

DEPARTMENTS

Editorial


MEMS moves to the mainstream

The MEMS market has long been in a state of extreme fragmentation. Even now, according to a new report from France-based market research and consulting firm Yole Développement, MEMS devices are actively being produced by some 300 companies, 250 of which sell less than $20 million worth of products annually.


World News


World News

Worldwide silicon area wafer shipments rose another 4% in 2Q06 vs. the prior quarter to nearly 2000 million sq. inches (MSI), more proof that wafer suppliers are enjoying robust sales and heavy demand.


Tech News


SEMATECH optimizes the gate stack with dual high-k and metal gate

At the Symposium on VLSI Technology in June, SEMATECH reported on a new approach it has developed to meet ITRS requirements for low-standby power (LSTP) transistors for the 45nm technology generation.


Tech News


Giving life to self-healing chips: preventing hard silicon failures

In a bid to enhance the performance of microprocessors, the Semiconductor Research Corp. (SRC) recently said it has a plan to develop self-healing chips-i.e., chips that don’t fail, having been designed to diagnose when components wear out and heal themselves on the fly.


Tech News


"Jumpy" chromophores could enable molecular electronics

Researchers at the U. of Pennsylvania and St. Josephs U. are touting their work on chromophores, which when linked together enable transfer of electrical charges that exceed mobility in organic semiconductors by up to a factor of three, and hold promise for applications in displays and solar cells.


Vacuum Technology


Vacuum systems for ALD

Atomic layer deposition (ALD) processes require vacuum conditions both for proper deposition and adequate purging of precursors from the chamber.


Product News


Product News

The IX-250 excimer laser micromachining system is a Class 1 industrial-grade workstation that can accommodate a variety of excimer lasers, offering 12 axes of motion, with 250mm×200mm travel (for processing 150mm wafers).


Industry Forum


Manufacturing challenges for immersion below 45nm

With the introduction of the immersion technique into deep-submicron patterning, the semiconductor industry will manage to keep up with the scaling roadmap using refraction-based lithography for another two, hopefully three generations before switching to the most likely successor, extreme ultraviolet (EUV) lithography.


FEATURES

Cover Article


Using oxygen and hydroxyl radicals for batch-furnace oxidation

Balancing the lifetime and residence time of radicals is critical to achieving acceptable radical oxidation growth rates and uniformities in large-batch reactors.


Implantation


Meeting future SDE requirements using co-implantation and RTA

The requirements for the source/drain extensions of future devices are increasingly more demanding with respect to dopant activation, junction depth, and abruptness as semiconductor technology continues to scale [1].


Resists


Controlling CD and process window limits for implant patterning

As design rules have shrunk, the overlay of implant layers has become a problem [1].


Photomasks


A process window-based approach to mask optimization

Different performance and wafer-yield criteria apply to different types of integrated circuits, and the masks for those circuits may need to be optimized to achieve maximum value of production.