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June 8, 2007 — Millennium Research Group (MRG) says, in its US Markets for Dental Implants 2007 report, that prominent dental implant manufacturers are incorporating nanotechnology into their dental implant surface designs because the technology is purported to cut healing time in half and improve osseointegration. The list of such implant manufacturers includes 3i and Bicon, both of which have branded their nanotechnology-based dental implant surfaces as NanoTite; plus Astra Tech with OsseoSpeed; and Straumann with its SLActive.

According to MRG, Straumann’s SLActive implants have been well adopted in the US, but American dentists often do not associate SLActive with nanotechnology. On the other hand, respondents identified 3i as the nanotech-based implant manufacturer with which they were most familiar.

“Nanotechnology-based dental implant surfaces represent a new generation of surface treatments. Clinical data suggests that these new surfaces can benefit patients by improving the time it takes for osseointegration to occur,” says Melicent Lavers, Manager of dental research at MRG. “These new dental implants are, however, priced at a premium and it is unclear whether or not dentists are passing on the
additional cost to patients.”


MEMS structure with up to 1:30 aspect ratio made possible by DRIE (Photo: Tronics Microsystems)

June 7, 2007 — Two French companies, Tronics Microsystems SA, manufacturer of custom MEMS components, and Alcatel Micro Machining Systems (AMMS), manufacturer of deep reactive ion etching (DRIE) systems for MEMS and 3D semiconductors, have announced a joint development project on DRIE for extreme-performance MEMS.

The collaboration will leverage the partners’ complementary strengths to produce next-generation advanced DRIE process technology for high-performance MEMS and, the partners say, to “establish a new performance benchmark for the MEMS industry.”

AMMS is known for its high-speed deep plasma etching systems. Tronics has developed test tools and methodologies for tracking process-failure modes and has established precise statistical process control (SPC) indicators for MEMS production. Tronics is also known for applying advanced DRIE on thick SOI micromachining technologies for manufacturing high-performance custom sensors and actuators.

Tronics will use its test protocols to evaluate and qualify new, advanced DRIE manufacturing processes from AMMS, and will provide SPC feedback. With that data, AMMS will build on its DRIE leadership by further enhancing its process solutions for new, advanced high-aspect-ratio, high-yield and manufacturing-proven processes. In return, Tronics will receive priority access to the company’s latest process modules and quality services.

June 7, 2007 — InvenSense, Inc., provider of integrated motion sensing solutions for mobile applications, has released its IDG-1004, which the company says is “the world’s smallest and lowest cost dual-axis gyroscope” for the GPS portable navigation device (PND) market.

The IDG-1004 enables dead reckoning (DR) to enable navigation where GPS cannot operate. In addition, it promises better map matching capability by measuring the direction of the vehicle with one axis, while providing better distance accuracy by measuring slope as the vehicle travels up and down hills or in rough terrain using the second axis.

The second axis of the gyroscope also reportedly allows drivers easier installation by compensating for the angle at which the PND may be installed. (Arbitrary mounting with a single axis gyroscope frequently results in lower accuracy.) Furthermore, the IDG-1004’s X-axis and Y-axis sensing ability enables in-plane mounting on the main PND circuit board. Competing single-axis gyroscopes typically require a daughter board to be mounted perpendicular to the main PND circuit board since they measure only the Z-axis plane.

“Sales of portable navigation devices are expected to top 25 million units worldwide in 2007,” said Richard Robinson, principal analyst, automotive electronics, with the market-research firm iSuppli Corp., El Segundo, Calif. “Enhancing location and direction accuracy to the levels of more expensive in-vehicle systems will be one of the next main goals of PND makers.”

By Tom Cheyney, Small Times Senior Contributing Editor

June 6, 2007 — Although most nanomanufacturing markets have yet to reach the volume levels seen in more mature micro-scale industries, the nascent nano supply-chain and production infrastructure shows signs of moving beyond R&D.

At the recent NSTI Nanotech 2007/Cleantech event, held May 20 – 24, keynote speaker John Hofmeister of Shell Oil addressed a broad range of potential solutions in his presentation on ensuring future energy supplies, including his company’s solar efforts. “Nanotechnology offers the greatest opportunity to capture solar energy,” the executive said.

He noted Shell’s exit from the silicon-based solar-cell business several years ago and its embrace of copper-indium-selenium (CIS) thin-film-on-glass technology. Shell and Saint-Gobain’s joint venture, Avancis, will open a new solar fab in Torgau, Germany, later this year, with the first CIS-based modules set to hit the market by year’s end, according to Hofmeister.

Hofmeister noted Shell’s embrace of copper-indium-selenium thin-film-on-glass technology. (Photo: NSTI)

Many first-time exhibitors at NSTI found possible nano and cleantech applications for their products or services. Jeff Spiegelman, president/CEO of RASIRC, a San Diego-based manufacturer of ultra-high-purity steam systems, has seen a keen interest in his technology’s ability to reduce contamination and foster carbon nanotube (CNT) growth and uniformity.

“The introduction of a small amount of water vapor can combust the amorphous carbon and turn it into CO2, which is purged from the chamber,” he explains. “If any oxygen remains in water, the oxygen will attack the amorphous carbon, the carbon in the CNT, and also the catalyst, so oxygen-free water is important. Our technology is the only water purification that can separate out oxygen from water vapor and deliver ultrapure steam under control to the process.”

One company offering a volume alternative to CNTs is CleanTechnology International. It will soon open a production facility capable of making 60 lbs per hour of “100% pure” carbon nanosphere chains (CNSCs) in Houston, according to Danny Cross, executive vice president/COO. “We see good or better functionalization [for CNSCs] than CNTs in some applications,” citing potential lubrication, nanomedicine, and electronics uses.

The MEMS/NEMS contingent was well-represented at the event, both in the conference sessions and exhibit halls. Tomas Bauer, vice president of sales for Silex Microsystems, said the company experienced an 85% growth spurt in 2006. The Swedish MEMS foundry manufactures more than 100 products for its 70-plus customers, which are mostly in R&D or pilot phase. Ten customers are in “volume production,” which he defined as “more than 100 wafers per month, [having] a fully developed process, with an end-customer.” The fab runs 150-mm wafers now, but Bauer said Silex plans to add a 200-mm line in 2008 and “migrate the top five customers” to the larger wafer size.

In addition to several life science and industrial nanocoating applications done on a variety of substrates, Applied MicroStructures‘ president/CEO Jeff Chinn described several MEMS-related uses for his company’s room-temperature, molecular-vapor-deposition technology, including “surface engineering” of accelerometers, digital micromirrors, and silicon microphones. “The microphone is subjected to environments such as high humidity, spit, and dust,” he explained, “so [our tool puts down] a coating only atoms thick, providing an inert surface — like a Teflon shrink wrap — to ensure that these devices work [reliably].” Chinn said the San Jose-based company has more than 40 R&D and production systems in the field.

Nanoimprint lithography plays an increasingly important role in small-tech research, but is also starting to gain traction in certain manufacturing niches. Brian Bilenberg, CTO of NIL Technology, a Danish nanoimprint stamp manufacturer, said the company’s business is split about “50:50 between university and commercial customers” (mostly for bio or optics applications), although revenues tend to come predominantly from the industrial side.

NIL has used its e-beam-based process to fashion stamps with structures down to 20 nm, but Bilenberg notes that most buyers are “not interested in such small features,” with more demand for its UV and thermal imprint products seen in the 50-100-nm range. He expects the company to finalize another round of funding within the next few months, which will allow NIL to “speed up development and develop new applications for nanoimprint.”

For more on the NSTI Nanotech 2007 event see “NSTI panel examines challenges, advances in nanomanufacturing” and “‘Green’ is theme at NSTI Nanotech 2007”.

June 6, 2007 — Nanoexa, a provider of high-performance clean energy storage solutions, has hired Dr. Deepak Srivastava as Chief Technology Officer. With more than a decade of computational modeling experience at the NASA Ames Center for Nanotechnology, Srivastava will be responsible for overseeing technical staff as well as R&D at Nanoexa.

As co-founder and CTO of Junius Tech, a computational materials design company that later merged into Nanostellar, Dr. Srivastava helped build and advise the technical team, investigate future new product and technology areas, and provide input into Nanostellar technology development. Over the past ten years as the Senior Lead Scientist and Group Leader of Computational Materials Design and Nanotechnology at NASA Ames, he has earned a long list of accolades including the Feynman Prize in Nanotechnology Theory, the Veridian Medal Paper Awards, The Eric Reissener Medal, and the Computer Sciences Corporation Award for Technical Excellence.

Last month, Nanoexa delivered new technology to Decktron, its publicly traded subsidiary in Korea, to be used in conjunction with existing intellectual property from Argonne National Laboratory. Initially targeting the radio control toys market with its new safe, high-powered lithium batteries, Nanoexa plans to expand its reach to serve the power tool and HEV markets in the near future.


PI’s E-755 controller with an N-214 nanopositioner. (Photo: PI)

June 6, 2007 — Physik Instrumente (PI) L.P., manufacturer of nanopositioning and piezo-based precision motion-control equipment for bionanotechnology, photonics, and semiconductor applications, introduces a new ultra-high-resolution motion controller, the Nexline E-755. The controller drives the company’s Nexline high-force, precision linear motor actuators, which are designed to bridge the gap between micro- and nanopositioning technology.

The E-755 features:
+ Special control algorithms for Nexline PiezoWalk nano drives
+ 32-bit digital filters, 24-bit DAC resolution, integrated piezo amplifiers
+ Fully programmable low-pass and notch filters
+ Non-volatile user settings and last-position data

The controller promises linearity within 0.001% over the full travel range in closed-loop operation. It can run in closed- or open-loop mode, and it provides an input for the nanometer-precision incremental linear encoders that are integrated in standard Nexline actuators. Low-noise, 24 bit D/A converters enable the E-755 controller to provide picometer-level resolution in the highly dynamic short-range / dithering mode that the actuators support.

The E-755 comes with an extensive software package including drivers for National Instruments’ LabVIEW for automation of nanopositioning tasks.

June 5, 2007 — Consolidated Ecoprogress Technology Inc. of Vancouver, B.C., reports the creation of a new diaper design using a combination of reusable and flushable components. The design incorporates the company’s Flushaway nanotechnology-based pads. It will go through some initial production reviews and user tests to validate the design while a patent application is prepared, the company says.

Flushaway replaces the standard disposable component with a flushable pad and promises significantly improved performance in an eco-friendly product. The company is considering several groups to manufacture the re-usable component of the diaper.
Ecoprogress is in discussions with several groups in India, Asia, and other countries to strengthen production and delivery, and tests and amendments to the nanotechnology film are continuing.

Flushaway pads and liners are now carried in K-Mart in the US, and Coles and Priceline in Australia. Product is also available in South Africa, the US Marines Corps worldwide and Bonjour in Hong Kong. Ecoprogress’s first branded Flushaway product is a flushable feminine hygiene pad.

June 5, 2007 — GenISys GmbH, a German provider of software for optimization of microstructure fabrication processes, has formed a technology development partnership with JEOL, Ltd., and Cornell University’s Nanoscale Science and Technology Facility. The three organizations are collaborating to develop advanced solutions for direct write e-beam data preparation and electron process correction (nano-EPC) technologies for nanometer-range structures.

Each organization is leveraging its strengths within the partnership. Working with JEOL, GenISys is optimizing its high-performance Layout BEAMER data preparation and PEC software to maximize performance on JEOL’s high-end e-beam lithography systems. The Cornell Nanoscale Science and Technology Facility is providing guidance on both implementation and development strategies, leveraging its work on nanostructures used in microelectronics, optics, biomedical applications, and other functions.

Work on the three-party agreement has been in progress for about six months, with a focus on structures of some 10 nanometers or less. Because these structures are fabricated with only a few pulses of the electron beam writer, they require unprecedented uniformity, consistency, and placement. Findings of the Cornell-JEOL collaboration have already enabled upgrades of the GenISys software Layout BEAMER, which now includes an algorithm that corrects printing artifacts of this discrete writing grid. Future versions will be able to account for additional machine and process effects.

“The users of e-beam direct write need urgent solutions for advanced data preparation and correction for nanostructure applications. The strong cooperation of the equipment vendor, the user, and the software vendor is key for these developments,” said Ulrich Hofmann, founder and general manager of GenISys. “These organizations are pioneering the state of the art in nano-fabrication.”

June 5, 2007 – Immediately following product announcements by both Knowles Acoustics and Akustica, Inc., the two MEMS microphone suppliers now announce partnership in a cross-licensing arrangement that hopes to reinforce the strength of each one’s respective patent portfolios. Knowles and Akustica together lead the market for silicon MEMS microphone design, manufacturing, and sales; and both firms’ processing and packaging innovations are tightly protected by patents. The terms of the agreement are confidential, but the partners report that there will be no restrictions on sales of products from either company.

“Knowles was the first company to launch a MEMS microphone product and ramp into high volume manufacturing,” said Jeffrey Niew, Vice President and Chief Operating Officer of Knowles Acoustics, “but we have always recognized that the growth and success of the MEMS microphone industry is based on the entry of other MEMS microphone manufacturers into the market. This agreement encourages competition in the marketplace while also acknowledging that the basis of fair competition is intellectual property protection.”

“This agreement will benefit Knowles and Akustica customers”, said Jim Rock, president and CEO of Akustica. “Cooperation between the MEMS microphone market leaders creates an environment that stimulates innovation. The customers win by having a choice between microphone products and can select the solution that works best for their applications.”

Knowles Acoustics is a division of Knowles Electronics LLC, developer of microacoustic technology for the hearing health and consumer electronics industries among others. Akustica supplies digital-output microphone products for Internet telephony on notebooks to PC camera modules and mobile phones.

June 5, 2007 — The Fab Owners Association (FOA), the association of semiconductor / MEMS manufacturing executives and suppliers, has announced the formation of a semiconductor Group Purchasing Organization (GPO), to be called FOA Purchasing Partners, Inc. (PPI). PPI will be the official group purchasing organization of the FOA and its device maker members, providing procurement services, including aggregation of demand, contract negotiations and contract management for semiconductor manufacturing consumables. L.T. Guttadauro, FOA Executive Director will also serve as President of PPI.

Brent Wilson, ON Semiconductor director of wafer fab operations and FOA Director, said, “FOA Purchasing Partners, Inc. creates synergy among the device maker members to pool our consumable purchases and maximize buying power.”

The FOA’s device maker members are: AMI Semiconductor, Austriamicrosystems AG, Avago Technologies, Cypress Semiconductor, Delphi Microelectronics Center, Fairchild Semiconductor, Freescale Semiconductor, International Rectifier, Intersil, Jazz Semiconductor, MagnaChip Semiconductor, Micrel Semiconductor, Microchip Technology, NXP, ON Semiconductor, Skyworks Solutions, Spansion, and X-FAB.