Table of Contents
Solid State Technology
Year 2004 Issue 10
| DEPARTMENTS
Editorial Tomorrow's technologists
It's no secret that most middle-school and high-school students in the US have little interest in math and science.
World News World News
Tech News Technology News
Interconnect Customizing CMP
The increasing number of CMP consumables suppliers has led to many possible combinations of pads, copper, and barrier slurries.
Product News Product News
Perspectives What's fueling the materials business?
Solid State Technology asked materials experts to discuss the new dynamics driving the materials business.
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FEATURES
Soi Materials SOI wafers: Fabrication techniques and trends
Introduced as an alternative CMOS technology in 1978, silicon-on-insulator (SOI) offered the potential for high speed, low power consumption, soft-error reduction, latch-up immunity, manufacturing process simplification, and improved scaling.
Cover Article Nickel silicide formation using low-temperature spike anneal
The manufacture and future development of integrated circuits and devices face many technological challenges, some of which are materials-related, while others are related to process integration.
Metrology Monitoring Cu ECD using laser-based SAW measurements
An optical technique based on the laser generation of surface acoustic waves allows noncontact monitoring of electroplated copper thickness on product wafers.
Gases Using tunable diode laser spectroscopy to detect trace moisture in ammonia
Detection of moisture contamination in hydride gases, such as ammonia used for epitaxial growth, has become a significant concern for manufacturers of III-V compound semiconductors.
Deposition MEMS, head, and packaging applications using through-mask Cu deposition
Through-mask electrodeposition is receiving increased attention in microelectronic applications.
Automation Robotics Handling reliability improves with in situ diagnostics
Wafer-handling systems in semiconductor process equipment can significantly limit overall tool reliability.
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