12/02/2010 

Tegal Corporation (Nasdaq: TGAL) is launching a new member of its ProNova family of high-density inductively coupled plasma (ICP) reactors for the company’s DRIE series wafer processing products. The ProNova2 is targeted for fast-growing 200mm MEMS and 3D IC applications.

12/01/2010 

EV Group (EVG) developed a micro-lens molding process that can enable volume production of very-high-resolution (up to 8MP and higher) wafer-level optics for use in smart phones, pico projectors and myriad other applications.

11/15/2010 

Jay Esfandyari, Roberto De Nuccio, Gang Xu, STMicroelectronics, introduce how MEMS gyroscopes work and their applications, the main parameters of a MEMS gyroscope with analog or digital outputs, practical MEMS gyroscope calibration techniques, and how to test the MEMS gyroscope performance in terms of angular displacement.

11/01/2010 

GigOptix (GGOX) named Innovative Micro Technology (IMT) as its optical chip fabrication partner. GGOX is now in the process of transferring production of its Thin Film Polymer on Silicon  (TFPS) optical modulator chips to IMT in expectation of volume production ramping in 2011.

10/26/2010 

Steven Walsh, U of NM Albert Franklin Black Professor of Entrepreneurship, recently spoke about the lessons learned from 25 years of MEMS technology, educating attendees of the MEMS Technology Summit. Walsh discusses MEMS with ElectroIQ editor Debra Vogler.

09/29/2010 

ANT95-R and ANT130-R direct-drive rotary stages, part of Aerotech's nano Motion Technology product line, offer in-position stability (0.005 arc sec) and incremental motion (0.01 arc sec) using the company's direct-drive technology.

07/13/2010 

Affinity Biosensors and IMT entered into a strategic foundry partnership today for volume production of SMR MEMS devices enabling particle measurement in fluidic solutions with femtogram resolution. The SMR MEMS devices are the chips that drive Affinity Biosensors' ARCHIMEDES Particle Measurement System.

05/17/2010 

An IC foundry has made it into the ranks of the Top 20 MEMS foundries for the first time, as TSMC’s roughly $10 million in MEMS foundry revenues put it into 14th place on Yole Developpement’s 2009 listing. STMicro improved slightly, continuing to dominate the MEMS foundry arena. TI slipped, holding onto #2; Dalsa gained, and grabbed the #3 slot.

01/10/2010 

01/10/2010 

11/09/2009 

HP execs David Erickson and Grant Pease give Small Times the skinny on the company's new MEMS sensor technology they say is 1000× more sensitive than current products -- and why applications like bridge monitoring are particularly ripe for implementation.

10/26/2009 

Microstaq, a developer of silicon MEMS-based fluid control technology, has qualified its Ventilum MEMS-based chip at Semiconductor Manufacturing International Corp (SMIC), billed as both an advancement in electronic valve technology and a new facet to the Chinese foundry's MEMS capabilities.

10/06/2009 

Among a spate of presentations at IMEC's annual Technology Forum this week, the European R&D consortium trotted out a new program for foundries and fabless companies, an "incubation" pact with TSMC, and developments in multithreading and radio chips.

09/04/2009 

DALSA Semiconductor VP/GM Claude Jean talks with SST about the new $218M microelectronics center being formed in Quebec, and how the company will contribute to its focus on MEMS and 3D wafer-level packaging and vice-versa.

08/28/2009  August 28, 2009: mPhase Technologies says that work with a MEMS foundry partner has determined that a recently-discovered polymer coating for its Smart NanoBattery "appear[s] to be able to be replicated in a foundry manufacturing environment."

08/25/2009  MEMS-based systems were a $46 billion business in 2008, and despite the recession MEMS-based systems should see 12% annual growth through 2012 to an $83 billion industry, meaning a $13 billion market for MEMS devices and the equipment and materials needed to produce them, according to a report on the MEMS supply chain from SEMI and Yole Développement.

05/22/2009  A technical session titled "Think Outside the Chip: MEMS-Based Systems Solutions" will be held at the Sensors Expo Chicago 2009. In the all-day session on Monday June 8, industry analyst (and Small Times contributing editor) Roger Grace will be joined by more than 20 other world recognized leaders in the microelectromechanical (MEMS) area representing North America, Asia and Europe.

03/30/2009  March 30, 2009: Micralyne Inc., a MEMS developer and manufacturer, and SVTC Technologies LLC, an independent MEMS and CMOS commercialization company, plan to collaborate on development and manufacturing of MEMS devices using 8-in. fabrication technology.

03/17/2009  March 17, 2009: The government of Wales is encouraging nanotechnology companies to participate in a technology conference in May, describing the region as becoming "increasingly recognized as the hot spot for new technology and innovation in the sector."

03/02/2009  March 2, 2009: Norcada Inc., a MEMS design and product development company, has announced the availability of a new TEM (transmission electron microscope) nitride window array device to the TEM research community.