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Editorial Diverging needs for process tools
Several factors are creating the need for greater diversity in process tools, and those toolmakers that recognize emerging requirements are making changes to their designs that should pay off in the future.
World News World News
Tech News Building Cu nanostructures with molecular
A group of scientists from the University of Aarhus in Denmark, in collaboration with CEMES-CNRS in Toulouse, France, ....
Tech News Lead-free commercially close, but likelihood only 18%
Several presentations at Semitool's Peaks in Packaging 2002 conference focused on the industry's readiness with lead-free bumping technology for wafer-level packaging, where the current choice is between electrochemically deposited near-eutectic SnAg, SnCu, and SnAgCu.
Tech News Serendipitous applications: Ball Semi sells litho tool and MEMS sensor
After years of skepticism over its unusual plan to make spherical semiconductors, Ball Semiconductor is about to start shipping real product to real customers. But it won't be a tiny ball-shaped semiconductor device after all.
Show Report IEEE VLSI Symposia: Hot tech in tropical locale
For 22 years, semiconductor engineers from both sides of the Pacific have met at the IEEE VLSI Technology and Circuits Symposia, mostly in Hawaii.
Show Report No clear low-k winner at IITC, ISMT Workshop
A heated debate by attendees of the recent International Interconnect Technology Conference (IITC) and International Sematech's Ultralow-k Workshop did not give supporters of either SOD dielectric films or CVD films a definitive victory.
Asiafocus Selete Symposium 2002: Progress in e-beam, 157nm
E-beam seems to look a lot better from the Japanese side of the Pacific. The approach shared attention with 157nm technology at Selete Symposium 2002, the consortium's annual update on the progress of its research programs.
Asiafocus Japan opens national Tsukuba research fab, complains about other projects
Japan officially opened its government-funded research fab in Tsukuba on June 17, planning to run the first wafers last month. The 22,000m2 facility, with a staff of 400, will serve as a pilot line to link Japan's labs and fabs.
Market Watch The photomask industry: Minimizing a crisis in escalating costs
The photomask industry is between the proverbial rock and a hard place.
New Products New Products
Industry Insights e-diagnostics: Moving beyond the data ownership issue
Enhancing overall operational efficiency in today's fabs hinges strongly on the ability to predict maintenance needs and rapidly diagnose faults on key systems.
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