Tag Archives: Clean Rooms

The Institute of Environmental Sciences and Technology (IEST) has published two new Recommended Practices (RPs)-one provides guidance for maintaining a cleanroom at the level for which it was designed, and the other covers the design and testing of modular gas-phase adsorber cells in single pass or recirculating air-cleaning systems where high-efficiency removal of gaseous contaminants is required.

IEST-RP-CC018.4: Cleanroom Housekeeping: Operating and Monitoring Procedures includes a new test procedure to establish frequency, monitor effectiveness, and determine appropriate levels of surface cleanliness. The RP incorporates a new surface cleaning efficiency test method for nonviable particles. The test provides an automated measurement of surface cleanliness as it pertains to the efficiency of a wiping material to remove liquid contaminants from a surface. The document also has an expanded section on housekeeping equipment and supplies.

IEST-RP-CC008.2: High-efficiency Gas-phase Adsorber Cells discusses three types of modular cells in detail, including new material on Type IV (vee-bed) cells. The RP incorporates allowable materials, design, construction, quality assurance requirements, and packaging and shipping for adsorber cells. Appendices in the document cover recommended installation requirements, calculation of residence time of adsorber cells, and recommendations for ordering, marking, and shipping.

For more information or to order the document, visit www.iest.org or call IEST at 847-981-0100.

On October 19, Purdue University broke ground on the new Wayne T. and Mary T. Hockmeyer Hall of Structural Biology. The $30 million, 65,690-sq.-ft. building will provide an advanced workspace for Purdue’s Center for Structural Biology research group; the group currently is housed in the basement of Lilly Hall.

Hockmeyer Hall is named for Wayne T. Hockmeyer, Purdue alumnus and founder of biotech company MedImmune, and his wife, Mary, who gave $5.3 million toward its construction. The facility was made possible by $16 million in gifts and is scheduled for completion in the fall of 2009. The building will include eight specialized labs and eight general labs for work in the areas of protein production, cell and virus culture, large molecule crystallization, x-ray diffraction, nuclear magnetic resonance spectroscopy, electron microscopy, and analytical and biophysical instrumentation.


Purdue University’s Wayne T. and Mary T. Hockmeyer Hall of Structural Biology will house research teams focusing on breakthroughs in the prevention and treatment of disease. Image courtesy of Purdue University.
Click here to enlarge image

One area that requires a large amount of space and carefully controlled conditions is electron microscopy. The group has five electron microscopes, three of which are advanced high-end cryoelectron microscopes that allow researchers to see nearly down to the molecular level. Each microscope takes up a small room, and the slightest vibrations can disturb the images produced. The new building will allow the group the space needed to house the large equipment necessary to advance structural biology, says Richard Kuhn, head of the Department of Biological Sciences.

Breakthroughs from the structural biology group have included fundamental insights into how important groups of human viruses infect cells, build themselves, and are recognized by the human body. Also, the group has achieved important advances in understanding the structure of membrane proteins, which are the gateways into and out of cells, Kuhn says.


PARTICLES

compiled by Carrie Meadows

Semi industry exec John T.C. Lee joins MKS

MKS Instruments, Inc., a provider of process control technologies for semiconductor and other advanced manufacturing processes, has announced that John T.C. Lee, PhD, has joined the company as group vice president, responsible for control and information technology and electrostatic discharge products. Lee, who joins MKS from Applied Materials, will report directly to Leo Berlinghieri, CEO and president. “John brings a depth of experience in next-generation process technologies and a broad understanding of thin-film process requirements that can help us execute our growth strategies,” says Berlinghieri.

Christ takes controlling interest in Zeta Group

Christ Water Technology Group has taken over 76 percent of the stock of the Zeta Group, located in Tobelbad, Austria, expanding the company’s activities in the pharmaceutical and life science sectors. Zeta is a supplier of production systems and process equipment for the biotech and pharmaceutical industries. Christ executives say that not only will Zeta’s product line expand its current range of turnkey solutions, the qualified construction department at Zeta, which will continue to operate under this name, will strengthen the service sector of Christ.

Millipore unveils new brand identity, awards funding

Millipore Corporation, a supplier of technologies, tools, and services for the bioscience research and biopharmaceutical manufacturing industry, has unveiled its new brand initiative and visual identity. The re-branding underscores Millipore’s transition from filtration systems provider to a life science corporation focused on research, development, and production. Millipore also announced a $500,000 research gift made through the Millipore Foundation to the Harvard Stem Cell Institute (HSCI). The company’s gift will support the HSCI Seed Grant Program, which provides early funding for innovative projects in any field of stem cell research.

Plexus’s Asian facility receives FDA approval

Plexus Corp., a contract manufacturer of electronics products, has announced FDA approval of one of its Penang, Malaysia facilities, through the agency’s pre-market approval (PMA) supplement evaluation process, to manufacture Class III finished devices on behalf of a large tier-one medical OEM. This approval comes following an extensive on-site audit in Penang by the FDA. Approximately 25 percent of the company’s annual revenue comes from product design, supply chain management, and manufacturing services for medical device OEMs.

October 19, 2007 — KANSAS CITY, MO — Heat and Control, Inc., Ishida Scales Mfg., Co. and Multivac, Inc. have entered into a strategic partnership to effectively market Ishida tray sealers in the United States, Canada, and Mexico. Along with having market responsibility for Ishida’s tray sealing equipment, Multivac will also be able to provide Ishida quality control equipment and CEIA metal detectors to food processors and packagers as part of a total equipment solution from a single source. As a key OEM partner of Heat and Control and with close cooperation of Heat and Control’s technical resources, the integration and marketing effort will be directed by Mark Wilhelm, product manager at Multivac, Inc.

This new partnership will be highlighted at the upcoming AMI Show in Chicago, where the companies will feature a representative variety of equipment from the Ishida and CEIA product portfolios.

Anthony Caridis, president of Heat and Control, and Jan Erik Kuhlmann, president/CEO of Multivac, Inc. jointly praise the new alliance: “With our two companies partnering to provide our mutual customers with the very best selection in state-of-the-art packaging solutions, we hope to generate unparalleled value for all involved by highlighting the tremendous synergistic fit between our companies and product offerings.”

Ishida is a world leader in providing systems for high-speed packaging lines, including multihead weighers, VFFS snack food bagmakers, tray sealers, and quality control equipment such as checkweighers, X-ray inspection units, and weigh-price labelers.

As a leading manufacturer of food processing, packaging, and product handling machinery for over 57 years, Heat and Control has been the exclusive sales and service representative for Ishida in North and South America since 1970, and provides similar representation for CEIA metal detectors.

Multivac, Inc. is the dominant market force in horizontal form-fill-seal packaging equipment as well as other packaging technologies including traysealers and chamber vacuum packaging machines.

About Multivac
Multivac is the leading manufacturer of thermoform fill-seal rollstock packaging solutions, chamber vacuum pouch sealers, traysealers, shrink tanks, and both cross-web and inline labelers for food, medical and consumer product applications. Through its North American subsidiaries in the United States, Canada and Mexico, the company provides strategic consultation, technical design, sales, distribution, and service of Multivac’s complete line of packaging systems. Multivac maintains comprehensive, on-site parts inventories, and offers technical assistance and certified training for its entire line of equipment. To date, the company has designed and implemented over 100,000 packaging solutions.
www.multivac.com

About Heat and Control
From its seven manufacturing plants and over 20 offices worldwide, Heat and Control, Inc. provides the widest range of food processing and packaging machinery of any manufacturer. Starting with raw product handling and preparation, through coating machinery, cooking equipment, seasoning, inspection, product handling and packaging systems, Heat and Control provides the latest technology and comprehensive technical support on a local level.
www.heatandcontrol.com

About Ishida
Founded in 1863, Ishida is a leading manufacturer of scales, quality control, inspection, and packaging machinery for industrial and retail applications. The inventor of computer-controlled multihead weighing, Ishida revolutionized the speed, accuracy and product savings for weigh-filling, and continues to develop innovative technology for checkweighing, x-ray inspection, case packing, tray sealing, cartoning, and other packaging operations.

October 18, 2007 — /PRNewswire/ — LEHIGH VALLEY, PA — Air Products today announced that it has acquired all outstanding shares in Air Products Shanfeng, making the venture a wholly owned Air Products subsidiary in China. This strategic move is part of Air Products’ focus and investment in the performance materials business in China.

The official name of the new company is Air Products and Chemicals (Changzhou) Co., Limited. Air Products Shanfeng was first established in 2005 as a joint venture with Changzhou Shanfeng Chemical Industry Co Ltd., a leading chemical supplier in China.

Air Products Shanfeng, including its production site in Changzhou, Jiangsu Province in East China, was formed to support the growth of Air Products’ triethylenediamine (TEDA) business for the polyurethane foam market in China. This market has been growing at more than 10 percent annually in China and is expected to continue to experience high growth rates as China becomes a global manufacturing center.

To align with the change, TEDA manufactured at the Changzhou facility will come under the Air Products global brands Dabco(R) chemical catalyst crystal, and the Air Products Shanfeng TEDA brand will be discontinued.

Air Products has invested its leading manufacturing and process technology, as well as implemented its environmental, health, and safety standards at the Changzhou facility in the past two years to expand capacity, improve efficiency, and provide higher quality products and value-added solutions to meet customers’ demands.

“Air Products has been supplying amine catalysts to the polyurethane market for more than 40 years and is a leading global supplier of TEDA and other amine catalysts to that market. Establishing the Changzhou facility as a wholly owned Air Products company is a logical progression to support our business growth,” says Patrick Loughlin, vice president and general manager, Performance Materials, Air Products Asia. “It means we will be putting more focus and committing additional resources that will create greater synergies with our global business plans, as well as infrastructure in China and in the region.”

TEDA is an important additive used to catalyze reactions to produce polyurethane foam. Applications of polyurethane foam include automotive seating, furniture, insulation materials, shoe soles, and construction.

The ban of chlorofluorocarbons (CFC11) as blowing agents in buildings by the China Ministry of Construction in July this year has further boosted the use of polyurethane in the construction and spray foam markets in China. The Air Products Dabco(R) PT amine catalyst series and the LK range of non-silicone surfactants for non-CFC spray foam are manufactured by the Changzhou facility.

Air Products manufactures and markets an extensive line of polyurethane additives worldwide, including Dabco(R) and Polycat(R) amine catalysts, Dabco TMR amine catalysts, Dabco(R) metal-based catalysts, Dabco(R) silicone surfactants and LK non-silicone surfactants. These versatile products are used in all types of polyurethane foam applications.

About Air Products
Air Products serves customers in industrial, energy, technology and healthcare markets worldwide with a unique portfolio of atmospheric gases, process and specialty gases, performance materials, and equipment and services. Founded in 1940, Air Products has built leading positions in key growth markets such as semiconductor materials, refinery hydrogen, home healthcare services, natural gas liquefaction, and advanced coatings and adhesives. The company is recognized for its innovative culture, operational excellence and commitment to safety and the environment. Air Products has annual revenues of $9 billion, operations in over 40 countries, and over 20,000 employees around the globe. For more information, visit www.airproducts.com.

Source: Air Products

October 18, 2007 — GLENVILLE, NY — Applied Robotics Inc., a leading provider of automation end-of-arm tooling and connectivity solutions has recently added a new distributor to its line-up of partners. Automated Micron Assembly Pte Ltd joins the ten existing Applied Robotics Inc. distributors and will bring new coverage to Southeast Asia.

Automated Micron Assembly Pte Ltd, or A.M.A., is a value-added robotic systems provider based in Singapore. The company was founded in 1997 and performs in the role of supplier or system Integrator to customers in Singapore, Malaysia, Thailand, Indonesia, and the Philippines. The Applied Robotics Inc. product line of tool changers, collision sensors, grippers, connectivity technology, and custom solutions will well complement Automated Micron Assembly’s existing offerings of robots and robotic systems and accessories, motion controls, and semiconductors.

“This is an exciting new relationship,” says Jim Fitzgerald, Applied Robotics vice president. “It is a growing market and offers us a local presence.”

“I am extremely happy with the new partnership, which will definitely enhance our existing products range,” says K.L. Lim, managing director, A.M.A.

About Applied Robotics
Applied Robotics Inc., headquartered in Glenville, NY, is an ISO-9001 certified, employee-owned company serving the world’s automation market. Founded in 1983, Applied Robotics designs and manufactures end-or-arm tooling and connectivity solutions intended to solve complex automation problems and improve efficiencies. Serving a wide spectrum of customers and industries ranging from large Fortune 500 companies to small privately-held businesses, the company’s wrist-down solutions can be found in manufacturing, welding, assembly, material removal and material handling applications throughout the United States, Canada, Pacific Rim, Europe, Mexico, South America, and Australia. More information can be found on the company’s web site at www.arobotics.com.

October 18, 2007 — /IEST News/ — ARLINGTON HEIGHTS, IL — A newly revised Recommended Practice (RP) from the Institute of Environmental Sciences and Technology (IEST) covers the design and testing of modular gas-phase adsorber cells in single pass or recirculating air-cleaning systems where the need for high-efficiency removal of gaseous contaminants is a requirement. IEST-RP-CC008.2: High-efficiency Gas-phase Adsorber Cells discusses three types of modular cells in detail, including new material on Type IV (vee-bed) cells.

The RP incorporates allowable materials, design, construction, quality assurance requirements, and packaging and shipping for adsorber cells. Appendixes in the document cover recommended installation requirements, calculation of residence time of adsorber cells, and recommendations for ordering, marking, and shipping.

For more information or to order the document, visit www.iest.org or call IEST at (847) 981-0100.

About IEST
Founded in 1953, IEST is an international technical society of engineers, scientists, and educators that serves its members and the industries they represent (simulating, testing, controlling, and teaching the environments of earth and space) through education and the development of recommended practices and standards. IEST is an ANSI-accredited standards-developing organization; secretariat of ISO/TC 209 Cleanrooms and associated controlled environments; administrator of the ANSI-accredited US TAG to ISO/TC 209; administrator of the ANSI-accredited US TAG to ISO/TC 142 Cleaning equipment for air and other gases; and a founding member of the ANSI-accredited US TAG to ISO/TC 229 Nanotechnologies.

October 18, 2007 — SAN DIEGO, CA — Recent news items report that the number of severe infections caused by MRSA is higher than previously believed and the bacteria now kills more Americans than AIDS. Those reports incorrectly state that there is no solution to the current epidemic which causes illness and deaths due to resistant staph infections.

PURE Bioscience, creators of patented silver dihydrogen citrate (SDC), the active ingredient in a revolutionary new hard surface disinfectant, reports that the Tulsa County Jail completely eliminated staph infections, including MRSA, during the first 14 months of use of the product since its introduction in August 2006. Independent lab studies of the EPA registered product document that SDC kills MRSA within two minutes.

Tommy G. Thompson, former U.S. Secretary of Health and Human Services and former four-term Governor of Wisconsin, joined the board of directors of PURE last year and was retained by PURE as a business development consultant. “I became involved with PURE last year because I saw the potential of this important solution for the prevention of deadly MRSA infections. I am actively working with PURE to introduce this novel antimicrobial to hospitals and to the health care community. PURE’s SDC-based antimicrobial is a powerful weapon against MRSA that can actually save lives. Unlike the traditional disinfectants currently used in hospitals and other institutions, SDC-based disinfectant mitigates the development of microbial resistance, is fast acting, easy to use, does not require rinsing and does not produce irritating fumes. It is very effective for controlling these types of infections.”

Thompson continues, “MRSA and other hospital and community acquired infections are preventable diseases, and I believe focus must shift from treatment to prevention in order to contain the spread of MRSA and avoid a potential epidemic in our hospitals, schools and throughout our communities. The emergence of resistant bacteria has changed the game for infectious disease control professionals, and an immediate solution must be implemented to avoid further preventable human and economic losses.”

The Tulsa jail, with its 1,700 cells and more than 1,500 inmates, had historically faced challenges with Staphylococcus aureus, including a resistant form of staph known as methicillin-resistant Staphylococcus aureus (MRSA). Prior to use of PURE’s SDC-based disinfectant, the facility experienced, on average, 12 cases of staph infection every month.

Stanley Glanz, Tulsa County Sheriff, states, “Of course, new inmates entering the system can expose our facility to infection, but after 14 months of using the SDC-based disinfectant, we are still completely containing the spread of infections in our facility — including staph and MRSA. We appreciate the many benefits of the non-toxic SDC-based disinfectant: It does not contain alcohol, it is non-flammable, and it does not require rinsing or the use of gloves or masks during application. Using it protects our employees and saves our organization money by controlling the overall incidence of illness in our facility. In addition, and most importantly, the 24-hour residual protection of PURE’s disinfectant offers added protection between applications.”

As part of its regular maintenance program, the jail uses the SDC-based disinfectant on booking areas, bathrooms, counter tops, cells, and mattresses.

Sold under various private label brands, PURE Bioscience’s EPA registered silver-based hard surface disinfectant is ideal for closed populations where resistant bacteria are becoming increasingly problematic, such as hospitals, prisons, and schools. In addition to antiviral and antifungal claims, the 30-ppm silver dihydrogen citrate (SDC) disinfectants carry a 30-second kill against Staphylococcus aureus, Pseudomonas aeruginosa, Salmonella choleraesuis, and Listeria monocytogenes. The first new disinfectant active to be registered by the EPA in more than 30 years, the SDC-based product also provides 24-hour residual protection against standard indicator bacteria and a 2-minute kill claim on MRSA (methicillin-resistant Staphylococcus aureus) and VRE (vancomycin-resistant Enterococcus faecium). Moreover, SDC-based disinfectants pose little if any health hazards because they are odorless, colorless, non-corrosive, non-flammable, and are compatible with other disinfecting cleaning chemicals. The SDC-based disinfectant carries EPA-registered claims against methicillin-resistant Staphylococcus aureus (MRSA) and vancomycin-resistant Enterococcus faecium (VRE), while maintaining the Category IV lowest-toxicity EPA rating.

How does it work? Silver dihydrogen citrate (SDC), is an electrolytically generated source of stabilized ionic silver. In one of the mechanisms of action, the bacteria views the molecule as a food source, and once the organism consumes it, SDC destroys the bacteria by disabling proteins and halting its metabolic and reproductive functions. As a platform technology, SDC is distinguished from competitors in the marketplace because of its superior efficacy, reduced toxicity, and the inability of bacteria to form a resistance to it.

To speak with PURE Bioscience CEO Michael Krall about MRSA or how SDC works, or to speak with a Tulsa County Jail Representative about the eradication of Staph in that facility, please contact: Karen Sparks, Mentus Life Science, 858-455-5500, [email protected]

About PURE Bioscience
PURE Bioscience (PURE) develops and markets technology-based bioscience products that provide solutions to numerous global health challenges. PURE’s proprietary high efficacy/low toxicity bioscience technologies, including its silver dihydrogen citrate-based antimicrobials, epresent innovative advances in diverse markets and lead today’s global trend toward industry and consumer use of “green” products while providing competitive advantages in efficacy and safety. A new molecular entity, patented silver dihydrogen citrate (SDC), is an electrolytically generated source of stabilized ionic silver. SDC is colorless, odorless, tasteless, non-toxic, non-caustic and formulates well with other compounds. As a platform technology, SDC is distinguished from competitors in the marketplace because of its superior efficacy, reduced toxicity and the inability of bacteria to form a resistance to it. SDC also offers 24-hour residual protection against standard indicator bacteria. PURE Bioscience, headquartered in El Cajon, CA (San Diego metropolitan area), was incorporated in 1992. Additional information about PURE Bioscience is available at www.purebio.com.

October 16, 2007 — EDISON, NJ — TCP Reliable, a thermal packaging solutions manufacturer and DDL, the leading package testing services firm have announced a merger, making the combined company the leading packaging engineering group specializing in the medical device and biopharmaceutical industries. DDL and TCP will continue to operate their testing and manufacturing separately with DDL as a wholly owned subsidiary of TCP Reliable.

“The true benefit of this merger for our clients is access to a wider array of services custom suited to their growing needs,” states Patrick Nolan, COO of DDL. “Particularly, our clients will be able to confidently consolidate both their testing and manufacturing objectives.”

This powerful new collaboration between packaging testing pioneers DDL, specializing in medical device testing and TCP, a full service temperature controlled packaging manufacturer, will answer the growing needs of both firms client bases.

“The TCP and DDL combination offers the most complete range of distribution packaging engineering services and solutions to the fast growing medical device and the biopharmaceutical segments of the health care industry,” states Maurice Barakat, president and CEO of TCP Reliable. “Our increased technical depth and size will allow us to provide coast to coast service in meeting the requirements of the most demanding players in the health care industry through our six company owned sites in the US and Canada”
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In the rapidly expanding medical device industry, the need for specialized packaging is vital to the increasing complexity of devices and combination products. Earlier this year, DDL acknowledged the need to expand into new areas of the packaging lifecycle by launching its package development and prototyping services. Hence, an evolution into manufacturing seems only natural.

About TCP Reliable
Founded in 1990, TCP Reliable is a complete packaging solution provider specializing in the field of temperature controlled packaging. From needs assessment to package qualification, TCP handles packaging projects with one paramount goal: maintaining the integrity of your products. The materials and manufacturing processes cover the spectrum from insulated shippers to manufacturing phase change materials and temperature monitors. Services are performed in strict conformance with ISO 9001:2000, ISTA and ASTM test methodology, and FDA good manufacturing practices. The TCP Reliable main complex in Edison, NJ, incorporates 70,000 sq. ft. of state-of-the-art design, testing, and manufacturing facilities. TCP maintains additional manufacturing facilities in Arkansas as well as Montreal and Vancouver through its Cryopak subsidiary.
www.tcpreliable.com

About DDL
DDL offers expert package testing, product testing and material testing services including shock testing, vibration testing, tensile testing, leak testing, and validation services. Additionally, DDL provides expert package design, development and prototyping services for those clients who desire to outsource their package development function. DDL package testing clients find value through its growing suite of PackServices: PackAdvice, a zero-cost package testing consulting service, and PackReview, a DDL approved certification to demonstrate compliance with ISO 11607 (clause 7). DDL Testing Services maintains full service testing labs in Minnesota and southern California. DDL’s package design, development and prototyping services are offered to support national clients through staff and operations based in southern CA.
www.testedandproven.com

October 16, 2007 — /PRNewswire/ — AUSTIN, TX — Molecular Imprints, Inc. (MII) today announced that Toshiba Semiconductor Company, a global leader in the development and manufacturing of powerful semiconductor devices, has validated the use of MII’s imprint lithography technology in developing 22-nm node CMOS devices. Toshiba fabricated narrow trench features at dimensions down to 18 nm using MII’s Imprio(R) 250 system. Toshiba presented its findings in a paper titled “Nanoimprint Applications Toward 22-nm Node CMOS Devices” at the 33rd International Conference on Micro- and Nano-Engineering (MNE) in Copenhagen, Denmark.

Results detailed in the paper demonstrate the process capability and stability of MII’s Step and Flash Imprint Lithography (S-FIL(R)) technology for next-generation semiconductor manufacturing. Significant enhancements over earlier performance in the areas of imaging, defectivity, and overlay control were confirmed. Specifically, Toshiba leveraged MII’s Imprio 250 system to pattern 18-nm isolated features and 24-nm dense features with <1-nm critical dimension uniformity (CDU) and <2-nm line edge roughness (LER). Defectivity levels of as low as <0.3 defects per cm squared were achieved, which are approaching those of immersion lithography. Device overlay results were also within Toshiba's required specifications.

“We applaud this impressive accomplishment by Toshiba in pioneering next-generation CMOS manufacturing, and we are pleased by their decision to leverage our Imprio 250 system in their efforts,” says Mark Melliar-Smith, CEO of Molecular Imprints. “Their results, along with similarly strong tool performance findings from another leading chip manufacturer, further confirm the performance of the Imprio 250. Unlike extreme ultraviolet lithography, our technology builds on the existing optical lithography infrastructure — helping to make it ideally suited for the economic production of very-high-density CMOS devices. We believe our advanced S-FIL technology is a viable solution for critical device layer applications at the 32-nm node, and a superior solution at and beyond the 22-nm node.”

About Molecular Imprints, Inc.
Molecular Imprints, Inc. (MII) is the technology and market leader of high-resolution imprint systems for nano patterning. The company has commercialized proprietary imprint lithography technologies (S-FIL(R) and Drop-on-Demand(TM)) and demonstrated sub-20-nanometer resolution patterning capability. Molecular Imprints provides enabling lithography systems and technology for manufacturing applications in the areas of semiconductors, nano-devices, solid state lighting, micro optical components, and magnetic and solid state data storage applications. For more information, visit www.molecularimprints.com.

Source: Molecular Imprints, Inc.

October 16, 2007 — LEUVEN, BELGIUM — IMEC has reached an agreement with ASML to install an ASML EUV pre-production tool in IMEC’s 300 mm facility in 2010. This will enable IMEC and its partners to do research on 22 nm CMOS on the world’s most advanced lithography system.

The installation of the pre-production tool follows ASML’s alpha-demo tool (ADT) at IMEC, from which the first high-resolution images were obtained with a Sn source (Philips Extreme UV) at the end of September. The world’s first horizontal and vertical 35 nm and 40 nm lines and spaces in 100 nm MET-2D resist (Rohm & Haas) at 18 mJ/cm2 were successfully exposed with EUV using a Sn source.

Whereas the goal of the ADT is to pioneer the technology, demonstrate feasibility, and build the infrastructure, the pre-production tool will exhibit considerably higher source power and optimized optics. This will enable full-scale development of EUV technology up to production-worthy standards.

“These results mark a cornerstone in the development of EUV lithography. They represent the first real data, building confidence for EUV to be a viable technology for 32 nm half-pitch lithography and below,” says Luc Van den hove, executive vice president and chief operating officer at IMEC. “We are very pleased that our strategic partnership with ASML continues more than ever with the installation of one of the early EUV pre-production tools. Such advanced tools and successful collaboration are indispensable assets for doing advanced research with the world’s leading memory suppliers, logic IDMs, and foundries.”

“IMEC’s ability to help semiconductor companies explore new technologies has made it a trusted partner for the industry. IMEC’s order for one of our production-worthy EUV lithography systems is another sign how semiconductor manufacturers are gearing up to use EUV for ever-smaller features on chips,” says Martin van den Brink, executive vice president of marketing and technology at ASML. “Our roadmap shows that ASML’s EUV systems have the potential to expose more than 100 wafers per hour, which is well above the minimum required for cost-effective EUV chip manufacturing.”

About ASML
ASML is the world’s leading provider of lithography systems for the semiconductor industry, manufacturing complex machines that are critical to the production of integrated circuits or chips. Headquartered in Veldhoven, the Netherlands, ASML is traded on Euronext Amsterdam and NASDAQ under the symbol ASML. For more information, visit www.ASML.com.

About IMEC
IMEC is a world-leading independent research center in nanoelectronics and nanotechnology. Its research focuses on the next generations of chips and systems, and on the enabling technologies for ambient intelligence. IMEC’s research bridges the gap between fundamental research at universities and technology development in industry. Its unique balance of processing and system know-how, intellectual property portfolio, state-of-the-art infrastructure and its strong network of companies, universities, and research institutes worldwide position IMEC as a key partner for shaping technologies for future systems.
IMEC vzw is headquartered in Leuven, Belgium, has a sister company in the Netherlands, IMEC-NL, concentrating on wireless autonomous transducer solutions, and has representatives in the U.S., China and Japan. Its staff of more than 1,500 people includes more than 500 industrial residents and guest researchers. In 2006, its revenue (P&L) was 227 million euros. Further information on IMEC can be found at www.imec.be.