Lithography

LITHOGRAPHY ARTICLES



TOOLS OF THE NANOTRADE:
TINY, TOUGH BEAM MACHINES


10/12/2001 
As high-tech products grow smaller, engineers require smaller instruments to work on them. At the heart of some of those instruments might be cone-shaped carbide crystalline tips – 10 nanometers at the top and 0.5 micron at the base. Electrons stream off of these tips to do their jobs, which include manufacture of integrated circuits and, someday, helping to propel spacecraft.

Brooks Automation acquires Tec-Sem AG

10/11/2001  October 11, 2001 - Chelmsford, MA - Brooks Automation Inc., supplier of tool and factory hardware and software automation solutions for the semiconductor industry, completed the acquisition of Tec-Sem AG (Tec-Sem), a manufacturer of bare reticle stockers, tool buffers and batch transfer systems for the semiconductor industry.

Dongbu Electronics offers ShuttleChip service incentives

10/10/2001  October 10, 2001 - Seoul, Korea - At the FSA Suppliers Expo, Dongbu Electronics launched an incentive program for qualified companies to use its regularly scheduled 0.18- and 0.25-micron ShuttleChip prototyping service.

Intel scientists tout new packaging technology

10/08/2001  Oct. 8, 2001 - Santa Clara, CA - Intel Corp. researchers say they have developed a new packaging technology that they assert will help the company build processors with more than 1 billion transistors that will be 10 times faster than the fastest processors today.

DuPont Electronic, Tokyo Ohka Kogyo announce photoresist license and development agreement

10/03/2001  October 3, 2001 - Wilmington, DE & Kawasaki, Japan - DuPont Electronics Technologies and Tokyo Ohka Kogya Co. Ltd. (TOK) have signed a license and development agreement to enable production of photoresists for use in making future generations of semiconductors chips.

Tokyo Seimitsu rejects patent claim, files antitrust counterclaim against KLA-Tencor

09/27/2001  September 27, 2001 - Oakland, CA - Today, Tokyo Seimitsu Co., Ltd. has filed its answer in response to KLA-Tencor's patent infringement suit. The answer denies all charges of patent infringement and alleges KLA's U S Patent No. 4,805,123 is invalid and unenforceable.

Extraction Wins Multiple Advanced Filtration Orders for 300mm Fabs

09/06/2001  September 6, 2001 -- FRANKLIN, MA -- Extraction Systems recently announced the sale of multiple Extraction 3000 filter systems for 300mm semiconductor fabs in the U.S., Taiwan and Europe.

New Japanese government research project to make its own tools

08/30/2001  Japan's latest government-funded industry research initiative for 50nm generation technology plans to start by designing and developing its own new semiconductor production tools. Japanese press reports said Intel researchers would also participate, but Intel sources could not confirm this before press time.

Conexant signs agreement and alliance with Photronics; Photronics to acquire Conexant's photomask manufacturing assets

08/29/2001  August 29,2001 - Newport Beach, CA and Jupiter, FL - Conexant Systems Inc., and Photronics Inc., announced a strategic technology alliance and multi-year supply agreement under which Photronics will become the primary supplier of photomasks to Conexant, providing the company with access to advanced photomask process technologies and services.

Japanese startup recruits backers to unique 100nm - 70nm litho approach

08/20/2001  A bold little Japanese startup has big plans to challenge all the big names with its own alternative approach to next generation lithography. LEEPL Corp., Machida, said it will have two beta tools out by the end of the year that will use a simple, low-cost combination of conventional e-beam and proximity x-ray lithography technology to write 100nm to 70nm lines through a 1:1 stencil mask.

Mask houses try to keep costs down

08/13/2001  Rapidly rising photomask costs may be hurting the maskmakers as well as the chipmakers, according to one analyst, but two prominent mask houses say they're trying to keep costs low - despite skyrocketing tool overheads.

JMAR completes purchase of SAL Inc.

08/09/2001  August 9, 2001 - San Diego, CA - JMAR Technologies Inc. has completed the purchase of the outstanding equity of Vermont-based Semiconductor Advanced Lithography Inc. (SAL), a provider of X-ray lithography (XRL) stepper systems.

Photronics breaks ground to expand Connecticut facility

08/09/2001  August 9, 2001 - Brookfield, CT - Photronics Inc. is breaking ground for a 13,000-square-foot addition to its existing 40,000-square-foot manufacturing operation in Brookfield, Connecticut.

ENTREPRENEUR UNMASKS METHOD
OF MAKING MEMS FASTER, CHEAPER


08/06/2001 
A new small tech business eliminates the need for costly photomasks in making many bioMEMS and sensor devices. One potential client says the "superior process" makes it easier to prototype new components because making modifications is no longer a cumbersome process.

Dainippon Screen introduces laser tool for PCBs

07/16/2001  Dainippon Screen will start selling a laser plotter for printed circuit boards in August that will reduce running costs to 1/15 current levels.

Diagnostics, characterization: the FEI story

06/26/2001  June 26, 2001 - Hillsboro, OR - With a company focus on structural diagnostics and structural modification with the utilization of ion beam technology, FEI has an eye on the future.

DuPont Photomasks, Micron Technology Agree to Collaboration

06/11/2001  June 11, 2001 -- ROUND ROCK, TX -- DuPont Photomasks and Micron Technology plant to form a joint venture that will result in the creation of a new photomask cleanroom facility.

DuPont closes Scotland photomask facility

05/04/2001  May 4, 2001 - Hamilton, Scotland and Round Rock, TX - DuPont Photomasks Inc. (DPI) will close its photomask manufacturing facility in Hamilton, Scotland, relocating equipment to the company's 10 other photomask production sites worldwide.

Feds OK ASML-SVG merger

05/03/2001  May 3, 2001 - Veldhoven, Netherlands and San Jose, CA - The proposed merger between ASM Lithography Holding N.V. and Silicon Valley Group Inc. has received the green light by the Committee on Foreign Investment in the United States (CFIUS).




WEBCASTS



Environment, Safety & Health

Date and time TBD

The semiconductor industry is an acknowledged global leader in promoting environmental sustainability in the design, manufacture, and use of its products, as well as the health and safety of its operations and impacts on workers in semiconductor facilities (fabs). We will examine trends and concerns related to emissions, chemical use, energy consumption and worker safety and health.

Sponsored By:

Wafer Processing

Date and time TBD

As the industry moves to 10nm and 7nm nodes, advances in wafer processing – etch, deposition, planarization, implant, cleaning, annealing, epitaxy among others – will be required. Manufacturers are looking for new solutions for sustained strain engineering, FinFETs, FDSOI and multi-gate technologies, 3D NAND, and high mobility transistors.

Sponsored By:

More Webcasts