Issue

Leading-edge fabs can stay competitive and productive with equipment strategies that reduce capital expenditures and increase profitability by comparing the advantages of buying new equipment vs. refurbished. Byron Exarcos, ClassOne Equipment Inc., Atlanta, GA USA

A new strip method has been developed to simultaneously remove post-etch polymer while minimizing damage to the low-k film, thus enabling the integration of ULK films into advanced dual damascene structures. Rajesh Mani, Bing Ji, Steve Sirard, Andrew Bailey, Lam Research Corp., Fremont, CA, USA

Although additive and current waveform effect dominate fill capability, characteristics of the electroplating bath such as temperature, ionic concentrations, and corrosion potential must also be optimized for 16nm performance. Jonathan Reid, Andrew, McKerrow, Sesha Varadarajan, and Greg Kozlowski, Novellus Systems, Inc., San Jose, CA USA

Incorporating proven, high reliability materials at all layers of the device — from the package level to the board level — will go a long way toward advancing electronics technology, especially for the handheld sector. Mark Currie, Henkel Corporation, Irvine, CA USA

There are many areas within a test system in which a more integrated approach can improve performance and reduce cost. Gerhard Gschwendtberger, Multitest elektronische Systeme GmbH, Rosenheim, Germany