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WEBCASTS
 Environment, Safety & Health Date and time TBD The semiconductor industry is an acknowledged global leader in promoting environmental sustainability in the design, manufacture, and use of its products, as well as the health and safety of its operations and impacts on workers in semiconductor facilities (fabs). We will examine trends and concerns related to emissions, chemical use, energy consumption and worker safety and health.
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Wafer Processing Date and time TBD As the industry moves to 10nm and 7nm nodes, advances in wafer processing etch, deposition, planarization, implant, cleaning, annealing, epitaxy among others will be required. Manufacturers are looking for new solutions for sustained strain engineering, FinFETs, FDSOI and multi-gate technologies, 3D NAND, and high mobility transistors.
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Carl Zeiss SMS and Synopsys will collaborate to support in–die metrology solutions for the 32nm technology node and below. Using CATS as a data preparation engine, mask engineers using PROVE can benefit from improved efficiency and usability of a registration metrology system that meets stringent overlay accuracy requirements.
While speculation abounds about what will be the next generation of memories and their applications, CNRS, a French government-funded research organization, has 4 new concepts of memories in 2010. The organization is actively recruiting collaborators on RE-RAM, A-RAM, MS-DRAM, and MELRAM memory technologies.
Over the years, undesirable process effects related to ion implantation have become well known: the like channeling effect, for example, and how to minimize it for 25μm and 13μm mature technology. Patrick Demarest, Altis Semiconductor, describes how a stable process can emerge in data mining analysis for low final test yield, and provides definitions for incidence, tilt and twist angles, and channeling effects.
The University of Leeds in Yorkshire, UK, will install a JEOL electron beam lithography system. Researchers will use the litho system for nano-scale electronics and spintronics device research, as well as development of magnetic materials.
Eulitha developed a proprietary photolithography technology for low-cost and high-throughput fabrication of photonic nanostructures. The patented technology enables the formation of periodic nanostructures over large areas for such applications as LEDs, solar cells, and flat-screen displays.