Issue



Table of Contents

Solid State Technology

Year 1999
Issue 12

DEPARTMENTS

Editorial


EDITORIAL: Another century of discovery?

As the odometer spins over from 1999-2000, a glance at the speedometer shows the speed of discovery moving upward at a steadily faster pace.


Tech News


Technology News

Significant progress with pilot-line 300mm lithography; Semi session shows standards emerging for 300mm tools; SVGL puts up fight for 130nm node;


Eurofocus


EuroFocus

AMD opens Dresdon fab; IMEC ships 0.25µm design kits; Brooks Automation buys Jenoptik Infab; UK consortium plans silicon technology course


Asiafocus


AsiaFocus

Toshiba enters joint venture with SanDisk; Japan plans a 5-year, US$2 billion semicon development project; Sony outlines roadmap for PlayStation


Market Watch


MARKET WATCH: Chemicals, gases, and handling for IC manufacturing

While the chemicals industry stuffs nearly all molecules into chemicals-market metrics, typically lumping together metals, gases, liquids, etc., the semiconductor industry has traditionally distinguished between gases, wet chemicals, and related markets.


New Products


Product News

Low-k spin-on clusters; Automated stocker and delivery system; System-on-a-chip test; Large panel singulation and more.


Literature


New Literature

1999-2000 photoelectric sensor catalog; Semiconductor/microelectronics reference catalog; Gas measurement brochure and more.


People


People

People Lepel Corp., Edgewood, NY, has promoted Ray Ariss to semiconductor business director. He will continue as Western Region sales manager. George T.T. Sheng, a senior member of the technical staff at the Institute of Microelectronics in Singapore, has been named ...


World News


World News

Worldwide highlights; Japan; USA; and Asia/Pacific


FEATURES

Millennium Series 300mm


MILLENNIUM SERIES: 300mm factory layout and automated materials handling

To help the industry's transition to 300mm wafer production, the modeling team in the productivity and infrastructure department of Sematech's International 300mm Initiative built a simulation model of a generic semiconductor factory.


Productivity Yield Facto


PRODUCTIVITY & YIELD: Factory-wide run-to-run process control

Over the last several years, run-to-run process control has only been applied to select processes.


Materials Low Defect Tar


MATERIALS: Low-defect target metallurgy development for sub-0.18?m Al-based interconnects

Arcing between the sputtering target and plasma during physical vapor deposition (PVD) of metal films is one of the primary causes of defect generation in interconnect metallization processes.


Industry Insights


Industry Insights: Cohesive education programs for IC manufacturing in need

At the height of the last boom in the semiconductor industry, we heard an industry-wide cry about the lack of properly educated and trained people entering the industry at all levels.