Lithography

LITHOGRAPHY ARTICLES



BGA Adapter

07/03/2006  The Correct-A-Chip ball grid array (BGA) adapter enables an operator to mount a 0.8-mm pitch device to a PCB assembled for 1.0-mm-pitch devices. The bottom of the adapter mounts to a PCB with a BGA pad footprint of 1.0-mm pitch, while the top accepts BGA devices with 0.8-mm pitch.

Substrate Possibilities and Limitations

07/03/2006  By Meredith Courtemanche, assistant editor

A recent report analyzing delivery time length and prices of laminate flip chip build-up substrates found that increased demand for the substrate in 2005 created supply deficiencies. TechSearch International, who created the report, expects the problem to continue through 2006, and possibly into 2007 and 2008 as well.

Point-of-use ultrapure water for immersion lithography

07/01/2006  Liquid immersion lithography (LIL) has catapulted to the forefront of all lithography discussions recently.

Pushing the limits of light

07/01/2006  From semiconductor lithography to the imaging of living cells, optical techniques are being challenged by alternative approaches.

SEMICON WEST PREVIEW: Expanded innovation showcase spans gamut from desktop e-beam generation to electrically measuring low-k stacks

06/26/2006  Visitors to SEMICON West once again will have the opportunity to conveniently meet with a range of entrepreneurs with new ideas at the Technology Innovation Showcase. This year SEMI has expanded it to three separate and more focused areas -- devoted to innovations in DFM and frontend processing, MEMS and nanotechnology, and final manufacturing technologies. Here's the rundown on a few intriguing innovations picked by a volunteer committee of industry executives to have the most potential.

NanoInk, SII ink photomask repair pact

06/26/2006  June 26, 2006 - Seeking to provide nanoscale repair solutions to the photomask industry, NanoInk Inc. and SII NanoTechnology Inc. will modify NanoInk's dip-pen nanolithography technology and integrate it with SII's photomask repair instruments and nanomachining platforms.

Firm touts part-per-quadrillion impurity analysis service

06/16/2006  June 16, 2006 - Balazs Analytical Services, a division of Air Liquide Electronics US, has introduced a new analytical technique that can provide trace analysis of metal concentrations in water and process chemicals down to parts-per-quadrillion (ppq) -- 1ppq equivalent to one in a million billions.

NEC tips 55nm CMOS work

06/12/2006  June 12, 2006 - NEC Electronics America Inc., Santa Clara, CA, says it has developed 55nm standard CMOS process technology (dubbed "UX7LS) to be used with next-generation, ultralow-power consumption systems-on-chips (SoC), as well as the company's CMOS-compatible DRAM technology.

SMIC adds $600M through bank loans

06/08/2006  June 8, 2006 - Fresh off a $300M infusion to support expansion at its Tianjin facilities, Chinese flagship foundry Semiconductor Manufacturing International Corp. (SMIC) said its Shanghai subsidiary has closed a five-year, $600 million secured term loan facility with a consortium of international and Chinese banks.

Immersion's evolution launches the age of hyper-NA lithography

06/07/2006  ArF immersion lithography has started to reveal defectivity and overlay numbers comparable to dry ArF lithography, indicating that the technology is rapidly maturing and will soon be ready for introduction in volume manufacturing.

Brion, Crolles2 partners extend OPC work to 45nm

06/06/2006  June 6, 2006 - Brion Technologies and Crolles2 Alliance partners STMicroelectronics, Philips Semiconductors, and Freescale Semiconductor, have incorporated Brion's Tachyon LMC lithography manufacturability verification technology into production on a fully automated 65nm process flow, and agreed to continue working to develop optical-proximity correction (OPC) technology for 45nm device fabrication.

Report from EIPBN: Accelerating the future of nano fabrication

06/06/2006  We are entering a new era, in which nano-fabrication is moving beyond IC fabrication. Chasing Moore's Law is still an important challenge, but there are now other interesting challenges, such as making electronics ubiquitous, particularly in the medical field, and harnessing Nature's self-assembly methods. These were among the paths followed at the Electron, Ion, & Photon Beam Technology & Nanofabrication (EIPBN) held May 29 to June 2 in Baltimore, MD.

JEOL doubling e-beam tool output

06/05/2006  June 5, 2006 - JEOL Ltd. reportedly is investing 1.8 billion yen (about US $16 million) to build a new facility that will double its production of electron-beam lithography equipment.

Test methods, safety, CD photomask spec on SEMI standards list

06/05/2006  June 5, 2006 - SEMI has published eight new technical standards for the semiconductor, flat-panel display (FPD), and MEMS manufacturing industries, including safety guidelines for hydrogen peroxide storage and handling systems, specifications for critical dimension (CD) measurement information data for photomask manufacturing, and test methods for measurement of the resistivity of resin black matrix for LCD color filters.

Toshiba, Takumi incorporating DFM for mask data prep

05/31/2006  May 31, 2006 - Toshiba Corp.'s semiconductor company is using Takumi Technology Corp.'s automated layout modification methodology for mask data preparation design flow in sub-65nm IC manufacturing, the companies said.

Nantero, ON Semi continue nanotube-CMOS work

05/26/2006  May 26, 2006 - Nantero Inc., Phoenix, AZ, and ON Semiconductor will pick up where Nantero and LSI Logic left off with work to integrate carbon nanotubes into CMOS fabrication. ON Semi acquired LSI Logic's facility in Gresham, OR, earlier this year, where the technology was being developed.

Analysts: litho market to "soften" in 2008

05/26/2006  May 26, 2006 - Analysis from two firms predicts a soft market for lithography equipment in 2008, after leading-edge chipmakers are through placing initial orders for next-generation lithography tools.




WEBCASTS



Environment, Safety & Health

Date and time TBD

The semiconductor industry is an acknowledged global leader in promoting environmental sustainability in the design, manufacture, and use of its products, as well as the health and safety of its operations and impacts on workers in semiconductor facilities (fabs). We will examine trends and concerns related to emissions, chemical use, energy consumption and worker safety and health.

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Wafer Processing

Date and time TBD

As the industry moves to 10nm and 7nm nodes, advances in wafer processing – etch, deposition, planarization, implant, cleaning, annealing, epitaxy among others – will be required. Manufacturers are looking for new solutions for sustained strain engineering, FinFETs, FDSOI and multi-gate technologies, 3D NAND, and high mobility transistors.

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