Wafer Processing

WAFER PROCESSING ARTICLES



Ultrathin chip fab process ready to ramp: IEDM presentation

12/08/2010 

ieee iedm chipfilm techJoachim Burghartz, IMS CHIPS, presented an improved version of the group's Chipfilm technology introduced at IEDM 4 years ago. The researchers now have a manufacturable process technology.

SEMI's updated forecast: 2010 stronger, 2011 weaker, 2012 mixed

12/07/2010 

As 2010 shapes up as a record year for semiconductor equipment spending, so the following two years will be a slow fall back to Earth with low single-digit overall growth, according to SEMI's updated forecasts -- though there are some interesting trends within the numbers.

Quiet revolution: MEMS thrives on application diversity

12/02/2010 

iSuppli MEMS analyst Richard Dixon analyzes one of the fastest-growing MEMS sectors today: "high-value" technologies specifically built for use in industry, medical, energy, and wired telecommunications.

Soitec and Sumitomo Electric collaborate on engineered GaN substrates

12/02/2010 

Soitec and Sumitomo Electric Industries are working together to develop engineered gallium nitride (GaN) substrates. The alliance will draw on Sumitomo Electric’s GaN wafer manufacturing technology and Soitec’s Smart Cut layer transfer technology.

Tegal-expands-ProNova-ICP-silicon-DRIE-reactor-family

12/01/2010 

Tegal Corporation (Nasdaq: TGAL) is launching a new member of its ProNova family of high-density inductively coupled plasma (ICP) reactors for the company’s DRIE series wafer processing products. The ProNova2 is targeted for fast-growing 200mm MEMS and 3D IC applications.

Wafer-level microlens molding process from EV Group pushes CMOS image sensor roadmap by eliminating glass substrates

12/01/2010 

EV Group (EVG) developed a micro-lens molding process that can enable volume production of very-high-resolution (up to 8MP and higher) wafer-level optics for use in smart phones, pico projectors and myriad other applications.

MicroProbe direct-dock extended to ADvantest T2000 SoC test

12/01/2010 

MicroProbe, wafer test technology supplier, is extending its direct-dock offering to support Advantest's T2000 SoC test platform. The T2000 platform-compatible option enables test coverage at wafer sort. More than 100 direct-dock probe cards are already in the field.

SICAS: Utilization slips, but still high

11/30/2010 

Semiconductor manufacturing seems to have slipped a bit in 3Q10, according to the latest data from SICAS, but utilization rates remain extremely high. And foundries continue to sizzle.

AMAT-conductor-etch-system-debut

11/29/2010 

Applied Materials (AMAT) speaks about its new conductor etch system -- the Centris AdvantEdge Mesa Etch -- released at SEMICON Japan this week. The company sees the gap in the lithography roadmap is an etch opportunity. Thorsten Lill, VP Etch Business Group, at Applied, told ElectroIQ that new steps in advanced transistors, double-patterning, and advanced packaging are driving growth in the conductor etch market (~$1.6B market in 2010).

Tokyo-Electron-Tanaka-Kikinzoku-Kogyo-recycle-discarded-CVD-ruthenium-precursors

11/24/2010 

Tokyo Electron Limited and Tanaka Kikinzoku Kogyo K.K. have developed a sucessful recycling process for ruthenium precursors (CVD-ruthenium material) used in next-generation semiconductor miniaturization technology.

Mattson-wins-etch-order-for-WLP-facility

11/23/2010 

Mattson Technology Inc. (NASDAQ: MTSN) received a repeat order for the Alpine etch system from a leading semiconductor manufacturer. The system will be used in the customer's leading-edge 300mm packaging facility in Asia for advanced wafer-level packaging processes.

CMP-retaining-rings from Willbe use molded Victrex PEEK design

11/23/2010 

cmp retaining ringWillbe S&T selected VICTREX PEEK polymer as the material in its chemical mechanical planarization (CMP) retaining rings. Willbe S&T’s insert molded CMP ring provides better performance, longer life and reduced cost compared to traditional two-piece bonded type CMP retaining rings made with stainless steel and polyphenylene sulfide.

optimized-cylinder-materials-for-hydrogen-bromide-for-silicon-etch

11/15/2010 

Minimize silicon trench etch process variations with optimized cylinder materials for hydrogen bromide deliveryHBr with consistently low water vapor levels is critical to prevent delivery system corrosion and device performance issues during trench etch for CMOS fabrication. Jianlong Yao et al, Matheson, present the effect of cylinder material on delivered moisture concentration in gas phase HBr. Polished AISI Cr-Mo steel, Nickel-lined AISI Cr-Mo steel, and 316L stainless steel cylinders show markedly different results.

CMP-R-and-D-enhanced-with-Araca-Entrepix-partnership

11/15/2010 

Targeting CMP consumables suppliers, commercial device manufacturers, and academic R&D organizations, the agreement enables customers to leverage the combined strengths of both companies with in-depth analysis and fundamental research for virtually any aspect of CMP on any material.

CD-SEM-metrology-tool-from-Advantest debuts for next-gen photomasks

11/12/2010 

Advantest Corporation released a SEM-based critical dimension (CD) measurement system for next-generation photomasks and patterned media. The E3630 is fully compatible with Advantest’s existing E3610/E3620 CD-SEM measurement systems and software, and boasts 30% improved linewidth repeatability.

Packaging-providers-growing-faster-than-semiconductor-market-Gartner-forecast

11/12/2010 

Packaging providers outgrowing semiconductor fab market: Gartner forecastJim Walker, research VP at Gartner, told attendees at the Gartner Semiconductor Briefing (11/4/10, San Jose, CA) that, after declining 14.7% in 2009, the outsourced semiconductor assembly and test services (OSATS) market will expand by 37% this year, and by 6.2% in 2011.

LEDs-ramp-MOCVD-reaps-benefit-Gartner-forecast

11/12/2010 

MOCVD equipment and the LED market: Gartner forecast through 2020According to Dean Freeman, research VP at Gartner, the LED market will see ~11% growth in 2010, and ~35% growth in 2011. Reaping the benefits of the accelerating interest in LEDs is the MOCVD equipment market.

DCG-Systems-P3X-Cobra-circuit-edit-FIB-system

11/11/2010 

DCG Systems announced the P3X Cobra FIB circuit edit system for complex edit challenges, even at advanced 22 nm device process technologies. The P3X Cobra delivers ion beam performance from 2keV to 30keV beam energies.

Bond-align-mask-align-SUSS-MicroTec-Fraunhofer-collab

11/11/2010 

SUSS MicroTec and Fraunhofer for Surface Engineering and Thin Films IST launched SELECT, a technology for bond aligners and mask aligners that selectively activates parts of wafer surfaces through plasma.

Silicon-shipments-grew-in-Q3-2010

11/10/2010 

Worldwide silicon wafer area shipments increased during the third quarter 2010 when compared to second quarter 2010 area shipments according to the SEMI Silicon Manufacturers Group (SMG) in its quarterly analysis of the silicon wafer industry.




WEBCASTS



Environment, Safety & Health

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The semiconductor industry is an acknowledged global leader in promoting environmental sustainability in the design, manufacture, and use of its products, as well as the health and safety of its operations and impacts on workers in semiconductor facilities (fabs). We will examine trends and concerns related to emissions, chemical use, energy consumption and worker safety and health.

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Wafer Processing

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As the industry moves to 10nm and 7nm nodes, advances in wafer processing – etch, deposition, planarization, implant, cleaning, annealing, epitaxy among others – will be required. Manufacturers are looking for new solutions for sustained strain engineering, FinFETs, FDSOI and multi-gate technologies, 3D NAND, and high mobility transistors.

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