11/01/1998  National Semiconductor blasted the Wall Street Journal for running an Oct. 5 front-page article that questioned worker safety at its fab in Greenock, Scotland. National said the article "ignores crucial facts and is misleading," and said "there is no scientific evidence linking the semiconductor manufacturing environment and cancer." The article features interviews with a number of former and current workers. It notes a dearth of studies on wafer fab health issues, and quotes an EPA official as

10/01/1998  The SmartControl system consists of EF-1 fan filter units that can be controlled via touch panel or personal computers. Available with HEPA and ULPA filters, the units meet requirements for cleanroom applications for the semiconductor, wafer fab, MEMS and pharmaceutical industries. According to the manufacturer, the SmartControl system allows staggered start-ups, which can result in energy savings for users. Customization is available.

09/01/1998  San Francisco -- Though many semiconductor market forecasts cite a delay in the migration from 200- to 300-mm wafer fabrication, significant R&D strides are being made. In the area of contamination control, for example, such efforts include development of an ultraclean pumping system and high-reliability gas distribution system for 300-mm wafer fabrication; the use of chromium-rich oxide passivation and fluorine passivation for contamination-free delivery of reactive and corrosive gases; and the

09/01/1998  Allen, TX -- A startup that hopes to revolutionize the semiconductor industry by replacing semiconductor wafers with spheres could alter the contamination control industry because it employs a proprietary manufacturing process that substitutes cleanrooms with alternative clean environments.

09/01/1998  NovaCel sponges and NovaPoly hemmed polyester wipers are made for use in critical and controlled environments. NovaCel is a white poly vinyl acetal sponge that can be used as a wafer polishing medium. It is available in dry or pre-moistened versions. NovaPoly wipers feature an inverted hem, which guards against the generation of particulate, according to the manufacturer. Their sturdy construction allows them to be laundered and re-used. Both the sponges and wipers come in standard and custom si

08/01/1998  The recent downturn in the semiconductor market has forced many chip makers and semiconductor manufacturing equipment developers to sharpen their pencils and find new ways to reduce costs without compromising product quality. As a result, more and more companies are discovering that wafer reclamation is an effective cost-cutting measure. In fact, some of the biggest wafer manufacturers, under pressure since the first quarter of 1996 when dynamic random-access memory (DRAM) prices dropped dramati

08/01/1998  Norwalk, CT -- Advances in membrane designs and surfaces are making the technology more beneficial to a broader range of industries concerned with contamination control, according to new findings published by Business Communications Co. (Norwalk, CT).

08/01/1998  Johnson Matthey and Air Products and Chemicals Inc. have jointly developed a palladium membrane diffusion technology that the companies claim virtually eliminates carbon monoxide, carbon dioxide and methane contamination in hydrogen gas, which is used in semiconductor manufacturing applications and can hinder device performance. The technology employs a methanation catalyst that converts the carbon monoxide and carbon dioxide to methane, allowing the palladium membrane to easily separate the che

08/01/1998  These ultraclean polyethylene gloves are suited for use by silicon growing processors and chip and wafer manufacturers. They test 5 PPMW for anti- oxidants and slip-agents and 10 PPMW for ash content, according to the manufacturer. All film is blown using certified nitrogen gas, with a gauge of 0.002 to 0.013 mil. Materials are made from selected resin and converted in a Class 100 cleanroom.

07/01/1998  Leuven, Belgium -- IMEC, a large independent research center in the worldwide field of microelectronics, is positioning itself to play a larger role in developing processing tech nologies. IMEC will focus on better integrating single steps in the manufacturing chain to create more simplified overall process technologies for the next generation of chips, optoelectronic components, microsystems, solar cells and sensors.

07/01/1998  The Isoflow technology series gas regulators dispense high-purity gases at high flow rates for multiple applications, including high-flow purging, semiconductor manufacturing, manifold and line regulation and laboratory research. Standard features include four inlet gauge selections, four outlet pressure ranges from 0 to 15 psig through 0 to 200 psig, a chrome-plated, die-cast zinc bonnet, and a captive hand knob with adjustable pressure limit. Available in brass barstock and stainless steel bar

07/01/1998  After successfully completing evaluations in the customer`s fab, FSI International Inc.`s Surface Conditioning Division received an order for $1.9 million for its Aries CryoKinetic and Excalibur Vapor wafer cleaning systems. The customer will be utilizing the systems in a single-etch process for advanced capacitor formation on its semiconductor devices.

07/01/1998  The ACM+ is an air composition monitor that detects multipoint toxic and hazardous gases in the low ppm to sub-ppm range in semiconductor manufacturing facilities. According to the manufacturer, it features a proprietary manifold assembly that can speed response time to 20 seconds per sampling port for 13 gases at a time; FTIR spectropscopy detection to prevent false alarms; and a mechanical backup pump to ensure system reliability.

07/01/1998  The High Flow OLT series ultrafiltration module is made for ultraclean, advanced water systems frequently used throughout the semiconductor manufacturing process. It features hollow fiber membranes with a smooth skin on both the inside and outside of the fibers that helps remove contaminants. The filter module has a 6,000 molecular cut-off rating and provides a clean permeate flux of 70 gpm. An outside-to-inside flow path produces ultraclean water and eliminates stagnant areas on the permeate si

07/01/1998  This 300-mm pod door opener load port is modular and allows all drive and control modules to be replaced in 15 minutes or less without disturbing minienvironments, according to the manufacturer. It can be removed and replaced without realignment or adjustments. Options include wafer mapping, E23 communications and rotating kinematic coupling.

07/01/1998  MEMC Electronic Materials Inc. modeled its 300-mm wafer pilot line in St. Peters, MO, after some of the best cleanrooms in the world -- those run by its own customers.

06/01/1998  Strasbaugh is integrating its symphony-CMP chemical mechanical planarizer with OnTrak Systems` synergy integra CMP wafer cleaning system to allow automated dry-wafer-in, dry-wafer-out CMP processing. Officials say the combined system will provide chip makers with high wafer throughput and a fully characterized CMP process as well as make better use of cleanroom space than the standalone system approach. Terms of a formal OEM agreement hold Strasbaugh responsible for sales and marketing and CMP t

05/01/1998  This portable wire stocker basket, vertical computer workstation and vertical wafer storage system is suited for Class 1 cleanroom applications in the semiconductor industry. According to the manufacturer, the workstation is configured to maximize fab space and the wafer storage system features an all-rod structure on each sliding shelf for better airflow.

05/01/1998  According to the manufacturer, this line of products is fabricated for multiple cleanroom uses. It includes wet process stations, fume hoods, bottle wash stations, quartz tube carriers, quartz tube storage cabinets, wafer transport carts, chemical transport carts, storage cabinets and racks, pass-through cabinets, desiccated cabinets, dry boxes, tool carts and custom mini-environments.

05/01/1998  Editor`s Note: This is the fifth in a series of articles celebrating the accomplishments of the distinguished members of the CleanRooms Hall of Fame.