Issue



Table of Contents

Solid State Technology

Year 2007
Issue 11

DEPARTMENTS

Editorial


The Innovation Imperative

Where does innovation come from, and how can we foster more of it?


World News.html


World News


Technology News.html


Technology news


Chemicals


MFC design for semiconductor processing usingcomputational fluid dynamics

Mass flow controller (MFC) designs must evolve to meet the need for ever more precise control of chemical and gas precursors used in semiconductor manufacturing.


Dfm


Improving yield through parametric variability characterization and modeling

Random and systematic process variations reduce parametric yields significantly at the leading 65nm and 45nm CMOS process technologies.


Mems


Hydraulics vs. pneumatics for improved wafer-level bonding

Many emerging wafer bonding technologies are requiring higher applied force for successful wafer level encapsulations.


Industry Forum


Pure-play development foundries offer accelerated innovation

When process innovation is a requirement, a sound process development strategy is a must. Differentiation on silicon that is process- vs. design-based can hold very high returns for investors and technologists provided the innovation is accelerated via streamlined development efforts that understand both the development and the manufacturing challenges.


FEATURES

Nanotechnology


Converting nickel film to nano particles using hydrogen plasma treatment

Nickel particles on silicon wafers are popularly used as catalysts in growing carbon nanotubes (CNTs).


Cover Article


Combined illumination sources for hyper-NAcontact hole printing

Patterning of contact layers with minimal half pitch below 90nm has proven to be a very difficult task.


Modeling Vehicle Free Tr


Modeling vehicle-free transport to enable elimination of bottlenecks

Automated material handling systems (AMHS) are critical to the infrastructure of a 300mm fab.


PRODUCTS

Featured Products.html


Featured Products


New Products.html


New Products


LITHOGRAPHY-HISTORY-AMP-

Technology Interdependen


Technology interdependence and the evolution of semiconductor lithography

Advances in semiconductor lithography have driven the rapid growth of the semiconductor industry since its beginnings.


Photomasks Is Nucleoepit


Photomasks: Is nucleoepitaxy in the future?


New Uses Of Ic Technolog


New uses of IC technology will enable better opportunities for optical lithography


SUPPLEMENT

Introduction


Solid State Technology: The gold anniversary

Amazingly, it is now 50 years since Sam Marshall launched Semiconductor Products magazine, which has evolved into today’s Solid State Technology and the web site at www.


Feature


Fifty years on, IC industry’s greatest invention is itself

Founding a semiconductor magazine, or company, in 1957 required a leap of faith.


Perspectives


50th Anniversary Perspectives


Timeline


Fify years of solid state achievements

A technology timeline from the editors of Solid State Technology