Issue

Corporate executives load up on stock options, especially in high-tech companies, hoping that future sales of their companies' products — or the company itself — will make them super rich.

The mass flow meter (MFM), in its current design, is good but has limitations — especially as process requirements change.

There is a transformation brewing in the world of flat-panel displays driven by a new solid-state device called organic light-emitting diode (OLED).

Solid State Technology asked executives to comment on the advantages and disadvantages of ALD vs. CVD techniques for gate dielectrics.

The formation of ultrashallow junctions (USJ) poses major challenges as device technology approaches the 65nm node.

In the past year, a great deal of hope has been placed on immersion lithography technology to extend 193nm optical wavelength step-and-scan systems beyond 65nm processes for IC manufacturing.

Infusion doping is a new technique for doping silicon with a gas-cluster ion beam source.

Until recently, the sole measure of a reticle's cleanliness prior to use was inspection.

Alternative dielectric materials that would replace silicon dioxide for applications such as gate-dielectric transistor and integrated passive metal-insulator-metal (MIM) capacitors have to pass the stringent and complex requirements of each application.