Issue



Table of Contents

Solid State Technology

Year 2005
Issue 11

DEPARTMENTS

Editorial


The future of energy

Is the world running out of oil? Will there be enough fuel available as China and India rapidly industrialize?


Tech News


Technology News

Scientists have been trying to get an organic compound that emits a stable blue light with a lifetime that exceeds the previously thought 1000 hr lifetime barrier ever since Shuji Nakamura’s invention of the first inorganic blue LED in the mid-90s.


Flat Panel Displays


Consumer economics drive FPD manufacturing strategies

The challenge in discussing flat-panel displays (FPD) is that they are both a technology and an application.


Product News


Product News


Industry Forum


Reaching 45nm requires an accelerated flow of innovation

If the industry is to reach the 45nm node by decade’s end, it will be due, in large part, to a continuing acceleration of the flow of innovation, mostly from the bottom up.


LOW-X03BA-SPECIAL-REPORT

Interconnect


45nm node integration of low-k and ULK porous dielectrics

As the semiconductor industry approaches the 45nm process-technology node, the capacitance of the copper interconnect must be reduced to lower the RC delay and increase chip performance.


Copper Low X03ba


Analyzing damage from ultralow-k CMP

Introduction of porous ultralow-k (ULK) materials poses challenges, such as poor mechanical properties due to porosity, that affect all unit processes, including CMP.


Etch


Controlling porous low-k damage with decoupled plasma etching

One of the key challenges in backend integration is damage to the low-k dielectric during etch/ash processes.


FEATURES

Gases Gas Handling


Fluorine plasma chemistry for high-AR dielectric etching

As device sizes continue to shrink, anisotropic dielectric etching faces a daunting list of challenges that include etch selectivity, etch uniformity, aspect-ratio dependent etching, and etch stop.


Contamination Control


Using ‘statistical dashboards’ to automate particle and yield analysis

In semiconductor fabrication, optimized control over hundreds of process steps and multiple equipment sets is essential to achieving high yields in volume manufacturing.


SPECIAL-SECTION-ASIA-PAC

Features


Japan ramps up for high-volume SOI-based manufacturing

The silicon-on-insulator (SOI) revolution that was first launched in Japan more than 25 years ago is returning home.


Features


What’s driving outsourced assembly and test in Japan

Successful suppliers to the semiconductor industry must acknowledge the importance of Japan in semiconductor manufacturing.