3D Integration

3D INTEGRATION ARTICLES



Report: "Astonishing" evolution in 3D ICs, TSVs

11/14/2009 

Updates to a pair of reports from Yole Developpement aim to help better identify remaining integration challenges and high-volume production implementation strategies for 3D ICs and through-silicon vias (TSV).

Micron sampling new NAND+DRAM multichip package

11/04/2009 

Micron Technology says it is now sampling a multichip package combing its 34nm-based 4Gb SLC NAND flash and 50nm-based 2Gb low-power DDR DRAM memories, a combination it says offers better cost and power savings for mobile devices.

Alchimer: Higher-AR TSV saves $700/wafer

11/04/2009 

A new study suggests that through-silicon vias (TSV) with higher aspect ratios (20:1 or 10:1, vs. 5:1) offer a significant payback by saving space on a die, up to $700 per wafer.

Avoiding ASIC expense and risk with SiCB technology

10/26/2009 

Embedded computing modules employing "silicon circuit board" technology as an alternative to expensive ASIC developments offer advantages in performance and power for integrating memory and logic -- and are a practical alternative to 3D integration due to thermal and supply chain issues, explains siXis' David Blaker.

Allvia buys old ETEC site for manufacturing ramp

10/22/2009 

Specialty TSV foundry Allvia is expanding its manufacturing capabilities away from high-cost Silicon Valley to a newly-purchased facility in Oregon, a site with its own chip-equipment pedigree.

IMEC: 3D challenges, integrating DRAM on logic

10/20/2009 

Bart Swinnen, IMEC's director of interconnect and process technology unit, discusses with SST/AP the research center's 3D program, from its annual press event in Leuven, Belgium.

ITRI adds AMAT tools for 3D IC work

10/16/2009 

Taiwan's Industrial Technology Research Institute (ITRI) will add Applied Materials to its partners for developing 3D chip stacking technology, by placing "a full line" of AMAT processing tools in its labs.

IMEC sets major step towards 3D integration of DRAM on logic

09/30/2009 

IMEC and its 3D integration partners have taped-out Etna, a new 3D chip integrating a commercial DRAM chip on top of a logic IC. The new 3D stack resembles as close as possible to future commercial chips. It consists of a 25µm thick logic die on top of which a commercial DRAM is stacked using through-silicon vias (TSVs) and micro-bumps.

Elpida stacks 8 DRAMs with TSV

09/16/2009 

Elpida Memory recently pushed vertical stacking of DRAM to new heights by connecting eight 1G chips using through-silicon vias, creating what it calls the world's largest-capacity DRAM with ~8GB of storage.

PoP Device Reliability with Various Underfill Methods

08/28/2009 

Vicky Wang, Henkel Loctite (China) Co. Ltd. and Dan Maslyk, Henkel Corp. show how underfill type and strategy will be key to enabling highly reliable PoP devices. Few studies have evaluated the effects of the underfilling strategy — such as underfilling the bottom component only or underfilling both top and bottom components — or the effects of solder alloy choice on the reliability of PoPs. This article presents findings from a recent study on the drop test reliability of PoP devices as a function of underfill dispensing type and PoP ball alloy type.

Bart Swinnen, IMEC, Discusses TSVs

08/28/2009 

In this video interview from SEMICON West 2009, Bart Swinnen, reviews the established interconnect bonding and through-silicon via (TSV) technologies at the system-integration level. He also discusses the newer TSV possibilities and different application-specific TSVs.

Behind Brewer Science's wafer bonding work

08/10/2009  (August 10, 2009) SAN FRANCISCO, CA -- Karen Twillmann, executive director of corporate marketing at Brewer Science, and Dan Wallace, the company's director of 3D packaging, discusses the advances made by the company's temporary bond adhesive for wafer bond applications.

BrightSpots 3D IC Forum: Summary of Discussions

08/05/2009  The BrightSpots 3D IC Forum came to a close on Friday, July 24. Out of 3 topic areas covering technology progress, supply chain issues, and standards development, the discussions around technology progress were clearly the most active, both from a panelist and attendee perspective. What follows is a summary of each discussion. Where topics overlapped, and discussions were brief, the summaries have been combined into one.

EVGroup: Ready for whatever comes with 3D integration

08/05/2009  Steven Dwyer, VP & GM, North America at EV Group, provides highlights of 3D integration papers the company presented at SEMICON West. By achieving alignment accuracy down to 200nm, thin wafer handling at thicknesses <10μm, and 300mm-capable wafer bonding, he says the company is ready for whatever comes along.

SEMATECH's 3D work in Albany

08/05/2009  Larry Smith, sr. member of the technical staff in SEMATECH's 3D interconnect division, discusses toolset acquisitions at the U. of Albany's CNSE, where work focuses on replacing traditional global interconnect and intermediate level processes.

How CMP enables innovation in memory, 3D, MEMS

08/05/2009  Robert Rhoades, CTO, Entrepix, describes the nontraditional technology behind TFT-dual gate memory and how CMP enables that innovation among others -- e.g., TSVs, 3D packaging, MEMS, and engineered substrates.

IMEC's 3D efforts: New higher-AR TSVs for thicker dies

08/04/2009  Bart Swinnen, director of interconnect and packaging in IMEC's process technology unit, discusses the status of 3D technology efforts -- in particular, IMEC's work on TSV tech that will enable higher aspect ratio TSVs suitable for thicker dies.

SEMICON West: Jan Vardaman and Paul Siblerud Analysis

07/17/2009  Paul Siblerud, SEMITOOL, discusses the role of the EMC-3D consortium in developing new packaging technologies, such as through silicon vias (TSV). Jan Vardaman, TechSearch International, examines the barriers, and breakthroughs, around 3D integration.

EVG, AMAT pair for 3D thin-wafer bonding

07/17/2009  EV Group and Applied Materials say they will jointly develop wafer bonding processes for making through-silicon vias (TSV) in 3D IC packaging applications, working as members within the Semiconductor 3D Equipment and Materials Consortium (EMC-3D).

EVG, AMAT pair for 3D thin-wafer bonding

07/17/2009  EV Group and Applied Materials say they will jointly develop wafer bonding processes for making through-silicon vias (TSV) in 3D IC packaging applications, working as members within the Semiconductor 3D Equipment and Materials Consortium (EMC-3D).




WEBCASTS



Environment, Safety & Health

Date and time TBD

The semiconductor industry is an acknowledged global leader in promoting environmental sustainability in the design, manufacture, and use of its products, as well as the health and safety of its operations and impacts on workers in semiconductor facilities (fabs). We will examine trends and concerns related to emissions, chemical use, energy consumption and worker safety and health.

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Wafer Processing

Date and time TBD

As the industry moves to 10nm and 7nm nodes, advances in wafer processing – etch, deposition, planarization, implant, cleaning, annealing, epitaxy among others – will be required. Manufacturers are looking for new solutions for sustained strain engineering, FinFETs, FDSOI and multi-gate technologies, 3D NAND, and high mobility transistors.

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