October 4, 2011 – Marketwire — Deposition and etch tool supplier memsstar Limited doubled its cleanroom manufacturing space in Livingston, Scotland to meet growing micro electro mechanical system (MEMS) and semiconductor manufacturers’ demand. memsstar added new positions in logistics, administration, and skilled and semi-skilled engineering to its jobs roster in conjunction with the expansion.
memsstar took on a record $20 million+ in orders in 2010, and is projecting high double-digit revenue growth for 2011, making the expansion neccessary. The facility has been completely re-designed, with 7 flexibly configured bays ready for immediate use.
The space allows memsstar to increase capacity and more efficiently remanufacture, refurbish and repurpose semiconductor etch and deposition equipment for the secondary equipment market. memsstar’s remanufacturing division, pt35, delivers refurbished and repurposed etch and deposition equipment for MEMS fabrication and R&D as well as semiconductor manufacturing in Europe. It will use the expanded facility to reduce lead time for refurbished OEM platforms as a result of increased manufacturing efficiencies.
In addition to better efficiency in the remanufacturing side of its business, memsstar expects the additional capacity will support its Solo, Sentry and Multi process tools for advanced etch, surface preparation and deposition processes to support MEMS R&D and volume manufacturing. The new facility layout also allows memsstar to handle larger, more complex equipment.
memsstar Limited makes deposition and etch equipment and technology solutions for micro-electrical mechanical systems (MEMS) and semiconductor manufacturers. For more information, visit www.memsstar.com (New MEMS fab equipment) and www.pt35.com (secondary semi/MEMS fab tools).
October 4, 2011 — TU Delft and VU University Amsterdam researchers have demonstrated that hydrogen gas stored in a metal hydride is released faster when the metal alloy nanoparticle is smaller. The research, focused on fuel cells, is aimed at reducing the energy required for hydrogen storage.
Today, hydrogen gas is stored at 700 bar pressure in a vehicle’s fuel tank. Tanks are filled by high-pressure pumps that consume a lot of energy. Magnesium and like metals absorb hydrogen in high densities without high pressure. However, hydrogen release is difficult and slow. The research shows that magnesium nanoparticles fixed in a matrix will release hydrogen faster. The matrix prevents the nanoparticles from aggregating and matrix design helps control the hydrogen desorption pressure.
The interaction between nanoparticles and matrix increases hydrogen release speed, said Bernard Dam, Professor of Materials for Energy Conversion and Storage. The researchers demonstrated, on models comprising thin layers of magnesium and titanium, that hydrogen release increased as thinner layers were used.
The Dutch Minister of Infrastructure and the Environment, Ms Schultz van Haegen, plans to earmark EUR5 million to stimulate hydrogen transport systems in the Netherlands. German car manufacturer Daimler is also planning to build 20 hydrogen fuelling stations along Germany’s motorways. Better hydrogen fuel storage will encourage large-scale hydrogen fuel cell adoption, believe the Dutch researchers. It could also enable flex-fuel electric vehicles (EV) that travel short distances on batteries and switch to hydrogen for longer trips.
The researchers publish their findings in the October issue of the scientific journal Advanced Energy Materials. Access "Interface Energy Controlled Thermodynamics of Nanoscale Metal Hydrides" here: http://onlinelibrary.wiley.com/doi/10.1002/aenm.201100316/abstract
The research was funded by the ACTS Sustainable Hydrogen Program of the Netherlands Organisation for Scientific Research.
October 3, 2011 — Boston College researchers have discovered two early-stage phases of carbon nanotube (CNT) growth during plasma enhanced chemical vapor deposition (PECVD). A disorderly tangle of tube growth ultimately turns into orderly rows of the nanoscopic tubes.
Using a thin catalyst layer growing CNTs via PECVD, Zhifeng Ren, a Professor of Physics; and researcher Hengzhi Wang discovered two previously overlooked stages of CNT growth. In the first stage, budding tubes appear randomly entangled. Then, the tubes are partially aligned. In the final stage, tubes are in full alignment.
PECVD grows CNTs by accumulating carbon atoms onto a catalyst particle. The catalyst thickness controls these growth phases, explained Wang. "Each stage," Wang said, "has its own merit [and] purpose."
Ren and Wang say that in the process of achieving the third stage of nanotube growth, the two earlier phases of growth have gone overlooked as each stage is etched away by the next application of plasma. Further masking these early-stage carbon nanotubes is the fact that they are not present when a thick catalyst is used, according to their findings.
The first stage tubes, produced in 0-4 minutes, are described as a tangle of random large- and small-diameter carbon nanotubes. The second stage tubes, created in 4-10 minutes, are generally smaller in diameter, but taller and only partially aligned.
Wang says that while these nanotubes are not in neat, orderly rows, they do have the advantage of offer a larger volumetric density and create a larger surface area, which could be an important development in the use of carbon nanotubes in heat transfer in thermal management. A potential application could involve in applying a thin coating of carbon nanotubes to an integrated circuit in order to draw away heat and efficiently cool the device.
After ten minutes of plasma etching, the early stage nanotubes have been washed away and the third stage tubes begin to emerge in tall, ordered rows upon the substrate. At this stage, the tubes themselves are shielded by makeshift "helmets" of catalyst particles, which effectively protect them during the last part of the growth process. Eventually, these last bits of catalyst are etched away as well.
Results are published in the latest edition of the journal Nanotechnology.
October 3, 2011 — In 2006, the global market for micro-electromechanical system (MEMS) devices, which at that time included automobile airbag systems, display systems and inkjet cartridges, totaled $5.9 billion. That initial success may have been driven by the use of air-bag accelerometers in the automotive market, but the true commercialization of MEMS motion sensors began in 2005-2006 with consumer electronics and mobile phones. In fact, because of increased adoption and new applications in consumer and mobile applications, Yole Développement is now projecting double-digit annual growth in MEMS from the $8.7 billion reported in 2010, to $19.6 billion projected in 2016.
In the consumer and mobile markets, MEMS accelerometers and gyroscopes today enable cost-effective innovation, creation, and success of various motion-activated or motion-aware devices. Sensors add an intuitive man/machine interface to mobile phones and music/video players, PDAs, tablets and game controllers, by linking movements of the user’s wrist, arm, and hand to applications, navigation within and between pages, the movement of characters in a game, and much more. Almost every consumer device or cell phone today has a motion sensor embedded inside.
This successful commercialization of motion sensors was accelerated by the continual perfection of manufacturing techniques using extensions of the same high-volume, low-cost batch fabrication techniques that the semiconductor industry has used for decades. With these techniques, MEMS have achieved greater reliability and lower cost. One of the first manufacturers to dedicate an 8” wafer fabrication line solely to MEMS, STMicroelectronics, has made MEMS a centerpiece of its “Sense and Power” activities and this focus has led to further reduction in unit costs as well as higher degrees of innovation and integration.
But the emphasis on simply meeting demand wasn’t enough. As developers learned how to use the motion sensors for simple applications, they also gained trust in the performance and reliability of these sensors, built in-house sensor expertise, and were encouraged to develop more advanced applications that required even higher performance sensors.
Manufacturers throughout the MEMS industry are rising to that challenge. The future trend is to provide multi-sensor modules and deploy dedicated sensor fusion algorithms to make multiple sensors play well together. Sensor fusion is the core element for developing high-end applications, such as location-based services and dead reckoning.
Figure 1. The mechanical structure of the driving and sensing elements of a 3-axis gyroscope includes flexing silicon “fingers” that help the MEMS gyroscope detect changes in pitch, yaw and roll. SOURCE: STMicroelectronics.
At the forefront of MEMS sensor fusion development is the integration of multiple sensors, such as accelerometers, gyroscopes, magnetometers, and pressure sensors- in one package (Fig. 1). This approach is leading to giant leaps in functionality and performance in a wide variety of applications. One example of this integrated sensor approach is ST’s iNEMO. In these multi-sensor products, integrated sensors enable autonomous and automated systems by monitoring specific conditions and turning the detection of those conditions into actions with minimal or no user intervention required. Further, smart sensors combine MEMS devices with integrated processing capability to run the sensing-related algorithms independent of the main processor unit and thereby decrease overhead and, more importantly, power consumption, at the system level, which is especially crucial in battery-hungry portable devices.
Figure 2. The movements of a MEMS gyroscope bear a strong resemblance to a beating heart. SOURCE: STMicroelectronics.
We have been able to leverage the iNEMO Engine’s filtering and predictive software (that fuses the data from all the sensors) in multi-sensor modules. We fully expect that sensor fusion will significantly contribute to further commercialization of existing inertial sensors, while also accelerating the adoption of even more sensors into the consumer electronics devices and smart phones.
Jay Esfandyari is MEMS Product Marketing Manager at STMicroelectronics, 750 Canyon Dr, Suite 300, Coppell, TX, (972) 466-7619, [email protected].
This blog is provided by MEMS Industry Group (MIG). Read the first blog in this series: MEMS product development — why is it so hard? by Karen Lightman, MEMS Industry Group and Alissa M. Fitzgerald, A.M. Fitzgerald & Associates and MEMS Industry Group.
September 30, 2011 — The consumer electronics sector — smartphones, media tablets, notebooks, digital cameras — represents a promising emerging market for portable fuel cells. This market has not materialized as quickly as expected, but several fuel cell manufacturers and large-scale electronics companies are currently putting forth micro and small portable fuel cells (PFCs) for a range of portable electronics markets. Limitations in durability, performance, cost, and integration are being overcome.
According to Pike Research, 4.5 million PFCs for portable electronics will be shipped in 2017, representing a compound annual growth rate (CAGR) of 237% over the next 6 years. The "cautionary" period for fuel cell manufacturers will start to end in 2012, says research analyst Euan Sadden.
Most of the early portable fuel cells for consumer devices will be external battery chargers. High-end consumer electronics require a relatively high power density for long durations. These fuel cell chargers can provide the necessary power without a connection to the electrical grid. The higher prices of early fuel cell adoption will be less prohibitive to high-end consumers.
Most companies are developing external battery chargers that work with a range of products. In October 2009, Toshiba introduced the Dynario, a direct methanol fuel cell designed to power mobile phones, MP3 players, and other devices up to 5V. Korean and Japanese electronics developers, with their huge resource base and extensive intellectual property, are expected to play a crucial role in developing this market.
Pike Research’s report, “Fuel Cells for Portable Power Applications,” provides a comprehensive examination of applications for portable fuel cells, including portable electronics, external battery chargers, remote monitoring, and military applications. Key technology and business issues are analyzed in depth, and major players in the fuel cell supply chain are profiled. Market forecasts for unit shipments and revenue growth, segmented by application area, are provided through 2017. Learn more at http://www.pikeresearch.com/research/fuel-cells-for-portable-power-applications.
Pike Research is a market research and consulting firm that provides in-depth analysis of global clean technology markets. For more information, visit www.pikeresearch.com.
September 30, 2011 – PRNewswire — Bosch Research and Technology Center (RTC) is developing "Alan," a personal robot, as part of the Personal Robot 2 (PR2) Beta Program by Willow Garage Inc. The goal is an affordable, capable, and safe robot to serve residential users in chores, such as folding laundry, delivered to the marketplace in the next 5-10 years. Personal robotics could be worth $15 billion within the next decade.
The PR2 program has advanced sensor technology, noted Peter Marks, chairman, president, and CEO of Robert Bosch LLC and member of the Board of Management.
Halfway through the two-year program, Bosch has contributed in shared autonomy (human assistance), remote experimentation, affordable sensing (devices that process data) and hackathons (exploring new applications). In the PR2 Remote Lab, users have been developing, testing, and comparing robot algorithms from all over the world.
Bosch identified and integrated suitable sensor technologies, such as gyros, force sensors and air pressure sensors in the PR2 to enable new applications and lower production costs. Bosch pulled from its experience in automotive sensors for the project, as well as cost-efficient consumer-grade sensors from Bosch Sensortec. Providing algorithms with a focus on automatic calibration, Bosch developed the required drivers to integrate its sensors into ROS (Robot Operating System), a free, open-source system that provides resources such as hardware abstraction, visualizers, message-passing and package management. In addition to the software integration, Bosch supports the PR2 community by providing sensors free of charge.
A significant portion of robotic production costs go into the development of manipulators — commonly known as the robot’s arms, wrists and body. To reduce costs without sacrificing performance, Bosch explored the use of microelectromechanical systems (MEMS) sensors in place of more expensive encoders. MEMS allow the PR2 to navigate human environments better, grasp and manipulare objects, and perform other tasks with less-expensive hardware.
Another project developed an intuitive interface for remote teleoperators to control robots engaged in complex tasts. This shared autonomy mitigates reliability concerns and increases efficiency, Bosch reports. It reduces time and computational needs solving loops in planning, control and perception.
In collaboration with Brown University, Bosch developed an infrastructure that allows the PR2 robot to be controlled over the internet, providing a browser-based infrastructure that includes sensor feedback, 3D models, and camera streams, allowing users to see the results of their code, interact with the PR2 from afar, and ultimately, improve the robot.
To evaluate potential applications for the PR2, Bosch researchers hosted one-week project sprints called “hackathons.” During these collaborative events, the PR2 demonstrated its ability to accomplish complex tasks, such as carving wooden nameplates using Bosch’s Dremel power tool, drawing on a white board, and delivering mail autonomously.
In a recent hackathon, an autonomous beverage-serving application was debuted using the PR2 and a low-cost TurtleBot personal robot. Working with Brown University; University of California, Berkeley; and the Technische Universität, Munich, Germany; Bosch created a web interface in which the PR2 uses precise manipulation functions to retrieve a beverage from the refrigerator, while the TurtleBot delivers the beverage to the requester. Developments that employ multiple robots further enable affordability and proficiency. More expensive robots with manipulation functions can be used for more difficult tasks, while less expensive robots can be used for transport and less complex activity.
In North America, The Bosch Group manufactures and markets automotive original equipment and aftermarket products, industrial drives and control technology, power tools, security and communication systems, packaging technology, thermotechnology, household appliances, solar energy, healthcare telemedicine and software innovations. For more information, visit www.boschusa.com, or visit the company’s global site at www.bosch.com.
September 29, 2011 — Massachusetts Institute of Technology (MIT) named Vladimir Bulović as director of MIT’s Microsystems Technology Laboratories (MTL). Bulović is a professor of electrical engineering and a MacVicar Faculty Fellow.
Beginning October 1st, Bulović will replace current director Anantha Chandrakasan, the Joseph F. and Nancy P. Keithley Professor of Electrical Engineering. Chandrakasan became head of MIT’s Department of Electrical Engineering and Computer Science in July.
MTL is an interdepartmental laboratory that supports microsystems research encompassing work in circuits and systems, microelectromechanical systems (MEMS), electronic and photonic devices, and molecular and nanotechnology. Annually, MTL supports 550 students and staff who are sponsored by contracted research of more than $40 million. MTL has 35 core faculty members and 100 research affiliates.
Bulović currently leads the Organic and Nanostructured Electronics Laboratory, co-directs the MIT-ENI Solar Frontiers Center, and is the co-head of the MIT Energy Studies Program. He researches physical properties of organic and organic/inorganic nanocrystal composite thin films and structures and novel nanostructured optoelectronic devices.
Bulović has authored more than 120 research articles and holds 48 US patents in areas of light-emitting diodes (LEDs), lasers, photovoltaics (PV), photodetectors, chemical sensors, programmable memories and micro-electro machines. Bulović and his students have founded two startup companies that employ more than 120 people: QD Vision Inc., which is focused on development of quantum-dot optolectronics; and Kateeva Inc., which focuses on the development of printed organic electronics.
Bulović received his MS from Columbia University in 1993 and his PhD from Princeton University in 1998. He is a recipient of the U.S. Presidential Early Career Award for Scientists and Engineers, the National Science Foundation Career Award, the Ruth and Joel Spira Award, the Eta Kappa Nu Honor Society Award and the Bose Award for Distinguished Teaching, and was named to the Technology Review TR100 list. In 2009, he was awarded the Margaret MacVicar Faculty Fellowship, one of MIT’s highest undergraduate teaching honors.
September 29, 2011 — Ames Laboratory researchers have discovered very different reactions between various materials and graphene. Rare-earth metals, such as dysprosium (Dy) and gadolinium (Gd), react strongly with graphene, while lead (Pb) does not.
The researchers — Michael C. Tringides, an Ames Laboratory senior physicist; Myron Hupalo, an Ames Laboratory scientist; and Steven Binz, physics graduate student — deposited a few atoms of each element on the surface of graphene, observing the geometry of the atoms’ self assembly via scanning tunneling microscopy.
Lead atoms moved quickly on the graphene surface when cooled, indicating weak electron sharing with the nanomaterial, said Tringides. The dysprosium atoms moved slowly, even after heating, indicating strong interaction with the graphene. Gadolinium had an even stronger interaction.
Images. Rare-earth materials, such as dysprosium (top), behave differently than other materials, such as lead (bottom) when a few atoms are deposited on a graphene and the atoms self assemble.
These findings are the basis of materials selection for graphene-based transistors, which will require metal connections to conduct electricity. Low electrical resistance, thanks to proper metal selection, will support super-fast graphene transistors, Tringides explained.
The rare-earth islands on graphene act as tiny magnets, with very high density. Tringides notes that iron also has a similar high island density. Further research could reveal ways to use metals and graphene for memory architectures.
C.Z. Wang and Kai-Ming Ho, Ames Laboratory theoretical physicists, collaborated on the research, confirming experimental results with calculations on the bonds between graphene and the metals.
The US Department of Energy’s Office of Science funded the research.
The Ames Laboratory is a U.S. Department of Energy (DOE) Office of Science national laboratory operated by Iowa State University. The Ames Laboratory creates innovative materials, technologies and energy solutions. Learn more at http://www.ameslab.gov/
September 28, 2011 — Precision positioning systems specialist PI (Physik Instrumente) opened a direct office in Singapore to expand its Asia market presence.
PI had previously been active in the region through a distributor.
PI (Physik Instrumente) Singapore LLP will provide dedicated service and allow further development of new business in Singapore and in the greater South East Asia region.
PI manufactures precision motion control equipment, piezo systems, piezo motors and actuators for photonics, bio-nanotechnology, medical engineering and semiconductor applications.
September 28, 2011 — Lemoptix and Hamamatsu Photonics signed a long-term collaboration agreement to develop, industrialize and commercialize micro optical electro mechanical system (MOEMS) laser scanning and microprojection devices.
Lemoptix will bring its next-generation LSCAN MOEMS micromirror, a key component in its small projection optical engine MVIEW microprojection technology platforms, into Hamamatsu Photonics’s worldwide industrialization/commercialization and production capacity and experience. Hamamatsu Photonics’ MOEMS fabrication and wafer-scale assembly at its MEMS and Integral Optics facility will help develop a high-quality and mass-produced product.
The Lemoptix proprietary LSCAN MOEMS micromirror is used in microprojection, laser printing, and industrial sensor applications. MVIEW microprojection has been validated for heads-up display systems in automotive applications, and is attracting attention from mobile device makers.
Hamamatsu Photonics Solid State Division will use the collaboration to expand its MOEMS-based product line and enter a new optoelectronics segment. Hamamatsu Photonics’ sales force network will help optimize the design-in phase in the various customer projects for fast time to market.
"We look forward to seeing a new generation of Hamamatsu Photonics products based on Lemoptix technology being marketed to Hamamatsu Photonics’ broad and global client base," said Lemoptix CEO Marco Boella. Lemoptix engineers developed the technology, and made it ready for industrialization, added Hamamatsu Photonics Solid State Division Manager Koei Yamamoto. The next step was combining this product with Hamamatsu Photonics’ manufacturing skill.
Lemoptix develops next-generation micro-opto-electromechanical systems (MOEMS)-based laser scanning and microprojection technologies and products for professional and industrial applications. Learn more at www.lemoptix.com.
Hamamatsu Photonics KK (HPK) manufactures optoelectronic components and systems. Visit www.hamamatsu.com.
Jay Esfandyari is MEMS Product Marketing Manager at STMicroelectronics, 750 Canyon Dr, Suite 300, Coppell, TX, (972) 466-7619, 
