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WEBCASTS
 Environment, Safety & Health Date and time TBD The semiconductor industry is an acknowledged global leader in promoting environmental sustainability in the design, manufacture, and use of its products, as well as the health and safety of its operations and impacts on workers in semiconductor facilities (fabs). We will examine trends and concerns related to emissions, chemical use, energy consumption and worker safety and health.
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Wafer Processing Date and time TBD As the industry moves to 10nm and 7nm nodes, advances in wafer processing etch, deposition, planarization, implant, cleaning, annealing, epitaxy among others will be required. Manufacturers are looking for new solutions for sustained strain engineering, FinFETs, FDSOI and multi-gate technologies, 3D NAND, and high mobility transistors.
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NIST researchers used electron-beam lithography to make thousands of nickel-iron magnets, each about 200nm in diameter and shaped like an ellipse. Even small distortions in magnet shape can lead to significant changes in magnetic properties.
Imec researchers will present "Carbon nanotube interconnects: electrical characterization of 150nm CNT contacts with Cu damascene top contact" at IITC 2011. Dr. Marleen van der Veen, senior research scientist at imec discussed the research results and their significance.
Aerotech's AVS1000 series stages suit applications that require positioning of large or heavy loads over very small incremental movements in elevation above a horizontal plane. A low profile and precise motion capability make these stages a fit for semiconductor manufacturing and inspection.
The F30 module offers improved throughput over the entire sensitivity range. Two European fabs, a leading Asian foundry, a leading MEMS producer, and a process equipment manufacturer that is developing an integrated inspection solution have ordered the Rudolph system.