Issue



Table of Contents

Solid State Technology

Year 2000
Issue 2

DEPARTMENTS

Editorial


Don't count out Japan

A lot has been written lately about Japan's sluggish recovery. This is in stark contrast to a couple of decades ago, when Japan became the global leader in consumer electronics and DRAMs, and flooded the world with well-built, fuel-efficient automobiles.


World News


World News

Worldwide highlights; USA; Japan; Asia/Pacific; and Europe


World News


IEDM 1999 focused on CMOS solutions

It was hard to miss the concentration on CMOS gate oxide technology and system-on-a-chip ICs at this year's IEEE International Electron Devices Meeting (IEDM) in Washington, DC.


Eurofocus


Advent of SOCs thwarted: Panelists cite packaging standards testing costs

The move to the next level of system-on-a-chip (SOC) designs is being thwarted by major problems in the complexity and costs of testing, according to a panel of European executives at the Productronica exhibition in Munich, Germany.


Asiafocus


Japanese consortium SELETE reports on evaluation in progress

Japanese consortium SELETE reports on evaluations in progress While market conditions have improved enough to give some chipmakers confidence to move ahead with plans for 300mm operations, the Japanese consortium evaluating 300mm tooling says there are still a number of hurdles to be overcome before a complete, production-worthy toolset will be available.


Market Watch


Photomask market prospect brighter; industry consolidation continues

The worldwide market for photomasks is poised for recovery in 2000, according to a recent market research report.*


Product News


Product News

Semi-automated cleaning system; Copper electroplating technology; Film metrology solutions; Process management software; and more.


People


People

Micronic Laser Systems AB, Täby, Sweden, has appointed Jorge Freyer president of its newly incorporated US operation, Micronic Laser Systems Inc....


New Literature


New Literature

Sensor and sealing assembly brochure; Ultrahigh vacuum valve brochure; Packaging brochure and selector guide; and more.


FEATURES

Vacuum Technology


Pressure measurement in ion implanters

A quick way to increase uptime and lower the cost of consumables on an ion implanter is to replace the hot cathode ion gauge in the ion source with a cold cathode gauge.


Etch


Etching: Closed-loop bias voltage control for plasma etching

The stated goal for high-density etchers of completely decoupling plasma generation from ion energy control cannot be achieved with conventional methods of monitoring RF power delivery.


Thermal Processing


Thermal Processing: RTP temperature calibration using titanium silicides

A large, efficient wafer fab is likely to have each RTP step performed on more than one system.


Lithography


Lithography: Birefringence in fused silica and CaF2 for lithography

Part One in a Series: Studies of residual linear birefringence in fused-silica and calcium fluoride samples indicate that optical component suppliers and microlithography tool manufacturers and users need to be more aware of this property and its effect on optical lithography progresses.


Wafers Substrates Thickn


Wafers/Substrates: Thickness measurement of submonolayer native oxide films on silicon wafers

A method has been developed for measuring the thickness of submonolayer native oxides formed on silicon wafers during rinsing.


Industry Insights


Business @ any speed

New software development tools are having a profound effect on today's semiconductor factory automation and communications projects, particularly object-oriented tools like those used in Microsoft's Windows DNA (distributed internet application) architecture.