Monthly Archives: September 2004

Sept. 17, 2004 – A Seiko Instruments Inc. unit specializing in tools for nanoscale science and technology plans to open a sales and support subsidiary in China, according to the Nikkei Business Daily.

Japan-based SII NanoTechnology Inc. will launch the business next month in Shanghai in an effort to expand the market for its environmental analysis equipment and probe microscopes. The subsidiary aims to increase Chinese sales to $18 million in 2006, up from $4.5 million in 2003, the release said.

SII NanoTechnology, which spun off from Seiko in December, also plans to open offices in Beijing and Guangdong Province. The sites will be the firm’s first independent operations beyond Japan.

September 15, 2004 – Infineon Technologies AG said it has agreed to plead guilty to charges of DRAM memory chip price-fixing from the US Department of Justice, and will pay a $160 million fine, one of the biggest antitrust fines ever levied in the US.

Under the settlement deal, Infineon will plead guilty to a felony count of price fixing, and also cooperate with the DOJ in investigating other DRAM manufacturers, in connection with an alleged price-fixing conspiracy between July 1999 and June 2002.

The amount of the fine will be covered by the company’s 3Q profits, paid in equal installments through 2009. Infineon also said is already been in contact with certain OEM customers to work out settlements with all of them as well.

(September 16, 2004) Taipei, Taiwan&#8212A taskforce will review whether to allow Taiwanese integrated circuits packaging and testing firms to invest in China, announced Ho Mei-yueh, Taiwan’s minister of economic affairs. The taskforce will consist of representatives from the industry, government and academia. No timeframe for a decision was given.

“Taiwan’s economy will keep growing if more value-added industries are established at home, before some mature manufacturing sectors move to China,” Mei-yueh said.

Separately, both Mei-yueh and Hu Sheng-cheng, chairman of Taiwan’s Council for Economic Planning and Development, said they are confident that Taiwan can achieve 5.87 percent economic growth in 2004. Private investments will contribute to this growth.

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Sept. 16, 2004 – The war on cancer has an unusual ally: the U.S. Department of Defense. The department has allocated more than $1.5 billion since 1992 for research efforts aimed at eradicating breast cancer. In recent years, it has added nanotechnology-based approaches to its arsenal.

Beneficiaries include startups such as Nanoplex Technologies Inc. in Menlo Park, Calif., and BioForce Nanosciences Inc. in Ames, Iowa, as well as Naomi Halas, scientist at Rice University in Houston. Their initiatives may help develop better research tools, diagnostics and therapies for understanding, identifying and treating breast cancer.

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The funds also let companies test and tweak technologies for applications as diverse as drug development and product labeling.

The department recently awarded $145,800 to Nanoplex to develop optical detection tags for early diagnosis of breast cancer. The grant allowed Nanoplex to concentrate on methods for making biocompatible nanoparticles that produce an optical signal in the presence of near infrared light.

“We wanted to work on making the particles smaller,” said Sharron Penn, Nanoplex’s director of chemistry. “If we can make them smaller, then they can move around more freely in a cell. But we also had to make the particles smaller without loss of signal.”

Nanoplex specializes in optical tags that can be used to detect cancer cells in samples of blood or tissue. The company designs nanoparticles that have metal and silica layers. Based on their composition and shape, the nanoparticles vibrate in a characteristic and measurable way when exposed to specific light waves. Near infrared light is particularly attractive for diagnosis because it can penetrate tissue and blood without causing it harm.

The work complements Nanoplex’s overall strategy to market optical tags for not only life science applications, but also for labeling products such as designer clothing to thwart counterfeiting.

BioForce Nanosciences received nearly $144,000 in 2003 to build a research tool for understanding cellular processes in cancer. The company specializes in nanoarray technologies that allow researchers to study proteins that may play a role in cancer development. The nanoarray format, which allows for thousands of tests to be performed at a time, eventually could be used for screening cancers to determine the appropriate chemotherapeutic treatment.

“The advantage to having smaller spots is you don’t have to have as much sample,” said Kristi Harkins, BioForce Nanoscience’s director of business operations. Less breast tissue would be needed from biopsies, and the small sample would suffice for multiple tests, she said.

BioForce Nanosciences is developing similar methods for detecting viruses. Both approaches rely on chips dotted with bits of antibodies or proteins that bind onto a target virus or cancer biomarker. An atomic force microscope is used to detect what gets captured. The nanoarray approach can be used for research, drug testing and monitoring, and possibly even diagnostics.

Starting in fiscal year 2001, the Army added a new category to reward innovative approaches for eliminating breast cancer. Halas was the sole recipient of the nearly $3-million Innovator Award last year, under the fiscal year 2002 budget. The next round of winners is expected after this month.

Like Nanoplex’s researchers, Halas and her team at Rice take advantage of the size and optical properties of nanoparticles to detect cancer cells. Halas invented gold nanoshells, or precisely designed particles with metallic shells surrounding a silica core. Antibodies or proteins attached to the shells latch onto the cancer cells and, when blasted with near infrared light, send an optical signal.

Halas, an engineering professor with expertise in chemistry and physics, discovered that near infrared light would heat up nanoshells and the neighboring cancer cells without harming healthy tissue. The team now is working on a noninvasive approach for simultaneously detecting and treating breast cancer.

Sept. 16, 2004 – An Amsterdam-based provider of personal navigation devices has selected MEMSIC Inc.’s thermal accelerometers to help determine travel distance in a car-based product, according to a company news release.

TomTom BV will use North Andover, Mass.-based MEMSIC’s sensors in its TomTom GO, a navigation system with software, maps and global positioning satellite capabilities. The MEMS device will be activated when the GPS signal is lost in places such as a tunnel or parking structure. TomTom GO provides navigation in 16 western European nations.

September 14, 2004 – A new joint development program between Synopsys Inc., Mountain View, CA, and Photronics Inc., Brookfield, CT, aims to tighten the links between design software and the production of advanced photomasks for 65nm and below processes.

The collaboration will include efforts to improve the design flow, from IC layout to photomasks for alternating-aperture phase-shift masks (AAPSM). The efforts also will target improved yields and cycle times for masks using strong resolution enhancement techniques (RET), as well as shorter turnaround times for mask inspection, the two companies stated.

Some of the first results from the collaboration could make their way into new releases of software and photomask services in 2005, said Tracy Weed, director of product marketing for Synopsys. A timeline for the rollout of enhancements to design-for-manufacturing (DFM) software is not yet available, but Synopsys and Photronics are expecting advances across all advanced mask technologies, he added.

While AAPSM are getting a great deal of the attention in the joint program, enhancements are also planned for attenuated and binary mask sets. “Projects and improvements are aimed at fracturing algorithms, de-slivering, reduced shot count, and other capabilities, all of which play into improving the design-in/mask-out turnaround time and flow,” Weed added.

The joint program is an outgrowth of an ongoing relationship between design software supplier Synopsys and photomask maker Photronics, one of Synopsys’ largest customers for its mask data-preparation tool, according to Weed. Improvements from the program will be shared with other Synopsys DFM customers, including photomask makers, he added.

A “next phase” in the program likely will address emerging requirements for advanced masks in 193nm immersion lithography, including the modeling impact of index matching fluids (in this case, water), which will affect optical proximity correction modeling, Weed noted. — J.Robert Lineback, Senior Technical Editor

September 14–Mykrolis Corporation, a leading supplier of components and subsystems to the semiconductor industry, today announced that it has shipped four Aeronex Infinity Gas Purification Systems to a major epi-wafer manufacturer located in Tainan, Taiwan. The systems–two EGPS12 I Series, an EGPS12 H Series, and an EGPS8 SK Series–will be used to purify process nitrogen, hydrogen, and ammonia used in the production of LED chips and will be installed this month. The Aeronex systems will help the epi-wafer manufacturer reduce production costs and achieve a higher and more consistent production yield.

“As part of Mykrolis’s overall strategy to continue expanding its Asia customer base, this selection of Aeronex Gas Purification Systems is a breakthrough in meeting overall MOCVD bulk purification needs in H2, N2, and NH3,” said Jay Hamidi, director of technology for the gas microcontamination control business at Mykrolis. “We are pleased to be recognized by this customer and look forward to providing them with the most innovative, gas purification technologies available.”

Dual-bed, self-regenerating Aeronex Infinity Gas Purification Systems deliver a continuous supply of pure gas and remove contaminants to sub-ppb (part-per-billion) levels, with some to ppt (part-per-trillion) levels, needed to purge contaminants and protect the process. They are available in several different gas series to generate ultra high purity H2, NH3, and inert gases.

September 15, 2004 – Major Japanese electronics manufacturers Canon Inc. and Toshiba Corp. have agreed to jointly develop, make and sell next generation FPDs that are thinner than conventional flatscreens.

Next month, the two companies will set up a joint venture to make surface-conduction electron-emitter display (SED) panels in Hiratsuka, Kanagawa prefecture, southwest of Tokyo, with initial capital of 1.0 billion yen ($US9.1 million).

Canon will hold a majority 50.002% stake in the venture, SED Inc., and Toshiba the remaining 49.998%, the two companies said, adding that the venture will hire 300 employees by January.

SED Inc will begin mass production of SED panels in 2005, but the two firms did not disclose any sales and production targets for the venture.

The announcement came after Canon said last weekend it would open its largest research and development center at its headquarters in Tokyo at a cost of at least 25 billion yen.

September 14, 2004 – Synopsys Inc., Mountain View, CA, and Photronics Inc., Brookfield, CT, are forming a joint program to improve design-for-manufacturing (DFM) and mask synthesis for advanced photomasks.

Specifically, the two will focus on improving design flow for alternating aperture phase-shift masks, improve yield and cycle times using strong resolution-enhancement techniques, and reduce turnaround times for mask inspection using Synopsys’ DFM software tools.

September 15, 2004 – ASML MaskTools, Santa Clara, CA, and Micron Technology Inc., Boise, ID, have signed a multiyear deal to develop applications for resolution-enhancement techniques.

Under the deal, Micron will purchase ASML’s MaskWeaver for RET implementation and LithoCruiser for scanner optimization, and will supply ASML with high-end maskmaking and mask-characterization services to qualify ASML’s Twinscan ArF scanners for volume production at the 65nm and 45nm nodes.

Micron also has acquired a global license for ASML MaskTools’ IP for volume production in its fabs.