Semiconductors

SEMICONDUCTORS ARTICLES



New ASML 193nm tool: 70nm resolution for 200mm fabs

10/24/2003  ASML's latest 193nm Twinscan XT:1250 stepper makes little incremental improvements to get ordinary old optical lithography down to 70nm half-pitch line resolution with ordinary old binary masks -- for ordinary old 200mm fabs, as well as 300mm.

Micronic unveils mask metrology system

10/24/2003  October 23, 2003 - Micronic Laser Systems AB, Taby, Sweden, has introduced a new registration measurement system for TFT-LCD photomasks.

Atmospheric-pressure plasma for surface prep/bonding

10/24/2003  A new surface activation and wafer-to-wafer bonding process that uses atmospheric pressure plasma has been developed by SUSS MicroTec, eliminating the need for a vacuum chamber and associated process time.

300mm to drive wafer shipment growth

10/24/2003  A new report from SEMI predicts double-digit growth in wafer shipments through 2004 thanks to 300mm adoption, but followed by a considerable slowdown.

FSA opens Asia-Pacific office

10/24/2003  October 23, 2003 - The Fabless Semiconductor Association (FSA) is establishing its new Asia-Pacific headquarters in Taiwan, as part of a plan to expand its global presence.

'Growing' microchip circuits

10/24/2003  (October 24, 2003) TUCSON, Ariz.—The University of Arizona's nanotechnology research group is using proteins from living cells to "grow" wires for microchips, with funding from a U.S. National Science Foundation grant.

Omron introduces wafer heating system

10/24/2003  October 22, 2003 - Japan's Omron Corp. has developed a new system to control the temperature to which wafers and LCD panels are subjected during thermal processing.

Chartered: Demand rises, losses shrink

10/24/2003  October 23, 2003 - Singapore's Chartered Semiconductor, the world's fourth-largest chipmaker, posted 3Q03 revenues at the higher range of estimates with a reduced loss compared to a year ago -- but warned that it needs to bring in a lot more money before it can start turning a profit.

Semitool, TEL call truce

10/24/2003  October 20, 2003 - Semitool Inc., Kalispell, MT, and Tokyo Electron Ltd. have settled a dispute over patents for semiconductor processing systems.

Samsung reports rising profits

10/20/2003  October 17, 2003 - Korea's Samsung Electronics Co. Ltd. wowed investors with a 3Q03 profit up 6.6% from last year, due to record sales of flash memory chips used in digital cameras and mobile devices.

Five major chipmakers join IMEC's sub-45nm research platform

10/20/2003  IMEC, the independent microelectronic research center based in Leuven, Belgium, announced at its annual research review meeting on Oct. 13 that five major chipmakers have joined the center's sub-45nm research platform.

Rudolph unveils automated metrology tool

10/20/2003  October 17, 2003 - Rudolph technologies, Flanders, NJ, has introduced a wafer-bow/stress metrology tool for measuring stress that develops during thin film deposition.

Gartner lowers equipment sales estimates

10/20/2003  Gartner Dataquest has cut back on its estimates for 2003 semiconductor equipment sales, but is sticking to its forecast of improved long-term growth.

REPORT: SARS not an airborne virus

10/20/2003  OCT. 20--MANILA--There is no evidence to suggest that SARS (severe acute respiratory syndrome) is an airborne virus, the World Health Organization (WHO) said in a report.

STMicro boosts 8-in. production

10/16/2003  October 16, 2003 - STMicroelectronics plans to invest 200 million euros in its 8-in. wafer plant in Rousset, France, to increase 8-in. wafer production by 25%.

Novellus establishes Shanghai center

10/16/2003  October 16, 2003 - Novellus Systems Inc., San Jose, CA, and Shanghai's Fudan University plans to set up a semiconductor manufacturing technology research center focused on copper-based tools.

Wacker looks to Asia for 200mm production

10/16/2003  October 13, 2003 - Wacker Siltronic, Burghausen, Germany, announced plans to shut down 200mm wafer production facilities in Wasserburg and Burghausen in order to concentrate its 200mm capacity in Asia.

ProMOS post 3Q profit

10/16/2003  October 14, 2003 - ProMOS Technologies, Taiwan's third-largest memory chip manufacturer, posted its first quarterly profit of the year in 3Q, reporting a net income of $25.8 million on revenue of $218 million.

Atmel opens foundry service

10/16/2003  October 9, 2003 - Atmel Corp., Heilbronn, Germany, has opened a foundry service for its SMARTIS BCD-on-SOI technology, which combines bipolar, CMOS, and DMOS technology.

Nanya posts 3Q loss

10/16/2003  October 13, 2003 - Taiwan's Nanya Technology Corp. posted a $5 million net loss in 3Q03, compared with a $17.million profit in 3Q02. The company reported a $57 million loss in 1H03.




WEBCASTS



Environment, Safety & Health

Date and time TBD

The semiconductor industry is an acknowledged global leader in promoting environmental sustainability in the design, manufacture, and use of its products, as well as the health and safety of its operations and impacts on workers in semiconductor facilities (fabs). We will examine trends and concerns related to emissions, chemical use, energy consumption and worker safety and health.

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Wafer Processing

Date and time TBD

As the industry moves to 10nm and 7nm nodes, advances in wafer processing – etch, deposition, planarization, implant, cleaning, annealing, epitaxy among others – will be required. Manufacturers are looking for new solutions for sustained strain engineering, FinFETs, FDSOI and multi-gate technologies, 3D NAND, and high mobility transistors.

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