Tag Archives: Advanced Packaging

October 25, 2011 — Xilinx Inc. (Nasdaq:XLNX) began shipping its Virtex-7 2000T field programmable gate array (FPGA), a programmable logic device with 6.8 billion transistors: 2 million logic cells, a die-stack architecture, low power consumption, and a more flexible design than large ASICS and monolithic FPGAs.

Figure 1. Xilinx Virtex-7 2000T FPGA.

Xilinx structured the FPGA using its stacked silicon interconnects, a 2.5D IC packaging technology makes the FPGA the equivalent to 20 million ASIC gates. Four separate FPGA die are interconnected on a passive silicon interposer that has 10,000+ high speed interconnects (Figure 1). Aligning die on vertical planes (side by side) avoids power, heat, and reliability issues of multiple die stacked on top of each other. The interposer actually reduces stress on the low-k dielectric atop the FPGA.

Through-silicon vias (TSVs) with 10:1 aspect ratios are used to package the device. The TSVs do not interfere with system signal integrity, Liam Madden, corporate vice president of FPGA Development and Silicon Technology at Xilinx, noted in a press event for the product launch. Microbumps are used on the die, providing a huge aerial density increase over C4NP. These fab and packaging techniques are available to the industry already, Madden said. Xilinx is just combining them in a smart way to decrease power use and increase performance.

The device consumes about 19 watts at full operation, comprable to the performance of 4 monolithic FPGAs using 112 watts. In a product demonstration, the device had all cells performing some calculation, with 180000 MIPS computing power and only 20W power consumption. The software for operation cuts down on compile time by 4x.

Figure 2. Product demonstration.

The Virtex-7 2000T shares a unified architecture with Xilinx

PRNewswire via COMTEX/ — Materials company Brewer Science Inc. and equipment supplier EV Group (EVG) will both commercialize ZoneBOND technology for temporary wafer bonding, thin wafer processing, and debonding applications.

ZoneBOND works with silicon, glass, and other carriers and existing adhesive platforms. Debonding can take place at room temperature with virtually no vertical force on the device wafer. ZoneBOND defines 2 carrier wafer zones, with strong perimeter adhesion and minimal center adhesion. This allows wafer grinding and backside processing at high temperatures, while enabling low-force separation. The polymeric edge adhesive can be removed by solvent dissolution or other means.

Paul Lindner, executive technology director of EV Group, said, "Combining Brewer Science’s advanced material development and process integration and EVG’s field-proven equipment and process solutions, ZoneBOND will enable customers to achieve a quantum leap in thin wafer processing."

Brewer Science makes specialty materials, equipment, and process solutions for applications in semiconductors, advanced packaging/3D ICs, MEMS, displays, LEDs, and printed electronics. Learn more about Brewer Science at www.brewerscience.com.

EV Group (EVG) makes wafer-processing solutions for semiconductor, MEMS and nanotechnology applications. More information is available at www.EVGroup.com.

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October 19, 2011 — Nanotech accelerator SVTC Technologies, wet chem equipment maker Amerimade Technology, and chemicals company Shanghai Sinyang Semiconductor Materials will collaborate on electroplating processes for through-silicon via (TSV) that are production-ready for advanced packages and micro electro mechanical systems (MEMS).

By combining a commercialization specialist with tool and materials providers, this partnership will be able to develop new electroplated film processes for TSV in over 95,000 square feet of state-of-the-art cleanroom, staffed 24/7 with SVTC’s engineering team, electroplating toolsets from Amerimade, and chemical formulae from Shanghai Sinyang.

The aim is a commercially viable process for electroplating through-silicon via interconnects that can be ramped up to volume production at advanced packaging houses, semiconductor manufacturers, and MEMS fabrication and packaging facilities.

Shanghai Sinyang Semiconductor Materials Co. Ltd. provides research and development, design, and manufacturing of advanced chemicals for the electronics industry, specifically for semiconductor manufacturing, packaging test and assembly, solar cell manufacturing, and avionics. More information can be found at www.sinyang.com.cn.

Amerimade Technology Inc. designs, manufactures and provides long-term field support for wet chemical processing systems. More information can be found at www.amerimade.com.

SVTC Technologies provides development and commercialization services for innovative semiconductor process-based technologies and products, cost effectively and in an IP-secure manner. More information can be found at www.svtc.com.

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October 19, 2011 – PRNewswire-Asia — NEXX Systems shipped a Stratus electrochemical deposition tool to Nantong Fujitsu Microelectronics Co. Ltd. (NFME), based in Jiangsu province, China. NFME will use the Stratus for copper pillar and re-distributed layer (RDL) advanced packaging applications.

The Stratus is a fully automated electrochemical deposition system that deposits thick metal layers. Wafers are processed in a vertical orientation for higher quality results and higher-throughput concurrent processing.

The Nexx tool will help NFME "keep pace with [its] aggressive roadmap," said NFME’s president, member of board, Mr. Shilei, adding that the tool will be used to package diverse chips for international customers. NEXX CEO Tom Walsh noted that the Stratus deposition system is well suited to packaging consumer mobile ICs.

The sale into China is a milestone in NEXX’s infrastructure and staff expansion in the region, where NEXX added a Shanghai office. NEXX sees China’s semiconductor packaging industry shifting to leading-edge packaging technologies, citing Prismark Partners’ Brandon Prior, who notes that China is becoming "a key region" for advanced packaging such as wafer-level technologies (WLCSP, FOWLP), through silicon vias (TSV), and copper pillar bumps.

NFME is a technology and market leader that focuses on testing and assembling semiconductors for more than half of the top semiconductor manufacturers. Learn more at http://www.fujitsu-nt.com/en/

NEXX provides the global semiconductor industry with productive, flexible and efficient deposition technology for advanced packaging applications. Learn more at http://www.nexxsystems.com/

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October 18, 2011 — Semiconductor equipment supplier SUSS MicroTec, in partnership with temporary bonding adhesive maker TMAT, will deliver SUSS MicroTec’s new-generation high-volume temporary wafer bond tool clusters to a leading IDM.

The integrated device manufacturer (IDM) will temporarily bond thinned 300mm wafers to carrier wafers for 3D packaging processes. The company makes logic and memory devices. Installation will take place in Q4 2011.

Also read: Thin wafers win majority in electronics by 2016

TMAT adhesive materials and the TMAT process for temporary bonding will be implemented on the SUSS cluster. TMAT and SUSS MicroTec collaborated to tweak the tools and materials to enable the customer’s wafer and process requirements over several months. High throughput was a main purchasing factor for the IDM.

SUSS MicroTec Group is a supplier of equipment and process solutions for microstructuring applications, including back-end packaging. Learn more at www.suss.com.

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October 18, 2011 – Marketwire — MVTS Technologies opened new offices in San Jose, CA; Penang, Malaysia; and Hsinchu, Taiwan to support growing demand for test, assembly, and other IC production equipment and services among semiconductor manufacturers.

MVTS specializes in extending the usage life of semiconductor inspection and automatic test equipment (ATE) and other technologies used in the design, development and manufacturing of components.

MVTS identifies market needs in regional markets and adapts its service portfolio, said Ron Maassen, CEO of MVTS. The three new facilities will better support manufacturing, refurbishing, and maintaining legacy systems.

The facility in Penang is ISO 17025 qualified to support calibration service.

MVTS Technologies provides refurbished systems, upgrades and consumables to semiconductor manufacturers in more than 15 countries. More information is available at www.mvts.com.

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October 17, 2011 — ERS uncrated the ERS AirCool 3 wafer thermal test system at last week’s SEMICON Europa in Germany.

ERS designs air-cooled thermal chucks for wafer test because of increased in-field reliability. The Aircool 3 is ERS’s third-generation thermal chuck system that exclusively uses air for cooling.

Features from the AirCool and AirCool plus systems are integrated into a modular system designed to be quickly  upgradeable on site. All major wafer prober systems can be fitted with the AirCool 3.

Modular options include zero footprint applications and semi-remote touch-panel control.

ERS makes thermal chucks for wafer test. Learn more at http://www.ers-gmbh.de/ers-gmbh/index.php.

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October 14, 2011 — Steven J. Adamson, marketing specialist with dispensing/coating/jetting equipment maker Nordson ASYMTEK, received the Daniel C. Hughes, Jr., Memorial Award, for the greatest contribution to IMAPS and the microelectronics packaging industry, including technical and service contributions.

The International Microelectronics And Packaging Society (IMAPS) is dedicated to the advancement and growth of microelectronics and electronics packaging. Adamson received the award during the IMAPS conference in Long Beach, CA this week.

Adamson chaired the San Diego IMAPS chapter for 2 years, was general chairman of the 2006 International Symposium on Microelectronics, and served as IMAPS president in 2008. In 2009, he volunteered to be chairman of the IMAPS Microelectronic Foundation, which helps students and academia participate in IMAPS activities through grants and awards. In 2010, Adamson received the IMAPS President’s Award.

Adamson accepted the award with an acknowledgement of the importance of IMAPS to students — with funding, paper publicity, event travel — and the importance of students to IMAPS.

Adamson is a 30+ year veteran in microelectronics assembly, working at Nordson ASYMTEK since 1998, as well as time at Kodak, Motorola, PLessey, International Computers Ltd.

Bio:
Adamson has held positions at Nordson Asymtek as applications engineering manager, and marketing specialist. He has worked in all aspects of packaging and assembly from R&D to manufacturing, designing multi-chip modules, hybrid circuits, printed circuit boards, thermal printed heads, and magneto-resistive head assemblies. He has delivered technical papers on wire bond encapsulation, chip scale package and flip chip assembly, PCB design rules, and reliability and has had papers published in leading industry trade journals both domestically and internationally. He is co-author with Charles Harper on a book titled, "Handbook of Plastic Processes," published by McGraw-Hill.

Adamson previously held positions with Kodak, Motorola in the U.S., and Plessey, International Computers Ltd in the U.K.  He has been awarded five US and two UK patents. In 2005 he was presented with an award by the San Diego Engineering Council for "Outstanding Service to Electrical Engineering". Originally from the U.K., he holds a Higher National Certificate in Electrical Engineering from Stockport College of Technology and for several years was the lead instructor and advisor to the University of California San Diego (UCSD) extension course on Microelectronic and Optical Packaging.  

IMAPS leads the microelectronics packaging, interconnect and assembly community, providing means of communicating, educating and interacting at all levels. Find out more at www.imaps.org.

Nordson ASYMTEK makes precision automated fluid dispensing, conformal coating, and jetting technologies. For more information, visit NordsonASYMTEK.com

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October 11, 2011 – PRNewswire — EV Group (EVG) and All Silicon System Integration Dresden (ASSID) of Fraunhofer IZM will jointly develop high-volume 3D IC manufacturing processes, focusing on temporary bonding and debonding processes to support chip-to-wafer bonding with up to 600um-thick topographies.

ASSID will host the collaboration with its 300mm 3D manufacturing/packaging line in Dresden, using EVG850 TB/DB systems already installed there. The partners will also use ASSID test samples and demonstrator materials. EVG will contribute 3D IC fab tool and process expertise. ASSID’s established network with other research institutes and universities can be used to verify viability of new developments.

Chip-to-wafer bonding allows manufacturers to test die prior to 3D bonding, resolving low-yield wastage associated with bad die. Also, heterogeneous technologies (different sizes, feature dimensions, etc.) can be bonded in 3D die stacks with a broad range of functionality (logic, memory, mixed signal, photonics, etc.) in a compact form factor.

Today’s advanced temporary bonding/debonding processes support bonded wafer topographies up to 100um thick. More complex die structures require thicker wafers. EVG and ASSID will work on improving rigid backgrinding support during wafer thinning and low-vertical-force debonding to avoid defects during debonding.

ASSID also announced today that it has installed an Altatech Semiconductor 300mm CVD system for advanced TSV fab.

Fraunhofer IZM-ASSID is tasked with developing 3D packaging technologies, including new interconnect and assembly processes. As part of the Fraunhofer IZM Institute, which specializes in transferring IC advanced packaging and system integration research results to industry, ASSID is integrated into a technology network of applied research institutes and universities.

EV Group (EVG) makes wafer-processing tools for semiconductor, MEMS and nanotechnology applications. More information is available at www.EVGroup.com.

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