Tag Archives: Clean Rooms

April 29, 2008 — /SEMI/ — SAN JOSE, CA — Semiconductor equipment and materials suppliers face serious and mounting challenges in intellectual property (IP) protection, with adverse economic consequences for the entire microelectronics industry, according to a new white paper published by SEMI.

The report, “Innovation at Risk — Intellectual Property Challenges and Opportunities,” provides a detailed study of various IP challenges facing the equipment and materials industry and offers recommendations for improving the situation. The white paper is based on a survey of 49 SEMI member companies representing 56 percent of the total annual sales of the entire equipment and materials industry. The study was conducted by the Noblemen Group.

“Protection of IP rights is a serious area of concern for the semiconductor equipment and materials industry, which supplies critical enabling technologies to microchip manufacturers,” says Stanley Myers, president and CEO of SEMI.

The study found that increasing IP violations are driven by factors such as weak IP protection laws and weak enforcement and penalties in many regions of the world, outsourcing and offshoring in Asia, and the ongoing quest by the semiconductor industry for cost reduction in a consumer-driven market.

Close to 90 percent of the companies that participated in the study reported experiencing some form of IP violation, including infringement, counterfeiting, and theft of core technologies, core products, spare parts and components, trade secrets, and trademarks. Fifty-four percent of companies characterized these infringements as serious to extremely serious.

“In the highly competitive global business environment, IP protection is essential to the industry, allowing it to make the significant R&D investments needed to sustain technological advancement of the semiconductor device industry,” says Bob Akins, CEO of Cymer, Inc. and vice chairman of SEMI. “IP violations of various forms undermine the development of the next generation of equipment and materials required to meet the challenges of Moore’s Law.”

“Semiconductor equipment and materials companies offer complex and advanced systems to a highly specialized market. Continued violations of IP could undermine the development of new equipment and materials for the next generation semiconductor devices,” says Tetsuro “Terry” Higashi, chairman and CEO of Tokyo Electron.

These companies identified Taiwan, China, Korea, and North America as regions of the greatest concern. However, the form and nature of IP violations in each region vary and occur for different reasons, especially in the case of North America. In addition, about 53 percent of the companies report IP violations by their customers (i.e., chipmakers). Nearly 60 percent of the companies surveyed have taken legal action against IP violations. However, only 48 percent of them were satisfied with the outcome, citing legal processes that were slow, expensive, and unpredictable. Companies were also concerned about costs and variability in the outcome of litigation.

Over 60 percent of the companies surveyed have experienced adverse economic impact caused by IP violations — due to loss of sales and market shares — with estimated lost revenues ranging from one percent to 2.5 percent of the total annual sales of the industry. In aggregate, the total magnitude of economic impact due to IP violations on the industry including lost sales, market share losses, loss of sales due to pricing pressure, and loss of market valuation is in the range of US$2-$4 billion per year.

To address IP concerns, the white paper provides a set of recommendations to SEMI that focus on expanding public policy efforts, working with governments for global IP protection, driving customer dialogue, working with SEMI member companies to promote a global culture of respect for the industry IP assets, as well as providing IP management education to its members.

The IP report can be downloaded in PDF format from the following URL: http://www.semi.org/ipwhitepaper.

About Noblemen Group
The Noblemen Group is a specialized management advisory organization focused on the Technology sector. The company’s services include market research, M+A advisory services, global due diligence support and interim management for clients in the microelectronics, homeland security, and analytical instrumentation industries.

About SEMI
SEMI is the global industry association serving the manufacturing supply chains for the microelectronic, display, and photovoltaic industries. SEMI member companies are the engine of the future, enabling smarter, faster, and more economical products that improve our lives. Since 1970, SEMI has been committed to helping members grow more profitably, create new markets, and meet common industry challenges. SEMI maintains offices in Austin, Beijing, Brussels, Hsinchu, Moscow, San Jose, Seoul, Shanghai, Singapore, Tokyo, and Washington, DC.

Visit www.semi.org

May 1, 2008 — /PRNewswire/ — ROCKVILLE, MD — Officials from Novavax, Inc., the State of Maryland, and Montgomery County today celebrated the opening of Novavax’s new state-of-the-art vaccine production facility at the company’s headquarters in Rockville, MD. The 5,000-sq.-ft., $5 million pilot and commercial-scale manufacturing plant will be used to produce vaccines addressing a broad range of infectious diseases. The facility will initially supply influenza vaccine for the company’s current clinical programs with planned annual capacity of 10 million doses.

“The completion of this facility represents a major milestone for Novavax and a significant accomplishment for our development team,” says Novavax president and CEO Rahul Singhvi, Sc.D. “This facility is seen as a model vaccine plant for production of all of our virus-like-particle-based vaccines and will serve as a prototype for other similar local country facilities through collaborators such as GE Healthcare. It incorporates new processes that are designed to increase production yields with significantly less infrastructure and capital cost compared to current approved vaccine facilities. Our production technology, which can be used to produce many types of vaccines in a single facility, combined with our use of disposable materials, offer the potential advantage of simple portability of production equipment to sites around the world, where vaccines may be urgently needed.”

Unlike traditional egg-based vaccine production, which is expensive and can require large centralized manufacturing plants with complex infrastructure, the Novavax facility employs unique cell-based technology and disposable manufacturing systems which require less production infrastructure and represent a simpler and potentially more efficient approach to vaccine production. The novel methods being applied at Novavax’s new facility will enable the company to produce vaccines within 12 weeks of flu strain identification, which is less than half the time required by current manufacturers of approved vaccines. These methods should also enable the company to respond faster to seasonal or pandemic flu outbreaks once the vaccines in development are approved.

Novavax has four proprietary vaccine candidates in development addressing pandemic influenza, seasonal flu, Varicella zoster, and an undisclosed infectious disease target. The company’s lead vaccine candidate to protect against pandemic influenza is currently in Phase II clinical testing.

“I congratulate Novavax on the opening of this impressive facility and wish them continued success in developing innovative, vital vaccines to prevent infectious diseases such as influenza,” says Montgomery County Executive Isiah Leggett. “We are very pleased to have Novavax headquartered in Montgomery County, as they are certainly one of our brightest, most promising biotechnology companies and we look forward to their continued growth and success.”

“Novavax’s decision to relocate their corporate headquarters to Maryland and expand with this new state-of-the-art vaccine production facility is a tremendous win for both Montgomery County and the State of Maryland,” says David W. Edgerley, Secretary of the Maryland Department of Business and Economic Development. “This new facility will not only build on Governor O’Malley’s vision to strengthen our State’s reputation as a bioscience powerhouse, but also puts Maryland on the forefront of disease control and prevention.”

About Novavax
Novavax, Inc. is a clinical stage biotechnology company, creating novel vaccines to address a broad range of infectious diseases worldwide using advanced proprietary virus-like particle (VLP) technology. The Company produces these VLP based, highly potent, recombinant vaccines utilizing a new, efficient manufacturing solution.

Visit www.novavax.com

May 1, 2008 — /PRNewswire/ — EDMONTON, ALBERTA, CANADA — QSV Biologics, Ltd. (QSV), a North American-based biologics contract manufacturing organization (CMO) located in Edmonton, AB, Canada, has been awarded a cGMP manufacturing contract for a recombinant protein under development by Pfizer, Inc. The protein will be manufactured at QSV’s Edmonton facility and is intended for clinical trials. Work on the project is to begin immediately and will include technology transfer, scale-up, and cGMP manufacturing.

Graeme Macaloney PhD, PEng, founder, president, and CEO of QSV, says, “We are extremely pleased and honored that Pfizer has chosen QSV Biologics from a strong field of contending CMOs as their manufacturing partner for this project. The execution of this contract is the culmination of extended evaluations by the Pfizer organization, reflecting QSV’s continuing dedication to quality, speed, and value. This project is an extremely good fit for our capabilities and indicative of our ability to respond to the challenging requirements of respected companies like Pfizer.”

“Pfizer is pleased to engage QSV for the clinical manufacturing of a complex biotechnology product,” says Rick Rutter, PhD, vice president of global biologics in the Pharmaceutical Sciences division of Pfizer Global Research and Development. “Speed to clinic is of great importance for early development candidates and QSV has a record of delivering quality product on time and on budget. QSV will play a supporting role in realizing Pfizer’s vision of becoming a top-tier biotherapeutic company.”

About QSV Biologics
QSV Biologics, Ltd., is an international cGMP biologics contract manufacturer (CMO) providing microbial fermentation, cell culture, and purification services. QSV’s facility has a 12-year track record including an Establishment License for manufacturing clinical trial and commercial biologics. QSV was the sole recipient of the prestigious international Frost & Sullivan “Customer Value Enhancement Award” in 2005 and the BioAlberta “Company of the Year Award” in 2007. QSV’s global clientele spans 3 continents and develops protein therapeutics, vaccines & diagnostics.

Visit www.qsvbiologics.com

May 2, 2008 — /PRNewswire/ — KALAMAZOO, MI — Stryker Corp. announced today that its Biotech Division has received a warning letter from the U.S. Food and Drug Administration (FDA) related to quality systems and compliance issues at its Hopkinton, MA location.

The warning letter concerns observations made during an inspection that was initiated in September 2007. The letter primarily cites issues relating to Stryker Biotech’s handling of a past clinical study, its quality system including medical device reporting procedures, and the integrity of hospital Institutional Review Board (IRB) documentation used to approve implantation of Humanitarian Use Devices.

Several corrective actions and changes to processes put in place by Stryker Biotech were noted in the letter and future improvements are forthcoming as the division continues to work with FDA. No products have been recalled as a result of this warning letter. In addition, there were no observations related to any ongoing clinical trials or clinical trial IRBs.

“We take this matter very seriously, will continue to cooperate fully with FDA, and have initiated significant measures to address FDA’s concerns,” says Stephen P. MacMillan, president and CEO of Stryker Corp.

In addition to specific corrective actions implemented at the Biotech Division, Stryker recently launched a company-wide Quality Action Plan aimed at strengthening corporate-level oversight and at institutionalizing a more consistent implementation of best practices for meeting FDA requirements.

As part of its Quality Action Plan Stryker has:

  • Strengthened roles and responsibilities to increase accountability for quality
  • Established new company-wide standard operating procedures for quality processes that will be implemented consistently at each division
  • Reorganized quality functions at the plant, division, and corporate levels and increased third-party monitoring at all levels
  • Tied a significant portion of senior management’s compensation to meeting quality improvement measures

“We are committed to strengthening our quality systems to fully meet all FDA requirements. While we have made progress in fulfilling this commitment, we still have more work to do” MacMillan adds.

About Stryker Corp.
Stryker Corp. is one of the world’s leading medical technology companies with the most broadly based range of products in orthopaedics and a significant presence in other medical specialties. Stryker works with respected medical professionals to help people lead more active and more satisfying lives. The company’s products include implants used in joint replacement, trauma, craniomaxillofacial and spinal surgeries; biologics; surgical, neurologic, ear, nose & throat and interventional pain equipment; and endoscopic, surgical navigation, communications and digital imaging systems; as well as patient handling and emergency medical equipment.

Visit www.stryker.com

FDA has received approval from the U.S. State Department to establish eight full-time permanent FDA positions at U.S. diplomatic posts in the People’s Republic of China, pending authorization from the Chinese government. This is an important step forward in FDA’s plans to hire and place FDA staff in China over the next 18 months, the agency says. In addition, FDA will be hiring a total of five local Chinese nationals to work with the new FDA staff at the U.S. embassy in Beijing and the U.S. Consulates General in Shanghai and Guangzhou.

So I got a press announcement from FDA this week announcing it was embarking on a “major hiring initiative” to fill more than 1,300 positions within the next several months as part of a multi-year hiring effort. The new employees will be medical officers, consumer safety officers, health care and regulatory scientists, and other such professionals involved in protecting the public from unsafe food and drug products. And I said, “Great! FDA is finally stepping up to its charter and working to provide the manpower demanded for a truly effective safety monitoring and inspection program.”

I read on. It turns out that many of these positions will be located in the Washington metropolitan area, specifically Rockville, Silver Spring, and College Park, MD. That’s logical since that’s where FDA is largely based. And there will also be new hirings across the country in FDA’s five regions, 20 districts, more than 179 resident posts, and the newly created FDA offices overseas.

And I stopped. What was that? “

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Tissue banks and researchers rely on frequent testing and strict cleanroom controls to keep human cell- and tissue-based products alive and free from contamination.

By Sarah Fister Gale

Every year, more than 1.5 million units of allograft tissues harvested from deceased donors are distributed annually for transplant in the U.S. While the risk of bacterial infection from an allograft tissue transplant is extremely low, in an industry where the lives of human patients are at stake, any contamination risk is a serious concern. Fortunately, the industry has established strict protocols for the screening and handling of tissue in the manufacturing environment to effectively manage that risk.

“The current risk of an allograft infection to the average patient appears to be much less than the risk of infections surrounding the operation itself,” notes Joel Osborne, vice president of quality assurance for the Musculoskeletal Transplant Foundation (MTF), an American Association of Tissue Banks (AATB) accredited tissue bank in Edison, NJ. Still, the allograft industry and the FDA are making constant strides to more strictly control contamination in the handling and processing of human tissue-based products.

Patients receiving allograft tissues put their lives in the hands of the companies supplying those products, relying on them to enforce strict tissue reviews, cleaning and disinfecting processes, and monitoring strategies to ensure donor tissue is healthy and free from infection, and that it does not encounter contaminants during processing.

Human tissues intended for transplantation have been regulated by the U.S. Food and Drug Administration (FDA) since 1993 under 21 CFR 1271. All human cells, tissues and cellular, and tissue-based products (HCT/Ps) used for transplant fall into this category, including bone, ligament, skin, and other soft tissues. These requirements were designed to prevent the introduction, transmission, and spread of communicable diseases via HCT/Ps by ensuring that the HCT/Ps do not contain communicable disease agents, are not contaminated, and do not become contaminated during manufacturing.

As part of the ongoing effort to enforce rigorous safety methods, in May 2005, FDA put three new, comprehensive regulations into effect that address manufacturing activities associated with HCT/Ps. The first requires companies that produce and distribute HCT/Ps to register with FDA. The second provides criteria that must be met for donors to be eligible to donate tissues (the “Donor Eligibility” rule). The third rule defines current Good Tissue Practices (cGTPs), which govern the methods used in, and the facilities and controls used for, the manufacture of HCT/Ps; recordkeeping; and the establishment of a quality program.

Many tissue banks also receive accreditation from the AATB, a voluntary accreditation organization that sets standards for tissue banking.

Every step of the way

“HCT/Ps are unlike pharmaceutical products because they are composed of living functional cells,” notes Dr. Scott Burger, principal of Advanced Cell and Gene Therapy, a consulting firm in Chapel Hill, NC. “They can respond to the microenvironment of the patient, taking advantage of their intrinsic biological functions and capabilities, but they are very complex and challenging materials to handle.”

The success of a tissue-based product relies on its ability to stay alive and functional, which dramatically limits sterilization options and requires strictly controlled transportation and handling conditions to maintain that viability. Those limits in larger part define the processing environment.

“A tissue manufacturing facility cannot be a sterile operation because you are working with biomass,” notes Mark Hallworth, pharmaceutical business manager for Particle Measuring Systems in Boulder, CO. “Human tissue is a living organism that can’t be sterilized, so you’ve got to be able to prove you are in control of your processes at all times.”


Figure 1. A CryoLife technician dissects a human heart, retrieving valve and vascular tissue for preservation and eventual implantation. Photo courtesy of CryoLife.
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Proving that drives a lot of the environmental controls used by the HCT/P industry, and it begins with evaluating the donor tissue before it ever comes through the door.

The Donor Eligibility rule requires comprehensive screening of the donor’s medical and social histories, and testing of the donor for risk factors and/or clinical evidence of infection due to communicable disease agents and diseases, such as HIV, Hepatitis, or Strep A. The rule also includes requirements for recordkeeping, quarantine, storage, and labeling of the HCT/Ps.

If a donor meets the eligibility requirements, the tissue is removed in a hospital setting using aseptic surgical techniques. At the time of recovery, cultures of the tissue are taken to look for the presence of bacteria, mold, and fungi, with those test results later determining whether the tissue can and will be processed, says MTF’s Osborne. While every processing facility is different, at MTF the donor tissue is frozen at

Pre-planning and coordinated response to disaster helps garment manufacturer speed return to productivity

The experience of White Knight Engineered Products (WKEP) in dealing with disaster is a textbook example of how proper upfront planning and an immediate and well-coordinated response can make the difference between an insurmountable situation and an orderly and rapid recovery. Just three weeks after a devastating fire destroyed the cleanroom garment company’s Childersburg, AL, manufacturing and distribution center, WKEP was back in production at a temporary facility. And, just a little more than 7 months later, the company’s employees were able to move back into their fully rebuilt, refurbished, and dramatically improved plant.

It was the afternoon of June 4, 2007, when an electrical short circuit spawned the fire between the roof of the building and the ceiling panels over the manufacturing floor. Jane Collier, WKEP Childersburg manufacturing manager, recalls, “Safety was our first concern, and thank goodness no one was injured. We had just practiced an evacuation drill the previous month, and it paid off, because it was a close call.”

Meanwhile, WKEP president Scott Banks was meeting with his management team at the company’s Charlotte, NC, offices when the call came in. “We received a call from Alabama saying that there had been a fire, but the scope and extent of the damage wasn’t immediately clear to our people on site.” By 5:00 p.m. that same day, however, Banks and his team were on site in Childersburg, and whatever early uncertainty existed quickly disappeared as it became clear that a major disaster had occurred, with most of the damage caused not by the fire itself but by the associated smoke and water. “In addition to the extensive heat damage to the building, we lost every bit of our inventory, both raw materials and finished product,” says Banks.

Not surprisingly, one of the first calls made on the day was to the company’s insurance carrier, Factory Mutual/FM Global Insurance (Johnston, RI). Banks was pleased with their responsiveness. “This is why you have insurance and the importance of a good carrier,” says Banks. “FM is used to dealing with big issues, and certainly, in our eyes, this was the biggest issue. Their number one concern was the same as ours: Get us back up and running as quickly as possible.”


Figure 1. Smoke and water damage after the fire at WKEP’s Childersburg facility prompted the company to redesign the entire building, not only considering further fire safety measures but other improvements for lean manufacturing. Photo courtesy of White Knight Engineered Products.
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The first thing FM recommended was to immediately get a disaster-recovery company on scene to prevent and/or minimize any additional damage. Servpro Industries (Gallatin, TN) filled that bill, with a team immediately beginning the initial clean-up process–for example, getting the water out of the facility to prevent further damage. After that, the priority turned to getting the machinery out, cleaning it, and putting it into temporary storage trailers until a temporary facility could be located. A second company, Disaster Services, Inc. (Atlanta, GA), was also brought in to assist with the process.

Overall, Banks says that FM Global connected WKEP management with the people and expertise they needed to put together a roadmap to recovery and rebuilding. “They always proposed two to three options and were instrumental in helping us find the best solution.” For example, Banks points to the redesign of WKEP’s sprinkler system, which now includes sprinkler heads both between the roof and ceiling panels as well as below the ceiling. “As the previous fire started above the drop ceiling, we wanted to ensure that this type of disaster cannot occur again,” says Banks.

FM Global also connected the company with Gilbane Building Co. (Providence, RI) for initial advice on the rebuilding plan. But again, Banks points out that FM Global allowed them to decide themselves how to best meet their needs, and they eventually brought in their own primary contractor–BE&K of Birmingham, AL. Says Banks, “Yes, we relied on and benefited from Gilbane’s expertise, but at the same time, we also needed to stand on our own two feet, which is why we got BE&K involved. We focused on what we wanted the plant to do and turned to them for the best way to get there.”


Figure 2. WKEP’s managers and employees participated in the redesign with feedback on features from the lighting and layout on the manufacturing floor to areas such as the cafeteria. Photos courtesy of White Knight Engineered Products.
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The end result was a complete renovation of the facility from floor to roof. As explained by Banks, the only thing that remains of the original building is its aluminum shell, some cinderblock walls, and the concrete floor. “We pulled out everything–all wood, insulation, every pipe and wire. We didn’t want to take any chance that there would be any residue of the fire. No odor or any kind of potential contaminant.”

As WKEP general manager Greg Winn notes, it was also at this stage that the company began to take advantage of this opportunity to rethink the entire layout of the building and optimize it for current environmental concerns, manufacturing requirements, and operating costs. “We had a clean slate and almost too many options, but ultimately, we were able to rebuild to better meet our customers’ demands as well as the realities of the global economy.”

One major accomplishment was the complete separation of the manufacturing floor from the distribution areas. In fact, this move was part of an overall focus on implementing modern lean manufacturing principles. Says Winn, “We took a hard look at our raw material and workflows, emphasizing our need for a highly flexible yet tightly controlled production environment.” WKEP’s Childersburg plant focuses on the manufacture of quick turnaround, short production runs of specialty, highly custom cleanroom and protective garments. These include special design, flame retardant, and ESD protective garments as well as more esoteric products such as wheelchair and equipment covers.

Winn says the focus on lean manufacturing principles led the team to many basic improvements in the plant’s layout that seem simple, like placing their laser cutter in close proximity to their plotter and having their QC department open directly onto the manufacturing floor. “The result is that we’ve reduced a lot of walking around, improved the efficiency of people, and provided a better working environment overall.”

In truth, however, WKEP was already well along in embracing lean manufacturing principles even before the fire. The company had applied for and received a grant from the State of Alabama for training on lean manufacturing concepts, and everyone in the building was taken through the 8 to 10 week training program. As noted by Collier, “This training provided us with a good streamlined framework from which to advance.” Wireless routers were connected through a new high-tech network, allowing warehouse data transfer throughout the facility for easy location of product and raw materials. Traditional phones were replaced with voice over IP (VoIP) technology, allowing for easy connections between WKEP’s other facilities.

A number of new physical improvements were also made to the facility. For example, a new sealant and floor finish was put over the raw concrete floor to help control particulate and other potential contaminants. And more efficient, brighter, and cost-effective lighting was installed throughout the manufacturing area. Winn notes that in addition to improving the working environment of personnel, this change also dramatically aids their overall quality control and inspection process.

Another extremely important factor in WKEP’s successful and rapid recovery operation can be traced directly to its early business history in the manufacture of medical devices. Now, although the company no longer manufactures these products and is therefore no longer audited by the FDA, it nevertheless still works to adhere to FDA GMP guidelines. As noted by Banks, adherence to the FDA’s GMP requirements offers many practical benefits to the cleanroom industry and contributed significantly to their being back on line quickly. “We maintain data to trace a garment back to its date and location of manufacture. Equally important, we back up and store quality, manufacturing, and specification data off site in the event of a situation like this, and it’s this infrastructure that allowed us to get back into production quickly.”

Finally, as observed by Banks, the only way they could approach a project and challenge of this scope with any hope of success was to subdivide tasks and responsibilities and to count on the dedication of their employees. Most of WKEP’s employees and managers have been with them for many of the 40 years that its Controlled Environments division has been supplying protective apparel for cleanrooms in the pharmaceutical, microelectronics, and automotive industries. “All of our people stepped up to participate in their own areas of responsibility, whether it was the warehouse, manufacturing, IT, and even how to best decorate our offices and cafeteria for our employees. Our vendors also met our needs as quickly as possible and our customers stuck with us through this crisis. In an economy where the trend is to close domestic textile plants, we’re proud that we were able to rebuild and re-establish this facility.”

Non-fire propagating building materials and tools, along with adherence to fire safety standards, have made the cleanroom industry safer and more aware of the potential cost of cleanroom fires

By Vinnie DeGiorgio, FM Global

During the past 30 years, the semiconductor industry has experienced exponential growth that has significantly affected consumers’ daily lives. This growth, however, has come at the expense of semiconductor process-related fires that have caused devastating property damage, production interruption, and loss of market share.

Following the two large fires in Taiwan in 1996 and 1997, respectively, FM Global and other fire protection professionals stepped back and asked, “How can we improve fire safety and change the industry’s track record?”

Ten years later, with the collective efforts of many organizations and individual contributions, the journey toward the fire-safe cleanroom is almost complete.

Factors that have led to this tremendous improvement include the following:

  • Widespread use of non-fire propagating construction materials
  • Process liquids being heated remotely
  • Third-party assessment of process equipment prior to installation
  • Improved handling and disposal of silane gas
  • Adherence to improved codes and standards

Current state

Released in 1997 by FM Approvals, a Nationally Recognized Testing Laboratory (NRTL), the Cleanroom Materials Flammability Test Protocol (Class 4910) has become the industry standard for the evaluation of construction materials used in cleanrooms.

FM4910 measures two crucial, fire-related elements of a product or material: the fire propagation index (FPI), an indicator of the tendency of a material to ignite and propagate fire, and the smoke damage index (SDI), an indicator of the amount of smoke generated.

For material to be considered non-fire propagating under FM4910, its FPI must be equal to or less than 6.0 and its SDI equal to or less than 0.4. Materials that meet the Cleanroom Materials Flammability Test Protocol do not require, in and of themselves, fixed fire protection when used according to the appropriate FM Global data sheets. Materials listed under FM4910 may burn locally in the ignition area but will not propagate a fire beyond the ignition zone. Additionally, such materials produce little, if any, smoke or corrosive byproducts, thus minimizing non-thermal damage.

Today, there are 17 manufacturers producing nearly 150 different types of FM4910-listed materials. A complete listing of FM4910 materials can be found at www.fmglobal.com/assets/pdf/4910Approved.doc.

This ever-expanding list has led semiconductor tool vendors to build the majority of products (e.g., wet benches) out of FM4910 materials. In fact, for some tool vendors, FM4910 material-constructed tools have become the standard. Tools made with less expensive (but highly combustible) polypropylene or polyvinyl chloride are, in many cases, now available only by special order.

While FM4910 materials are prevalent in semiconductor cleanrooms, they can easily be applied in other industries that utilize cleanrooms, such as the pharmaceutical, biotech, and food processing industries.

Although FM4910 fire-safe materials are helping prevent cleanroom fires, they can’t do it alone.

In the past, the typical fire scenario was a high-energy process liquid immersion heater or hot plate igniting combustible plastic associated with wet benches. Once ignited, the fire was drawn into the process exhaust ductwork, which many times was constructed of combustible plastic. Once the ductwork was ignited, the fire would spread inside the ductwork all the way to the scrubber.

Companies have eliminated the exposure created by combustible process exhaust ductwork by installing ductwork that meets FM Approvals’ Standard for Fume Exhaust Ducts or Fume and Smoke Exhaust Ducts (Class 4922). Even when subjected to a severe fire, FM4922-approved ductwork will not collapse or propagate fire and will release only minimal amounts of smoke.

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Increasingly, new and retrofitted cleanrooms are installing FM4922-approved ductwork; however, a considerable amount of combustible ductwork with no automatic sprinkler protection still remains in some facilities. Installing either FM4922 products or proper sprinkler protection in these cleanrooms is highly recommended.

Replacing combustible ductwork with FM4922-approved ductwork in existing, operating cleanrooms is not as daunting a challenge as it may seem. In fact, a major semiconductor manufacturer has successfully completed such a replacement. To that company, the benefits substantially outweigh the potentially astronomical loss.

Codes/standards

As mentioned previously, adherence to improved codes and standards (see Table 1) has been a significant contributing factor in improving cleanroom fire safety.

Many of these codes/standards recommend the use of fire-safe construction materials for cleanroom applications. In cases where such materials are not used, fixed fire detection and suppression systems are the recommended alternative. If neither measure is taken, the results can be catastrophic.

In 2005, FM Approvals issued an assessment standard for tools used in the semiconductor industry (Class 7701). This assessment standard evaluates the following aspects of semiconductor manufacturing equipment:

  • Chemical
  • Control and/or safety interlocks
  • Electrical
  • Ventilation

Currently, before new tools are installed, they often require on-site evaluation at either the manufacturer or client’s facility by a semiconductor specialist on a case-by-case basis. Due to the complexity and diversity of semiconductor manufacturing equipment, this can be a time-consuming and potentially costly endeavor.

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When a tool is evaluated under FM7701, it will only require a spot check after installation, saving tool vendors and semiconductor manufacturing companies significant amounts of time and money. Having fire-safe semiconductor equipment is critical in the event of a fire. Consider the fire damage consequences cited at the outset of this article.

A major semiconductor equipment manufacturer has recently completed the FM7701 assessment and will shortly become the first company to receive formal FM7701 recognition.

Silane gas usage

Silane, more so than other gases used in semiconductor manufacturing, can lead to severe explosions. It is a stable gas but is pyrophoric, which means that under certain conditions it can spontaneously ignite or have delayed ignition that could lead to an explosion.

Silane has been involved in a considerable number of fires. Common scenarios included untreated silane released into combustible fume exhaust ductwork and improper cylinder change-out procedures resulting in leaks at the cylinder connection points.

During the past couple of years, there have been several unfortunate events that have led to a renewed interest in the safe handling of silane. During the past 2 years, Air Products and Chemicals, Inc. organized a series of silane safety seminars held in Taiwan, Korea, China, and Singapore and most recently in Portland, OR. The goal of these highly successful seminars was to educate the audience on the behavior and best protection practices concerning silane.

Open issues

One significant cleanroom fire hazard still needs to be addressed: containers used to store in-process silicon wafers.

Wafer carriers or pods (200-mm wafers) and front-opening unified pods, or FOUPs (300-mm wafers), are currently made of highly combustible materials such as polycarbonate and polypropylene. These pods or FOUPs are typically placed inside vertical storage systems known as stockers. Fire burns for highly combustible materials placed in a vertical array.

FM Approvals issued the “Approval Standard for Wafer Carriers for use in Cleanrooms” (Class 4911). This standard provides testing criteria similar to FM4910 in order for a fire-safe wafer carrier to earn approval.

A supplier of wafer carriers and FOUPs is presently working with FM Approvals to develop a FOUP that will meet the requirements of FM4911 as well as the strict process requirements.

New fire safety products

The products in Table 2 have recently received FM Approvals certification and can improve overall cleanroom fire safety.

Future outlook

The outlook for further progress in cleanroom protection looks very promising. The use of FM4910 materials and FM4922 ductwork is well-established. Current codes and standards support the use of fire-safe materials. Attention needs to be focused toward bringing an FM4911-approved wafer carrier/FOUP to market. Recently released products have provided solutions to areas previously lacking fire-safe alternatives.


Vinnie DeGiorgio is FM Global’s principal engineer for the semiconductor industry. He has more than 26 years of property loss control and business impact risk assessment experience associated with the semiconductor and related high technology industries. DeGiorgio has a bachelor’s in engineering and a master’s in fire protection engineering. He maintains memberships in the NFPA and SFPE, is a board member of SESHA, and is the secretary of the NFPA 318 Technical Committee on Cleanrooms. More than one out of every three FORTUNE 1,000 companies work with FM Global (www.fmglobal.com) to develop robust property insurance and engineering solutions to protect their business operations from fire, natural disasters, and other types of property risk.

The revision expands the list of materials of concern and provides more examples of sample preparation to help eliminate industry confusion

By Jim Ohlsen, Chair of IEST Working Group CC031

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In February 2008, IEST published the latest revision of IEST-RP-CC031.2: Method for Characterizing Outgassed Organic Compounds from Cleanroom Materials and Components. Five years after the original IEST-RP-CC031.1 version was published, this revision enables the user to scrutinize a greater number of cleanroom materials, components of construction, and polymers that can outgas organic compounds of concern. Experts in contamination control for aerospace, data storage, and microelectronics used their training as engineers, scientists, and educators to help contribute to the revision process. A seminar will be offered at ESTECH 2008 and should be of interest for industry representatives from numerous related fields.

What are the most significant changes from the previous edition?

Sub-section 4.1, “Materials of Interest,” has been expanded to include more than fifty materials, components of construction, and polymers that may outgas organic compounds of concern in cleanrooms or other controlled environments.

Sub-section 4.2, “Organic Compounds of Concern,” now references ISO 14644-8:2006(E), Annex B, thus greatly expanding the list of contaminating chemicals that can be of concern to a microelectronics product or process.

Sub-section 5.1, “Test Material and Sample Preparation,” has been expanded to include more examples of sample preparation such as a solid to solid transfer method; cure times for two-part mixtures, coatings, paints, sealants, and caulks; and sample preparations for homogeneous and non-homogeneous materials.

Finally, sub-section 5.6, “Extensions of Outgas Testing Beyond this RP,” has been added to briefly address testing of the outgassing of a large part, assembly, or complete system that may be in operation.

How do these changes improve the RP and/or make it easier for the user to apply?

These changes improve the RP by enabling the user to scrutinize a greater number of materials, components of construction, and polymers that can outgas organic compounds of concern. Similarly, a list of the number of organic compounds of concern has increased. In addition, more examples of sample preparation are described. Finally, a brief explanation is given of how the test method of this RP can be extended to test the outgassing of a large part, assembly, or complete system that may be in operation.

What leading-edge or innovative technology does the RP incorporate?

The RP incorporates thermal desorption gas chromatography mass spectrometry (TD-GC-MS). Having access to this technology is essential to carrying out the test method described in this RP. Companies that do not have this capability in-house can utilize contract laboratories; thus the test method of this RP is accessible to anyone.

Does the RP help clarify methods or practices that are a source of industry controversy or confusion?

The RP describes a test method appropriate for semiquantitative determination and qualitative characterization of organic compounds outgassed from materials or components exposed to air in cleanrooms or other controlled environments. This RP specifies four outgassing temperatures–50