Lithography

LITHOGRAPHY ARTICLES



Semiconductor Research Corporation releases $26M in new research funds

07/26/2018  JUMP program funds 24 new research projects to amplify mission of its six innovation centers.

SIA applauds new DoD research partnerships to advance transformative semiconductor technologies

07/25/2018  DARPA selects research teams from industry, academia to receive funding through its Electronics Resurgence Initiative to bolster next-generation semiconductor design, materials, architectures.

2018 total wafer demand expected to reach 115.1 million 300mm wafer equivalents

07/25/2018  Semiconductor revenues are expected to increase 12.8% in 2018 as a result of continued strong memory prices.

North American semiconductor equipment industry posts June 2018 billings

07/25/2018  Global billings of North American equipment manufacturers declined for the current month by 8 percent from the historic high but is still 8 percent higher than billings for the same period last year.

Semi content in electronic systems forecast to reach 31.4% in 2018

07/19/2018  Semi content to surpass 30% this year, smashing the previous record high set just last year.

Silicon Labs expands senior management team

07/16/2018  Daniel Cooley has been named Senior Vice President and Chief Strategy Officer.

China's semi capex forecast to be larger than Europe and Japan combined in 2018

07/12/2018  The Mid-Year Update to the 2018 McClean Report revises IC Insights’ worldwide economic and IC industry forecasts through 2022 that were originally presented in The 2018 McClean Report issued in January.

HEIDENHAIN announces new CEO

07/11/2018  HEIDENHAIN announced the appointment of David Doyle as CEO of HEIDENHAIN CORPORATION, effective Oct. 1, 2018.  At that time, Doyle will assume full responsibility for the HEIDENHAIN CORPORATION customer-focused operations for the U.S., Canada and Mexico.

Developing a resist specific to EUV

07/10/2018  Multi-Trigger chemistry, which is designed specifically for EUV, creates a high-chemical gradient at pattern boundaries, significantly reducing blurring and improving line-edge roughness to reduce the RLS trade off.

The cobbler's children getting shoes?

07/10/2018  There's an old proverb that the shoemaker's children always go barefoot, indicating how some professionals don't apply their skills for themselves. Until lately, that has seemed the case with the semiconductor manufacturing industry which has been good at collecting massive amounts of data, but no so good at analyzing that data and using it to improve efficiency, boost yield and reduce costs.

The devilish details of EUV lithography

07/10/2018  Industry R&D consortium imec runs a series of technology forums around the world, starting in June in Antwerp, Belgium, and including a stop in July in San Francisco in coordination with SEMICON West.

Patterned wafer geometry grouping for improved overlay control

07/09/2018  Process-induced overlay errors from outside the litho cell have become a significant contributor to the overlay error budget including non-uniform wafer stress.

Big changes at the top and bottom of Q1 semiconductor equipment market shares

07/09/2018  Market shares of semiconductor equipment manufacturers shifted significantly in Q1 2018 as Applied Materials, the top supplier dropped, according to the report “Global Semiconductor Equipment: Markets, Market Shares, Market Forecasts,” recently published by The Information Network.

SEMICON West 2018 highlights smart technologies, workforce development, industry growth

07/09/2018  Smart technologies take center stage tomorrow as SEMICON West, the flagship U.S. event for connecting the electronics manufacturing supply chain, opens for three days of insights into leading technologies and applications that will power future industry expansion.

Global semiconductor sales in May increase 21% year-to-year

07/06/2018  Global sales in May were 3 percent higher than the April 2018 total of $37.6 billion.

Strategy for U.S. semiconductor leadership to be previewed at SEMICON West

07/06/2018  White House-led panel to address U.S. goal to lead in development of next-generation microelectronics.

Global semiconductor industry reached $115.8B in Q1 2018

07/02/2018  Samsung Electronics continued to lead the semiconductor market, followed by Intel and SK Hynix.

UMC acquires 100% ownership of Mie Fujitsu Semiconductor

06/29/2018  Fujitsu Semiconductor Limited and United Microelectronics Corporation, a global semiconductor foundry, today announced that UMC will acquire all of the shares of Mie Fujitsu Semiconductor Limited (MIFS), a 300mm wafer foundry joint venture between both companies.

SEMI Americas and Solid State Technology announce 2018 "Best of West" award finalists

06/27/2018  Selected from over 600 exhibitors, SEMI announced today that the following Best of West 2018 Finalists will be displaying their products on the show floor at Moscone Center from July 10-12.

China's semi capex forecast to be larger than Europe and Japan combined in 2018

06/27/2018  Chinese semi firms to spend $11.0 billion in capex this year, up from only $2.2 billion in 2015.




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Environment, Safety & Health

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The semiconductor industry is an acknowledged global leader in promoting environmental sustainability in the design, manufacture, and use of its products, as well as the health and safety of its operations and impacts on workers in semiconductor facilities (fabs). We will examine trends and concerns related to emissions, chemical use, energy consumption and worker safety and health.

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Wafer Processing

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As the industry moves to 10nm and 7nm nodes, advances in wafer processing – etch, deposition, planarization, implant, cleaning, annealing, epitaxy among others – will be required. Manufacturers are looking for new solutions for sustained strain engineering, FinFETs, FDSOI and multi-gate technologies, 3D NAND, and high mobility transistors.

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