Lithography

LITHOGRAPHY ARTICLES



NASA scientists explore 'detached Bridgman growth' magic

12/13/2001  By carefully cooling a molten germanium-silicon mixture inside a cylindrical container, NASA scientists can coax it into forming a single large and extraordinarily well-ordered crystal. Such crystals have very few defects because, remarkably, they never touched the walls of the very container in which they grew, according to reports from [email protected].

FSI International trims work force by 7%

12/12/2001  Dec. 12, 2001 - Minneapolis, MN - FSI International Inc. has implemented additional cost reductions including a 7% reduction in the overall work force, salary cuts for all employees, a 50% decrease in capital expenditures, and a reduction in other discretionary costs.

ASML Opens Technology Training Center in Japan

12/05/2001  December 5, 2001 -- TOKYO -- ASML recently announced the creation of a new Asian training center based in Kawasaki, Japan. The facility will provide a variety of training courses in advanced lithography, wafer track and thermal processing technology, with a particular focus on 300mm equipment.

Delayed reaction: Some big Japanese toolmakers still see strong Q3 sales

12/05/2001  Despite all the gloom and doom coming from Japan's struggling chipmakers lately, a few of the country's equipment suppliers continue to do surprisingly well.

ASML announces first technology training center in Japan

12/05/2001  Dec. 5, 2001 - Tokyo, Japan - On the opening day of SEMICON Japan 2001, ASML announced the creation of a new Asian training center based in Kawasaki, Japan.

STMicroelectronics' CMOS teams recieve awards

11/29/2001  Nov. 29, 2001 - Geneva, Switzerland - STMicroelectronics' advanced CMOS development teams headed by Thomas Skotnicki at its Central Research & Development facility in Crolles, France, have received two awards granted by the semiconductor and solid-state physics community: the Paul Rappaport Award for the best IEEE paper in 2000 and also the Best Paper award for the ESSDERC 2000 conference, held in Cork, Ireland, in September 2000.

ITRS accelerates pace to smaller chip dimensions

11/29/2001  Nov. 29, 2001 - San Jose, CA - The 2001 edition of the International Technology Roadmap for Semiconductors (ITRS) calls for more aggressive scaling than previously planned.

APC is evolving: Etch to CMP to litho

11/28/2001  What can the semiconductor industry learn from the petrochemical folks? A lot, when it comes to the evolution of advanced process control (APC). In the early days of APC in the petrochem industry, process and instrumentation technologies were considered totally unrelated issues by operating companies.

ASML won't sell Tinsley Labs by deadline

11/21/2001  Nov. 21, 2001 - Veldhoven, Netherlands - ASM Lithography NV (ASML) said it will not be able to sell its Tinsley Laboratories unit -- acquired when the Dutch company bought Silicon Valley Group this spring -- by a Nov. 22 target date set by US government officials.

JMAR gets $1.2M contract for XRL system support

11/19/2001  Nov. 19, 2001 - San Diego, CA - JMAR Technologies, a provider of precision micro- and nanotechnology products, announced that its JMAR/JSAL NanoLithography Inc. (JSAL) division, Burlington, VT, has received a $1.2 million contract from a major New England-based aerospace firm to provide a continuing range of X-ray lithography (XRL) support services funded by the Defense Advanced Research Projects Agency (DARPA).

Alpha Pro Tech Reports Third Quarter Results

11/14/2001  November 14, 2001 -- NOGALES, AZ -- Alpha Pro Tech, a developer, manufacturer and marketer of disposable protective apparel for the medical, dental, industrial safety, cleanroom and food service markets, announced 6.9 percent lower sales for the three months ended September 30.

Modeling MEMS at Sandia

11/14/2001  Modelers at Sandia National Laboratories are helping micromachine designers choose the device they want fully fabricated through new nano-modeling programs.

TSMC completes beta evaluation of KLA-Tencor's reticle inspection tool

11/14/2001  November 14, 2001 - San Jose, CA - KLA-Tencor Corp. announced that Taiwan Semiconductor Manufacturing Company (TSMC) has successfully completed its beta evaluation of KLA-Tencor's TeraStar SLF27 reticle inspection system on advanced sub-wavelength reticles used in manufacturing devices with design rules as small as 130 nm.

Finding a way out of the narrowing time-to-market/volume window

11/08/2001  Traditional yield enhancement techniques focus on analyzing the causes of killer defects - those due to sources of contamination on the wafer and in the factory. However, feature-limited yield is becoming a dominant driver of overall yield as the industry goes further and further into the deep sub-micron (DSM) region.

Alpha Pro Tech Reports Increase in Mask Demand

11/07/2001  November 7, 2001 -- NOGALES, AZ -- Alpha Pro Tech, a developer, manufacturer and marketer of disposable protective apparel for the medical, dental, industrial safety, clean room and food service markets, says that demand for its N-95 Particulate Respirator face mask, which is NIOSH (National Institute for Occupational Safety and Health) approved, has required the company to add additional shifts. The company is also anticipating building additional equipment.

JMAR awarded broad patent for X-ray lithography process

11/02/2001  November 2, 2001 - San Diego, CA - JMAR Technologies Inc. a provider of precision micro- and nanotechnology products, said its JMAR-SAL NanoLithography Inc. (JSAL) division, Burlington, VT, has been awarded US patent number 6,295,332, titled Method for Improving X-ray Lithography in the Sub-100nm Range to Create High Quality Semiconductor Devices.

DuPont Photomasks founder Kenneth Rygler to resign

11/01/2001  November 1, 2001 - Round Rock, TX - DuPont Photomasks Inc. founder Kenneth Rygler is resigning to pursue personal and other interests. Rygler, exec. VP of worldwide marketing and strategic planning at DuPont, will serve as a consultant to the company.

KLA-Tencor and DuPont Photomasks announce successful beta test

10/25/2001  October 25, 2001 - San Jose, CA, and Round Rock, TX - KLA-Tencor Corp. and DuPont Photomasks Inc. have completed beta testing of KLA-Tencor's TeraStar SLF27 reticle inspection tool at DuPont Photomasks' Round Rock facility, two additional TeraStar tools have been ordered. In addition to the system in Round Rock, new tools are being installed at DuPont Photomasks Taiwan and the DPI Reticle Technology Center, a photomask R&D facility.

Tiny organic transistors may lead to less expensive, more powerful chips

10/19/2001  October 19, 2001 - Murray Hill, NJ - Scientists from Lucent Technologies' Bell Labs report that they have created organic transistors with a single-molecule channel length, which they say will set the stage for a new class of high-speed, inexpensive carbon-based electronics.

ASML accelerates SVG merger integration, announces further work force reduction

10/16/2001  October 16, 2001 - Veldhoven, Netherlands - As a consequence of the continuing downturn in the semiconductor industry, ASML Holding NV (ASML) will accelerate integration with its newly merged Silicon Valley Group in the US and will further reduce its global work force by approximately 1,400 positions (17%), compared with today's work force of 8,000. This will result in a total work force of 6,600 by the end of the 1H02.




WEBCASTS



Environment, Safety & Health

Date and time TBD

The semiconductor industry is an acknowledged global leader in promoting environmental sustainability in the design, manufacture, and use of its products, as well as the health and safety of its operations and impacts on workers in semiconductor facilities (fabs). We will examine trends and concerns related to emissions, chemical use, energy consumption and worker safety and health.

Sponsored By:

Wafer Processing

Date and time TBD

As the industry moves to 10nm and 7nm nodes, advances in wafer processing – etch, deposition, planarization, implant, cleaning, annealing, epitaxy among others – will be required. Manufacturers are looking for new solutions for sustained strain engineering, FinFETs, FDSOI and multi-gate technologies, 3D NAND, and high mobility transistors.

Sponsored By:

More Webcasts