Issue



Table of Contents

Solid State Technology

Year 2004
Issue 10

DEPARTMENTS

Editorial


Tomorrow's technologists

It's no secret that most middle-school and high-school students in the US have little interest in math and science.


World News


World News


Tech News


Technology News


Interconnect


Customizing CMP

The increasing number of CMP consumables suppliers has led to many possible combinations of pads, copper, and barrier slurries.


Product News


Product News


Perspectives


What's fueling the materials business?

Solid State Technology asked materials experts to discuss the new dynamics driving the materials business.


FEATURES

Soi Materials


SOI wafers: Fabrication techniques and trends

Introduced as an alternative CMOS technology in 1978, silicon-on-insulator (SOI) offered the potential for high speed, low power consumption, soft-error reduction, latch-up immunity, manufacturing process simplification, and improved scaling.


Cover Article


Nickel silicide formation using low-temperature spike anneal

The manufacture and future development of integrated circuits and devices face many technological challenges, some of which are materials-related, while others are related to process integration.


Metrology


Monitoring Cu ECD using laser-based SAW measurements

An optical technique based on the laser generation of surface acoustic waves allows noncontact monitoring of electroplated copper thickness on product wafers.


Gases


Using tunable diode laser spectroscopy to detect trace moisture in ammonia

Detection of moisture contamination in hydride gases, such as ammonia used for epitaxial growth, has become a significant concern for manufacturers of III-V compound semiconductors.


Deposition


MEMS, head, and packaging applications using through-mask Cu deposition

Through-mask electrodeposition is receiving increased attention in microelectronic applications.


Automation Robotics


Handling reliability improves with in situ diagnostics

Wafer-handling systems in semiconductor process equipment can significantly limit overall tool reliability.