Issue



Table of Contents

Solid State Technology

Year 2002
Issue 12

DEPARTMENTS

Editorial


New fable of the tortoise and the hare

Once upon a time, some very clever engineers found that by fiddling with sand and light beams (and a few chemicals) they could build wonderful things.


World News


3Q chip sales up; equipment orders decline in September

Worldwide semiconductor sales climbed to $36.9 billion in 3Q02, an 8.2% sequential increase from the $34.1 billion in revenue reached in 2Q02 and a 21% rise from the corresponding period of 2001, according to the Semiconductor Industry Association (SIA).


Tech News


MEMS may help the blind to see

A technical team from five national labs, a private company, and two universities have set out to create a MEMS to help some who are blind to see.


Bacus Report


An OASIS by the sea at BACUS 2002

The atmosphere of the 22nd BACUS Photomask Symposium in Monterey, CA, was oddly upbeat, with a record 156 papers and high attendance, in spite of depressed industry conditions.


Market Watch


A close look at the Bluetooth market

After an unpromising performance in 2001, the Bluetooth market has improved in 2002.


Calendar


Calendar


Industry Insights


Solving the 193nm optics contamination puzzle

To those dedicated to the control of molecular contamination, 193nm lithography presents its own set of demanding challenges.


FEATURES

Cover Article


Real fab comparisons reveal advantage to inorganic-based polymer removal

AMD and SEZ have been collaborating to implement an SEZ-developed, single-wafer inorganic process at AMD's Fab 25.


Vacuum Technology


Improving production efficiency withfaster vacuum loadlocks

The International Technology Roadmap for Semiconductors (ITRS) outlines the need for a reduction in factory cycle time from 1.4 to 1.1 days by 2010 — a 27% improvement.


Ion Implantation


Results from SRTF show promise for shallow junction ion implant anneal

The objective of spike annealing used for shallow junction formation is to achieve maximum electrical activation with minimal dopant diffusion.


Packaging Assembly


Analyzing the process window for laser copper-link processing

One of the more established final steps in fabricating ICs with circuit redundancy, such as memory, involves laser processing of fuses (or links) to disable defective circuit elements and replace them with good redundant ones [1].


PRODUCTS

Product News.html


Product News